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A highly thermally stable sub-20 nm magnetic random-access memory based on perpendicular shape anisotropy

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Academic year: 2021

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Figure

diagram clearly illustrates the inability of p-STT-MRAM to maintain Δ 300  > 60 at sub-20 nm  nodes
Fig.  2.  (a)  Thermal  stability  factor  (in  logarithmic  scale)  versus  thickness  of  Co  cylindrical  storage  layer,  for  several  diameters  (color-code)
Fig.  3.  (a)  Series  of  sketches  of  the  etching  process.  The  color  grey,  red,  yellow  and  green  respectively  represent  Ta,  FM,  MgO  and  SAF
Fig. 4. (a), (b) Evolution of the resistance R as a function of a perpendicular field for MTJ of  various diameters D in the cases of a 60 nm thick storage layer of NiFe and Co respectively
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