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Calibration of humidity sensors at DBR/NRCC, Saskatoon

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Ser

THP

/

'r"

;-

N21

d

no,

1304

National Research

Conseil national

c,

2

Council Canada

de rechmhes Canada

BLDG

Division of

Division des

Building Research

recherches en biitiment

Calibration of Humidity Sensors at

DBR/NRCC, Saskatoon

by C.P. Hedlin and R.G. Nicholson

Reprinted from

Proceedings of the International Symposium on

Moisture and Humidity

Washington, D.C., April 15-18, 1985

p. 395

-

399

(DBR Paper No. 1304)

Price $1.00

NRCC 24731

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La Station rbgionale des Prairies de la Division des recherches

en bbtiment du Conseil national de recherches du Canada emploie

deux dispositifs pour gtalonner les capteurs d'humiditg.

Un

systsme

3

deux temperatures permet d'etalonner les capteurs aux

tempbratures de point de rosee allant jusqu'a environ 20°C; un

deuxibe petit systeme 3 deux tempbratures pouvant Btre plange

dans un liquide pour prevenir la condensation dans les

conduites est utilise regulierement pour des temperatures de

point de ros6e allant jusqu'a 65OC.

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MOISTURE

AND

HUMIDITY

-

Proceedings of

the

International Symposium on

Moistu

Washington,

L C ,

April 1

1985

i

Humidity

CALIBRATION

OF

HUMIDITY SENSO

r

DBRSN RCC, SASKATOON

C. P.

Hedlin

R.

G.

Nicholsan

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O ISA, 1985

C.P. Hedlin and R.G. Nicholson P r a i r i e R e g i o n a l S t a t i o n D i v i s i o n of B u i l d i n g Research Saskatoon, Saskatchewan, Canada

S7N OW9

ABSTRACT

Two d e v i c e s a r e used t o c a l i b r a t e humidity s e n s o r s a t t h e P r a i r i e R e g i o n a l S t a t i o n , D i v i s i o n of B u i l d i n g Research, N a t i o n a l Research Council of Canada. A two-temperature system p r o v i d e s f o r c a l i b r a t i o n f o r dew-point t e m p e r a t u r e s up t o a b o u t 20°C; and a small two-pressure system t h a t can be immersed i n a l i q u i d b a t h t o a v o i d condensation i n t h e l i n e s i s used r e g u l a r l y f o r dew-point

t e m p e r a t u r e s up t o 65OC. INTRODUCTION

Excess m o i s t u r e u n d e r l i e s many common problems i n b u i l d i n g s , i t s e f f e c t s e v i d e n c e d i n a m u l t i t u d e of ways

--

s t a i n i n g , r o t t i n g , mould growth, i c e l e n s i n g , b r i c k s p a l l i n g , e t c . The importance of i n t e r i o r humidity a s a s o u r c e of m o i s t u r e i n t h e f a b r i c of b u i l d i n g s h a s l e d t h e D i v i s i o n of B u i l d i n g Research, N a t i o n a l Research Council o f Canada, t o s e t up a f a c i l i t y a t t h e P r a i r i e Regional S t a t i o n (PRS) i n Saskatoon t o c a l i b r a t e humidity s e n s o r s .

Two d e v i c e s a r e c u r r e n t l y used f o r c a l i b r a t i o n work: a two-temperature "Atmosphere Producer," and a t w o - p r e s s u r e system. The two-temperature s y s t e m was developed i n t h e l a t e 1950s (1). B r i e f l y , two g l y c o l - f i l l e d b a t h s p r o v i d e independent t e m p e r a t u r e c o n t r o l f o r a s a t u r a t o r chamber and a c a l i b r a t i o n chamber. The l i q u i d i s s t i r r e d and t e m p e r a t u r e c o n t r o l l e d by on-of f h e a t e r s and r e f r i g e r a t i o n . The t e m p e r a t u r e of t h e b a t h i s measured w i t h wire-wound p l a t i n u m

r e s i s t a n c e thermometers* and a Mueller b r i d g e ( F i g u r e 1).

These t e m p e r a t u r e s a r e t a k e n t o be e q u a l t o t h o s e

F o f t h e c a l i b r a t i o n chamber a n d s a t u r a t o r chamber. A i r i s pumped round a loop; i t p a s s e s o v e r w a t e r i n t h e s a t u r a t o r chamber, moves t o t h e c a l i b r a t i o n chamber and t h e n back t o t h e s a t u r a t o r . Thus, by r e p e a t e d p a s s a g e through t h e s a t u r a t o r chamber t h e a i r i s brought e f f e c t i v e l y t o s a t u r a t i o n a t s a t u r a t o r t e m p e r a t u r e . Heat e x c h a n g e r s b r i n g t h e

I

* C a l i b r a t e d a g a i n s t a n o t h e r wire-wound platimum r e s i s t a n c e thermometer c a l i b r a t e d a t t h e Applied P h y s i c s D i v i s i o n , N a t i o n a l R e s e a r c h C o u n c i l of Canada. a i r t o t h e t e m p e r a t u r e o f t h e b a t h b e f o r e i t i s d i s c h a r g e d i n t o t h e s a t u r a t o r o r c a l i b r a t i o n chamber. The l o o p i s c l o s e d e x c e p t f o r a p i n h o l e provided t o a l l o w t h e system p r e s s u r e t o f l u c t u a t e w i t h b a r o m e t r i c p r e s s u r e .

Two manometers measure t h e d i f f e r e n c e between t h e p r e s s u r e s i n t h e two chambers and b a r o m e t r i c p r e s s u r e . The d i f f e r e n c e between t h e two v a l u e s i s t h e d i f f e r e n c e between t h e c a l i b r a t i o n and s a t u r a t o r chamber p r e s s u r e s . A c o r r e c t i o n i s a p p l i e d t o a c c o u n t f o r t h e consequent d i f f e r e n c e i n w a t e r vapour p r e s s u r e . A n a l y s i s of t h e p r o b a b l e e r r o r s i n t h e s y s t e m was c a r r i e d o u t . On t h e b a s i s of t h i s s t u d y i t was e s t i m a t e d t h a t t h e maximum u n c e r t a i n t y i n r e l a t i v e h u m i d i t y ranged from 0.03% RH a t 10% RH t o 0.40% RH a t 100% RH. The system was i n t e n d e d i n t h e f i r s t i n s t a n c e f o r c a l i b r a t i o n o f Dunmore-type s e n s o r s . Up t o 20 of them can be mounted i n s o c k e t s on a c a n t i l e v e r beam t h a t i s t h e n s e a l e d i n s i d e t h e c a l i b r a t o r chamber. The r e s i s t a n c e of e a c h s e n s o r can be checked by a s y s t e m t h a t , i n t u r n , b r i n g s t h e s e n s o r s i n t o a c i r c u i t l e a d i n g t o a r e s i s t a n c e b r i d g e .

A t h i g h r e l a t i v e h u m i d i t i e s t h e r e was some l e a k a g e i n t h e l e a d s t o t h e s e n s o r s ; i . e . , open c i r c u i t r e s i s t a n c e s a s low a s 5 megohms might o c c u r , producing a n e r r o r i n t h e measured r e s u l t . A f i x e d r e s i s t o r i s p l a c e d i n one of t h e 20 s o c k e t s f o r u s e a s a r e f e r e n c e t o warn when t h i s problem o c c u r s . Normally t h e t e m p e r a t u r e of t h e

c a l i b r a t i o n chamber i s s e t a t t h e d e s i r e d v a l u e , e.g., 20°C. The t e m p e r a t u r e of t h e s a t u r a t o r chamber changes by s t e p s t o produce a s e r i e s of dew-point t e m p e r a t u r e s ( r e l a t i v e h u m i d i t i e s ) i n t h e c a l i b r a t i o n chamber. About 314 h i s r e q u i r e d a t each new humidity l e v e l t o change t h e

t e m p e r a t u r e of t h e b a t h and a l l o w t h e s e n s o r t o r e a c h e q u i l i b r i u m .

TWO-PRESSURE SYSTEM

I n t h e two-pressure system ( 2 ) a vacuum pump i s u s e d t o draw room a i r through a s a t u r a t o r chamber, a t h r o t t l i n g v a l v e , and t h e c a l i b r a t i o n chamber a t a r a t e of a b o u t 0.05 L / s ( F i g u r e 2). Flow r a t e s much i n e x c e s s of 0.05 L / s cause s u r g i n g i n t h e a i r flow. The r e l a t i v e h u m i d i t y i s g i v e n by t h e

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r a t i o of t h e t o t a l p r e s s u r e s i n t h e c a l i b r a t i o n chamber and t h e s a t u r a t o r . The t h r o t t l i n g v a l v e i s a d j u s t e d t o produce t h e r e q u i r e d v a l u e . It i s h e a t e d a few d e g r e e s ( w i t h a 5 W h e a t e r ) t o a v o i d c o n d e n s a t i o n from t h e a d i a b a t i c c o o l i n g t h a t accompanies sudden r e d u c t i o n i n p r e s s u r e .

The humidity s e n s o r s a r e p l a c e d i n s o c k e t s mounted i n t h e c o v e r p l a t e of t h e c a l i b r a t i o n chamber. E l e c t r i c a l l e a d s t o t h e o u t s i d e a l l o w measurement o f r e s i s t a n c e . The whole assembly, i . e . ,

s a t u r a t o r chambers, c a l i b r a t i o n chamber, t h r o t t l i n g v a l v e , a n d i n t e r c o n n e c t i n g p i p i n g , i s immersed i n a l i q u i d b a t h s o t h a t t h e t e m p e r a t u r e o f t h e s y s t e m c a n be r a i s e d above room t e m p e r a t u r e w i t h o u t danger of c o n d e n s a t i o n i n t h e l i n e s . The d e v i c e i s r e g u l a r l y u s e d f o r c a l i b r a t i o n a t 6S°C and h a s been used a t h i g h e r t e m p e r a t u r e s a s w e l l . There was some concern t h a t a i r bubbled t h r o u g h w a t e r i n t h e s a t u r a t o r s would e n t r a i n w a t e r d r o p l e t s o r , a l t e r n a t i v e l y , t h a t i t would n o t r e a c h s a t u r a t i o n . It was t h e r e f o r e compared w i t h t h e Atmosphere Producer, u s i n g Dunmore s e n s o r s a s t r a n s f e r r e f e r e n c e s . Various d e p t h s o f beads were

p l a c e d above t h e w a t e r s u r f a c e t o e x t r a c t d r o p l e t s , and h u m i d i t y coming from t h e s a t u r a t o r was measured. The r e s u l t s s u g g e s t t h a t t h e

s a t u r a t o r was working a s r e q u i r e d . Agreement between t h e two c a l i b r a t i n g systems was w i t h i n a b o u t 1% RH.

CALIBRATION PROCEDURES

A v a r i e t y of t y p e s of humidity d e v i c e s were c a l i b r a t e d , i n c l u d i n g Dunmore t y p e s e n s o r s , h e a t e d e l e c t r i c a l , dew-point, and aluminum o x i d e

hygrometers. It i s sometimes n e c e s s a r y t o d e v i s e ad hoc p r o c e d u r e s f o r c a l i b r a t i n g equipment t h a t d o e s n o t f i t normal methods. For example, t h e s e n s i n g component of dew-point d e v i c e s i s o f t e n b u i l t i n t o t h e body of t h e measuring s y s t e m and cannot be p l a c e d i n t h e c a l i b r a t o r chamber of e i t h e r t h e Atmosphere Producer o r t h e two-pressure system. E i t h e r may be used a s t h e s o u r c e of a i r of known humidity. A i r i s t a k e n from one o r o t h e r and s u p p l i e d t o t h e dew-point s e n s o r . With t h e Atmosphere Producer, t h e a i r must be r e t u r n e d t o

i t t o m a i n t a i n closed-loop o p e r a t i o n . C o r r e c t i o n s have t o be made f o r p r e s s u r e changes.

Equipment i s n o t c e r t i f i e d . The t e s t s a r e c a r r i e d o u t and t h e u s e r i s p r o v i d e d w i t h t h e r e s u l t s , b u t t h e c a l i b r a t i o n procedure does n o t conform t o any e s t a b l i s h e d s t a n d a r d . The emphasis i s p l a c e d o n p r o v i d i n g a p r a c t i c a l s e r v i c e t o u s e r s of humidity equipment. N a t u r a l l y e v e r y e f f o r t i s made t o a c h i e v e a c c u r a c y , and no t e s t would be c a r r i e d o u t w i t h o u t c o n f i d e n c e t h a t r e l i a b l e r e s u l t s would r e s u l t . Humidity s e n s o r c a l i b r a t i o n (and humidity measurement) i n v o l v e s a measure of a r t a s w e l l a s s c i e n c e . The o p e r a t o r must be aware of t h e f o i b l e s of t h e c a l i b r a t i n g equipment and be s e n s i t i v e t o any v a r i a t i o n s i n t h e d a t a t h a t might i n d i c a t e a m a l f u n c t i o n i n g system. OPERATIONAL DETAILS 1 ) Sensors a r e normally c o n d i t i o n e d f o r a p e r i o d o f t i m e , e.g., Dunmore s e n s o r s r u n t o t h e t o p of t h e i r RH range. 2 ) Water i n t h e s a t u r a t o r o f t h e two-temperature system i s changed p e r i o d i c a l l y , a l t h o u g h t e s t s of "used" w a t e r w i t h a c o n d u c t i v i t y m e t e r have shown no s u b s t a n t i a l accumulation of c o n t a m i n a t i n g m a t e r i a l . The s a t u r a t o r i s charged w i t h t r i p l e - d i s t i l l e d water. 3 ) Heated e l e c t r i c a l h y g r o m e t e r s may be p l a c e d i n t h e c a l i b r a t i o n chamber of t h e Atmosphere Producer. It g i v e s o f f some h e a t , b u t t h i s is n o t a m a t t e r f o r concern s i n c e i t i s a dew-point t e m p e r a t u r e s e n s o r r a t h e r t h a n a r e l a t i v e h u m i d i t y s e n s o r .

4 ) Output i s monitored u n t i l i t i s judged t o have reached e q u i l i b r i u m b e f o r e c a l i b r a t i o n d a t a a r e t a k e n .

5 ) L a b o r a t o r y r u b b e r h o s e s i n t h e two-pressure system d e t e r i o r a t e a t h i g h t e m p e r a t u r e s and must b e r e p l a c e d a p p r o x i m a t e l y once a y e a r .

6 ) S i l i c o n e g r e a s e i s used t o e n s u r e t h a t t h e g a s k e t s e a l s t h e c o v e r o f t h e two-pressure u n i t t o t h e body of t h e c a l i b r a t i o n chamber. The s e a l i n g method h a s proved t o be v e r y e f f e c t i v e . On o n l y one o c c a s i o n i n n e a r l y 20 y e a r s d i d a l e a k o c c u r t h a t damaged s e n s o r s . 7 ) Two-pressure s a t u r a t o r chambers a r e f l u s h e d o u t p e r i o d i c a l l y w i t h h o t w a t e r t o remove contaminants.

CALIBRATION OF DUNMORE-TYPE SENSORS

The m a j o r i t y of t h e c a l i b r a t i o n work h a s been done o n D u n m o r e t y p e h u m i d i t y s e n s o r s , which c o n s i s t o f a p a i r of e l e c t r o d e s mounted on a p l a s t i c b a s e , e i t h e r wound o n a c i r c u l a r t u b e o r mounted o n a f l a t s u r f a c e . They a r e covered w i t h a t h i n f i l m o f p o l y v i n y l a l c o h o l . The l a t t e r i s p r e p a r e d w i t h v a r i o u s c o n c e n t r a t i o n s of l i t h i u m c h l o r i d e t o make s e n s o r s f o r d i f f e r e n t r a n g e s o f humidity. Any g i v e n s e n s o r c o v e r s o n l y a l i m i t e d r a n g e of h u m i d i t y , e.g., 8 0

- loo%,

70

- 85%, e t c .

Ten t o twelve i n d i v i d u a l s e n s o r s a r e normally r e q u i r e d t o c o v e r t h e f u l l range. The a c t i v e m a t e r i a l g a i n s o r l o s e s m o i s t u r e a s t h e r e l a t i v e humidty r i s e s o r f a l l s , and i t s e l e c t r i c a l r e s i s t a n c e v a r i e s o v e r a n o p e r a t i n g r a n g e of a b o u t 3 decades. C a l i b r a t i o n a t PRS i s done by exposing s e n s o r s t o a range of h u m i d i t i e s a t f i x e d t e m p e r a t u r e s , t h e n measuring t h e

r e s i s t a n c e . I n e a c h c a l i b r a t i o n a minimum of t e n p o i n t s are p r o v i d e d

--

f i v e f o r s t e p w i s e r e d u c t i o n i n humidity and f i v e f o r i n c r e a s i n g humidity. Some h y s t e r e s i s e x i s t s . A s e t o f s u c h c a l i b r a t i o n d a t a i s shown i n F i g u r e 3, u s i n g a l o g a r i t h m i c p l o t .

I n 1965 a n arrangement was s e t up t o meet t h e needs o f a g r o u p o f u s e r s who must c o n t r o l humidity c a b i n e t s a t t e m p e r a t u r e s up t o 65'C and

( s i r m l t a n e o u s l y ) r e l a t i v e h u m i d i t i e s u p t o 98%. C a l i b r a t i o n s a r e c a r r i e d o u t t w i c e a n n u a l l y a t PRS o n s u b m i t t e d s e n s o r s s i n c e d r i f t o r damage may cause changes i n t h e i r c a l i b r a t i o n . Simultaneous c a l i b r a t i o n o f g r o u p s o f s e n s o r s r e d u c e s t h e c o s t t o e a c h u s e r i n t h a t r e p e t i t i o n of t h e c a l i b r a t i o n p r o c e d u r e i s avoided.

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Using t h e d a t a and a second o r d e r r e l a t i o n l o g RH = A

+

B l o g R

+

C l o g R~ ( 1 a v a l u e of RH was found a t R = 1 megohm f o r e a c h c a l i b r a t i o n c a r r i e d o u t a t 25OC (1 megohm RH = I @ ) .

S i n c e t h e arrangement was e s t a b l i s h e d some s e n s o r s have been r e t u r n e d f o r c a l i b r a t i o n a number of t i m e s and t h e r e h a s been a n o p p o r t u n i t y t o o b s e r v e d r i f t i n c a l i b r a t i o n caused by u s e and aging. Twenty s i x s e n s o r s have been c a l i b r a t e d f o u r o r more t i m e s i n p e r i o d s s p a n n i n g 3 t o 19 y e a r s . These r e p r e s e n t two r a n g e s of humidity. Range I , c e n t e r e d a t a b o u t 8 5

-

88% RH ( 1 megohm), and Range I1 c e n t e r e d a t a b o u t 75% RH. Sensors i n o t h e r r a n g e s have been c a l i b r a t e d b u t a r e n o t i n c l u d e d i n t h i s r e p o r t . Data a r e shown i n F i g u r e 4 f o r f i v e of t h e 26 s e n s o r s . Each i s p l o t t e d a g a i n s t a range of RH v a l u e s a p p r o p r i a t e t o i t s behaviour. They were s e l e c t e d t o i l l u s t r a t e s h o r t , medium and long-term s t a b l e o p e r a t i o n and, i n one c a s e , a l a r g e d e p a r t u r e from t h e normal l-megohm range. Over t h e p e r i o d of o b s e r v a t i o n , f o u r of t h e 26 s e n s o r s changed by between 5 and 18% RH. The remaining 22 d e v i a t e d by l e s s t h a n a b o u t 2.5% RH from t h e a v e r a g e o f t h e i r high-low v a l u e s . The l a t t e r d i d n o t show a c o n s i s t e n t t r e n d , b u t u s u a l l y f l u c t u a t e d up o r down i n a n e r r a t i c manner. T h i s v a r i a t i o n c o u l d have been o c c a s i o n e d by a c t u a l changes i n t h e s e n s o r s , b u t c a l i b r a t i o n e r r o r may a l s o be a f a c t o r .

The s e n s o r s may be d i v i d e d i n t o two c a t e g o r i e s , t h o s e t h a t performed c o n s i s t e n t l y w i t h i n f 2 + % RH and t h o s e t h a t d i d n o t . It seems l i k e l y t h a t t h e l a t t e r were damaged i n some way. It i s s u g g e s t e d t h a t i f d e s t r u c t i v e c i r c u m s t a n c e s c o u l d be avoided, t h e s e s e n s o r s might o p e r a t e f o r l o n g p e r i o d s of time w i t h i n a +2$% RH range. SUMMARY

1) Two d e v i c e s , a two-temperature system and a two-pressure system, a r e u s e d t o c a l i b r a t e humidity s e n s o r s . The Atmosphere Producer i s l i m i t e d t o a dew-point t e m p e r a t u r e r a n g e of about

-40 t o +20°C. The two-temperature system i s o p e r a t e d a t dew-point t e m p e r a t u r e s of 65°C and, on o c c a s i o n , h i g h e r .

2 ) As a v a r i e t y o f t y p e s o f humidity-sensing d e v i c e a r e c a l i b r a t e d , s p e c i a l measures must sometimes be t a k e n t o connect them t o t h e c a l i b r a t i n g f a c i l i t i e s .

3 ) Dunmoretype s e n s o r s have been c a l i b r a t e d a t r e g u l a r i n t e r v a l s f o r i n d u s t r i a l u s e , and some i n d i v i d u a l s e n s o r s have been r e - c a l i b r a t e d a number of times. The r e l a t i v e h u m i d i t i e s c o r r e s p o n d i n g t o t h e i r l-megohm r e s i s t a n c e s a t 25°C were c a l c u l a t e d . I n a few c a s e s , p o s s i b l y d u e t o p h y s i c a l damage, t h e c a l i b r a t i o n changed by a l a r g e amount. I n about 85% of t h e c a s e s

1-megohm r e l a t i v e h u m i d i t i e s remained w i t h i n a ?24% RH band. P e r i o d s of o b s e r v a t i o n ranged from about t h r e e t o 19 y e a r s . These were f o r t h e h i g h humidity range, i . e . , f o r measuring 70% RH o r higher. S e n s o r s i n lower r a n g e s may be more s u b j e c t t o d r i f t . ACKNOWLEDGEMENT The a u t h o r wishes t o e x p r e s s t h a n k s t o t h e f o l l o w i n g f i r m s f o r a l l o w i n g u s e of c a l i b r a t i o n r e s u l t s f o r t h e i r humidity s e n s o r s : Bach-Simpson L t d . , B e l l N o r t h e r n R e s e a r c h , Canadian Marconi Company, Croven C r y s t a l s L i m i t e d , Murata E r i e North America L t d . , P h i l l i p s E l e c t r o n i c s , Q u a l i t y E n g i n e e r i n g , C.R. Snelgrove Co. Ltd., Varian A s s o c i a t e s of Canada Ltd. T h i s paper i s a c o n t r i b u t i o n from t h e D i v i s i o n of B u i l d i n g Research, N a t i o n a l Research C o u n c i l of Canada, and i s p u b l i s h e d w i t h t h e a p p r o v a l of t h e D i r e c t o r of t h e D i v i s i o n . REFERENCES

1. T i l l , C.E., and Handegord, G.O., Proposed humidity s t a n d a r d , T r a n s a c t i o n s , American S o c i e t y of H e a t i n g , R e f r i g e r a t i n g and Air-Conditioning E n g i n e e r s , Vol. 66, 1960, p. 288-308. 2. Hedlin, C.P., A d e v i c e f o r c a l i b r a t i n g e l e c t r i c a l h u m i d i t y s e n s o r s , M a t e r i a l s Research and S t a n d a r d s , Vol. 6, No. 1, 1966, p . 25-29.

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RECORDER

1

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SENSOR

-

S A T U R A T O R C H A M B E R B A T H C A L I B R A T I O N C H A M B E R B A T H A TEMPERATURE CONTROLLER E LIQUID W M P

B HEAT EXCHANGER F HEATER

C RESISTANCE THERMOMETER G CALIBRATED PLATINUM D REFRIGERATION UNIT RESISTANCE THERMOMETER

F I G U R E 1

S C H E M A T I C I L L U S T R A T I O N O F T W O - T E M P E R A T U R E A T M O S P H E R E PRODUCER

MERCURY

MANOMETER MANOMETER ELECTRICAL LEADS ( A P , ) ( A P2)

f

- NINE SENSORS - ONE THERMOCOUPLE SATURATOR CHAMBERS - (2) EACH 135 mm HIGH x 3 5 mm DIA F I G U R E 2 S C H E M A T I C I L L U S T R A T I O N O F TWO-PRESSURE S Y S T E M F O R H U M I D I T Y S E N S O R C A L I B R A T I O N

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7 0 8 0 9 0 1 0 0 R E L A T I V E H U M I D I T Y . % F I G U R E 3 T Y P I C A L P L O T OF H U M I D I T Y S E N S O R C A L I B R A T I O N D A T A - l o g R V S l o g R H . V A L U E S A R E FOR A S E N S O R C A L I B R A T E D A T 2 5 ° C . DOTTED L I N E S H O W S B E S T F I T F I G U R E 4 P L O T S OF R E L A T I V E H U M I D I T I E S A T 1 m e g o h m A T 25°C F O R F I V E H U M I D I T Y S E N S O R S . V A L U E S A R E FOR C A L I B R A T I O N BETWEEN 1 9 6 5 A N D 1 9 8 4 . THE T O P F O U R S E N S O R S R E M A I N E D W I T H I N A '3% R H B A N D . THE 1 m e g o h m R H F O R THE B O T T O M S E N S O R C H A N G E D B Y A B O U T 14%. P O S S I B L Y D U E TO P H Y S I C A L D A M A G E

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