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On the Parameter-dependent H ∞ control for MEMS gyroscopes: synthesis and analysis

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HAL Id: hal-02505581

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Submitted on 26 Apr 2020

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On the Parameter-dependent H control for MEMS gyroscopes: synthesis and analysis

Fabricio Saggin, Jorge Ayala-Cuevas, Anton Korniienko, Gérard Scorletti

To cite this version:

Fabricio Saggin, Jorge Ayala-Cuevas, Anton Korniienko, Gérard Scorletti. On the Parameter-

dependent H

control for MEMS gyroscopes: synthesis and analysis. [Research Report] Ecole

Centrale Lyon; Laboratoire Ampère. 2020. �hal-02505581v3�

(2)

On the Parameter-dependent H control for MEMS gyroscopes: synthesis and analysis

Fabr´ıcio Saggin, Jorge Ayala-Cuevas, Anton Korniienko, G´ erard Scorletti

Amp`ere laboratory UMR CNRS 5005 Ecole Centrale de Lyon, Ecully, France

Abstract

This document provides further details on the paper “Parameter- dependentHcontrol for MEMS gyroscopes: synthesis and analysis”.

These details concern the choice of the weighting function parameters and the system model in pseudo-continuous time (PCT).

1 Background and objectives

The to-be-controlled system is the drive mode of a MEMS, whose model, in continuous-time (CT), is given by:

G

ω0

(s) = y(s)

u(s) = k

(s/ω

0

)

2

+ (s/ω

0

) /Q + 1 , (1) where y is the displacement of the drive mode, u is the input force, k is the static gain, Q is the quality factor, and ω

0

is the resonance frequency (in rad/s), which slowly ranges [ω

0min

, ω

0max

].

The control objectives are:

• tracking of a sinusoidal reference signal y

r

of frequency ω

0

;

• minimization of the control effort u;

• robust stability.

Moreover, to ensure high performance, the controller depends on ω

0

.

In Saggin et al. (2020), this problem is solved either for an analog or for

(3)

a digital implementation of the ω

0

-dependent controller. The solutions are based on time/frequency normalization and on the H

synthesis.

In this report, we detail the choice of the H

criterion, more specifically, the choice of the weighting function parameters, which is presented in Sec- tion 2. For the specific problem of a digital implementation of the controller, its design is based on the gyroscope model in the pseudo-continuous time (PCT). This model is developed in Section 3.

2 Choice of the weighting function parameters

In the H

synthesis, the control specifications are expressed through the choice of the weighting functions and of the weighted closed-loop transfer functions. We consider the criterion presented in Fig. 1, where we include an input disturbance d, a measurement noise n and weighting functions W

ωx0

, and we define ε = y

r

− y

m

and y

m

= y + n.

Kω0

Wωr0 Wωd0 Wωn0

Gω0

w1 yr

u + y+ ym

w2

d + w3

n +

+ Wωε0

Wωu0 z2

ε z1

Figure 1: H

criterion.

The H

problem is then: given a performance level γ > 0, compute a controller K

ω0

, if there is any, such that k P

ω0

? K

ω0

k

< γ. If this problem has a solution for γ = 1, then the following H

criterion is also ensured:

W

ωε0

T

yr→ε

W

ωr0

W

ωε0

T

d→ε

W

ωd0

W

ωε0

T

n→ε

W

ωn0

W

ωu0

T

yr→u

W

ωr0

W

ωu0

T

d→u

W

ωd0

W

ωu0

T

n→u

W

ωn0

<1. (2) Then, with the following weighting functions

W

ωε0

(s) = 1 M

ε

(s/ω

0

)

2

+ (s/ω

0

) α

ε

+ 1 (s/ω

0

)

2

+ (s/ω

0

) α

ε

A

ε

/M

ε

+ 1 , W

ωu0

(s) = M

u

(s/ω

0

)

2

+ (s/ω

0

) α

u

A

u

/M

u

+ 1

(s/ω

0

)

2

+ (s/ω

0

) α

u

+ 1 ,

(4)

W

ωr0

(s) = k

r

, W

ωd0

(s) = k

d

and W

ωn0

(s) = k

n

,

the choice of the parameters A

ε

≤ 1, M

ε

≥ 1, α

ε

, A

u

≤ 1, M

u

≥ 1, α

u

, k

r

, k

d

and k

n

ensures the desired specifications, as follows Skogestad, Postlethwaite (2001):

• Reference tracking: (2) implies that

∀ ω, | T

yr→ε

(jω) | ≤ 1

| W

ωε0

(jω)W

ωr0

(jω) | , (3) which ensures the tracking of the sinusoidal reference signal y

r

by y

m

with a frequency equal to ω

0

, error bounded by A

ε

/k

r

and convergence speed constrained by α

ε

.

• Control limitation: (2) implies that

∀ ω, | T

yr→u

(jω) | ≤ 1

| W

ωu0

(jω)W

ωr0

(jω) | , (4)

∀ ω, | T

d→u

(jω) | ≤ 1

| W

ωu0

(jω)W

ωd0

(jω) | , (5)

∀ ω, | T

n→u

(jω) | ≤ 1

| W

ωu0

(jω)W

ωn0

(jω) | , (6) which constrains by α

u

the bandwidth of the controller and by A

u

(for frequencies close to ω

0

) and M

u

(for low and high frequencies) the control signal amplitude and, therefore, its power.

• Robust stability: finally, (2) also implies

∀ ω, | T

d→ε

(jω) | ≤ 1

| W

ωε0

(jω)W

ωd0

(jω) | (7) and ∀ ω, | T

n→ε

(jω) | ≤ 1

| W

ωε0

(jω)W

ωn0

(jω) | ,

which are respectively used to avoid pole-zero compensations and to enforce a lower bound on the modulus margin M , which is defined as M

,

1/ k T

n→ε

k

. Moreover,

k T

n→ε

k

< M

ε

/k

n

. (8)

Hence, (2) also implies M > k

n

/M

ε

.

(5)

Please note that the weighting functions are parameterized by ω

0

, express- ing the control specifications in continuous-time. Nevertheless, the above discussion also holds for the weighting functions in a normalized or pseudo- continuous space.

In (Saggin et al., 2020, Section 6), the control specification are:

1. track a reference signal y

r

(t) = Y

r

sin (ω

0

t) with an error ε(t) = y

r

(t) − y

m

(t) such that | ε(t) | < 10

−4

· Y

r

in steady-state;

2. the control signal amplitude is less than 0.02 · Y

r

in steady-state;

3. the closed-loop system is stable and has a modulus margin M > 1/2.

The first control specification demands | T

yr→ε

(jω

0

) | < 10

−4

, which is bounded by A

ε

/k

r

, see (3). Then, we choose k

r

= 1 and A

ε

= 5 · 10

−5

.

The third control specification demands k T

n→ε

k

< 2, which is bounded by M

ε

/k

n

, see (8). Then, we choose M

ε

= 2 and k

n

= 1.

To avoid pole-zero compensation, | T

d→u

| has to be bounded where the plant presents a resonance peak. Then, we choose k

d

= 0.05, see (7).

We choose M

u

= 400 to minimize the control signal amplitude at low and high frequencies, see (4), (5) and (6). Moreover, we choose A

u

= 0.004 to allow high controller gains around ω

0

. Note that the control signal amplitude at ω

0

(second specification) is structurally given by Y

r

/ | G(jω

0

) | and cannot be modified by the choice of the weighting functions.

Finally, α

ε

and α

u

are tuned (α

ε

= 0.2 and α

u

= 1632) to select adequate response times.

3 Details on the PCT model

Here, we intend to provide further details on G

ω0

, see (1), when analyzing its equivalent discrete-time (DT) model, G

dω0

. We highlight that the latter one takes the presence of the zero-order holder into account.

For Q > 1, the equivalent DT system G

dω0

, with sampling period T

s

, is given by

G

dω0

(z) = k b

1

z + b

2

z

2

+ a

1

z + a

2

(6)

with

a

1

= − 2e

−ω0Ts/(2Q)

cos (ω

0

T

s

) a

2

= e

−ω0Ts/Q

b

1

= 1 − e

−ω0Ts/(2Q)

sin (ω

0

T

s

)

p

4Q

2

− 1 + cos (ω

0

T

s

)

!

b

2

= e

−ω0Ts/Q

+ e

−ω0Ts/(2Q)

sin (ω

0

T

s

)

p

4Q

2

− 1 − cos (ω

0

T

s

)

!

Then, by applying the bilinear transform, we obtain G

p$0

(s

p

) = k (1 − s

p

T

s

/2) (1 + s

p

z

1

)

s

2p

+ $

0

s

p

/ Q + $

20

with

$

20

= 4 T

s2

1 − 2e

−ω0Ts/(2Q)

cos (ω

0

T

s

) + e

−ω0Ts/Q

1 + 2e

−ω0Ts/(2Q)

cos (ω

0

T

s

) + e

−ω0Ts/Q

$

0

Q = 2

T

s

1 − e

−ω0Ts/Q

1 + 2e

−ω0Ts/(2Q)

cos (ω

0

T

s

) + e

−ω0Ts/Q

z

1

= T

s

2

1 − 2e

−ω0Ts/(2Q)

1

4Q2−1

sin (ω

0

T

s

) − e

−ω0Ts/Q

1 − 2e

−ω0Ts/(2Q)

cos (ω

0

T

s

) + e

−ω0Ts/Q

For Q 1, we may approximate e

−ω0Ts/(2Q)

≈ 1 and ξ

2

≈ 0. Thus,

$

20

≈ 4 T

s2

1 − cos (ω

0

T

s

)

1 + cos (ω

0

T

s

) = ⇒ $

0

≈ 2 T

s

tan ω

0

T

s

2

,

$

0

Q ≈ ω

0

(2Q) (1 + cos (ω

0

T

s

)) = ⇒ Q ≈ Q sinc (ω

0

T

s

) and z

1

≈ T

s

2

− sin (ω

0

T

s

)

(2Q) (1 − cos (ω

0

T

s

)) = 1 2Q$

0

.

References

Saggin F., Ayala-Cuevas J., Korniienko A., Scorletti G. Parameter- dependent H

control for MEMS gyroscopes: synthesis and analysis // IFAC World Conference. 2020.

Skogestad S., Postlethwaite I. Multivariable feedback control - analisys and

design. 2001. Second. 585.

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