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and metrology

Conformal doping of FINFET's : a fabrication and metrology challenge

Conformal doping of FINFET's : a fabrication and metrology challenge

... measurement and identification of conformality adequate metrology is ...levels and the degree of ...experiment and/or the Tomographic ...

1

Hierarchical Characterization Procedures for Dimensional Metrology

Hierarchical Characterization Procedures for Dimensional Metrology

... Dimensional metrology, 3D imaging systems, statistical methods, geometrical properties, GD&T 1 INTRODUCTION Dimensional metrology is concerned with all aspects of spatial ...Imaging and ...

16

Gear metrology of statistical tolerancing by numerical simulation

Gear metrology of statistical tolerancing by numerical simulation

... specification and metrology for a gear based on dimensional metrology and numerical simulation is to provide a solution which is in adequacy with the design ...manufacturer and the ...

8

Geometrical Specification Model for Gear - Expression, Metrology and Analysis

Geometrical Specification Model for Gear - Expression, Metrology and Analysis

... model and its utilization during the tolerancing ...tolerancing and metrology - GeoSpelling allows to express the specification from the function to the verification with a common ...form and ...

5

Volume 9 : Applications and Metrology at Nanometer Scale 1

Volume 9 : Applications and Metrology at Nanometer Scale 1

... Applications and Metrology at Nanometer Scale 1 initially included and by improving the set of PDEs (nonlinearity, coupling, ...systems and provides pertinent simulation ...

5

Analysis and comparison of metrology methods for quantifying micro-endmills

Analysis and comparison of metrology methods for quantifying micro-endmills

... Four metrology methods were selected for this project: the built-in laser tool sensing apparatus on the Microlution 363-S milling machine, optical microscopy, digital m[r] ...

65

Reconstruction of freeform surfaces for metrology

Reconstruction of freeform surfaces for metrology

... specifications and their machining is obtained with higher ...surfaces, and on the characterization of their ...surface and an interpolation of the point ...The metrology community ...

14

Photonic temperature and wavelength metrology by spectral pattern recognition

Photonic temperature and wavelength metrology by spectral pattern recognition

... size and simplicity that photonics may ...self-calibrating, and the precision requirements for the associated instrumentation can be considerably ...temperature and frequency/wavelength ...

15

Cellular metrology: scoping for a value proposition in extra- and intracellular measurements

Cellular metrology: scoping for a value proposition in extra- and intracellular measurements

... essential and mutually beneficial for progress toward ...chemical and physical properties of the cell, and establish quantifiable relationships across length and time ...design and ...

9

Risk minimization through metrology in semiconductor manufacturing

Risk minimization through metrology in semiconductor manufacturing

... of metrology workshops In order to improve the status of metrology workshops that exist in the Rousset site of STMi- croelectronics, a study has been carried out taking into account several ...the ...

203

Spatial and temporal metrology of coherent ultrashort pulses inthe extreme-ultraviolet domain

Spatial and temporal metrology of coherent ultrashort pulses inthe extreme-ultraviolet domain

... Abstract : Nowadays, there are three main of ultra- short pulses in the extreme-ultraviolet (XUV) spec- tral domain. High-order harmonic generation (HHG) in rare gases is able to provide attosecond pulses. Ho- wever, ...

277

Speckle Metrology

Speckle Metrology

... Twenty papers deal with metrology based on the speckle effect related to objects or scenes of interest. A first range of techniques is based on interferometry: speckle interferometry, shearing speckle ...

3

The metrology and applications of PSD (position sensitive detector) sensors for microrobotics.

The metrology and applications of PSD (position sensitive detector) sensors for microrobotics.

... time and very simple analogue signal conditioning ...the metrology of a two-dimensional PSD working alternately in direct or indirect (reflective) ...linearity and a fast response time, which ...

3

Contour based metrology: “make measurable what is not so"

Contour based metrology: “make measurable what is not so"

... 6] and very nice work from François Weisbuch et ...approach and this is the reason why a co-development program at ST with Aselta has been set to end up defining a contour acquisition and processing ...

11

Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology

Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology

... hybrid metrology that allows for the measurement of the char- acteristic dimensions of a nano-object in 3D, by combining the measurements performed with AFM and ...hybrid metrology has been recently ...

15

Fusion of High Density Low Precision and Low Density High Precision Data in Coordinate Metrology

Fusion of High Density Low Precision and Low Density High Precision Data in Coordinate Metrology

... systems and the use of computer analysis and archiving of ...first and still most common device used in coordinate metrology is the coordinate measuring machine ...construction and on ...

132

Certified reference materials available from the NRCC Biotoxin Metrology program

Certified reference materials available from the NRCC Biotoxin Metrology program

... This poster will provide an update on the biotoxin CRMs available from Biotoxin Metrology. There are two categories of materials: (a) calibration solution CRMs and (b) matrix CRMs. The former are critical ...

2

Building integrated cell-based microsystems : fabrication methodologies, metrology tools and impact on cellular physiology

Building integrated cell-based microsystems : fabrication methodologies, metrology tools and impact on cellular physiology

... This thesis describes fabrication techniques used to realize fundamentally new biological microsystems, metrology tools to interrogate such systems and live-cell repor[r] ...

126

Comparison of tactile and chromatic confocal measurements of aspherical lenses for form metrology

Comparison of tactile and chromatic confocal measurements of aspherical lenses for form metrology

... Form metrology, L-BFGS method, Profilometer, Tactile probe Both contact and non-contact probes are often used in dimensional metrology applications, especially for roughness, form and surface ...

10

Hybrid Metrology Applied to dimensional Control in Lithography

Hybrid Metrology Applied to dimensional Control in Lithography

... acquisitions and the number of different measurement configurations (different angles, different wavelengths, ...of metrology, it is possible to use an approximation of the pattern shape in order to limit ...

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