Swelling and optical properties of Si3N4 films irradiated in the electronic regime

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HAL Id: hal-00256243

https://hal.archives-ouvertes.fr/hal-00256243

Submitted on 22 Jul 2008

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Swelling and optical properties of Si3N4 films irradiated in the electronic regime

B. Canut, A. Ayari, J. Dupuis, M. Lemiti, A. Fave, S. Ramos

To cite this version:

B. Canut, A. Ayari, J. Dupuis, M. Lemiti, A. Fave, et al.. Swelling and optical properties of Si3N4

films irradiated in the electronic regime. The Seventh International Symposium on Swift Heavy Ions

in Matter, Jun 2008, Lyon, France. �10.1016/j.nimb.2009.02.023�. �hal-00256243�

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