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Negative-ion surface production in hydrogen plasmas: Determination of the negative-ion energy and angle distribution function using mass spectrometry

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Academic year: 2021

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Figure 1. Sketches of the NI trajectory between the sample surface and the mass spectrometer for the tilt angle α = 0 (a)  and α ≠ 0 (b)
Table 1: Parameters used for the SRIM calculations. a-C:H layer is modelled with a density of 2.2 g/cm 3
Figure  3. Left: normalized angular distributions  f(θ) of ions leaving the sample surface,  either given by SRIM (red) or  artificial (blue and  magenta)
Figure 4. The polar plots of NI emitted from HOPG surface (f (E,θ), grey dots, from SRIM calculations) and NI  collected by the mass-spectrometer (f’(E,θ), blue dots) as given by the model for different angles α of the sample  tilt
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