HAL Id: hal-02113391
https://hal.archives-ouvertes.fr/hal-02113391
Submitted on 28 Apr 2019
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Evidence for amorphous multilayered silicon obtained by deposition under modulated pressure of hydrogen
M. Vergnat, B. George, A. Bruson, G. Marchal, Ph. Mangin, J.J. Demai
To cite this version:
M. Vergnat, B. George, A. Bruson, G. Marchal, Ph. Mangin, et al.. Evidence for amorphous multilay- ered silicon obtained by deposition under modulated pressure of hydrogen. Journal of Applied Physics, American Institute of Physics, 1988, 64 (9), pp.4536-4537. �10.1063/1.341282�. �hal-02113391�
Downloaded 13 Dec 2004 to 194.214.217.17. Redistribution subject to AIP license or copyright, see http://jap.aip.org/jap/copyright.jsp
Downloaded 13 Dec 2004 to 194.214.217.17. Redistribution subject to AIP license or copyright, see http://jap.aip.org/jap/copyright.jsp
