HAL Id: jpa-00229583
https://hal.archives-ouvertes.fr/jpa-00229583
Submitted on 1 Jan 1989
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PROTECTIVE CVD COATINGS FOR THE TOOL INDUSTRY : REQUIREMENTS FOR PROCESS
CONTROL AND EQUIPMENT
E. Mohn, R. Bonetti, H. Wiprächtiger
To cite this version:
E. Mohn, R. Bonetti, H. Wiprächtiger. PROTECTIVE CVD COATINGS FOR THE TOOL INDUS- TRY : REQUIREMENTS FOR PROCESS CONTROL AND EQUIPMENT. Journal de Physique Colloques, 1989, 50 (C5), pp.C5-433-C5-433. �10.1051/jphyscol:1989553�. �jpa-00229583�
JOURNAL DE PHYSIQUE
Colloque C5, suppl6ment au n05, Tome 50, mai 1989
PROTECTIVE CVD COATINGS FOR THE TOOL INDUSTRY : REQUIREMENTS FOR PROCESS CONTROL AND EQUIPMENT
E. MOHN, R. BONETTI and H. WIPRACHTIGER
Berna AG Olten, Industriestrasse 36, CH-4600 Olten. Switzerland (technical paper)
( s e e page 811)
Article published online by EDP Sciences and available at http://dx.doi.org/10.1051/jphyscol:1989553