Etude et caractérisation avancées des procédés plasma pour les technologies sub - 0.1 µm

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(1)Etude et caractérisation avancées des procédés plasma pour les technologies sub - 0.1 µm David Fuard. To cite this version: David Fuard. Etude et caractérisation avancées des procédés plasma pour les technologies sub - 0.1 µm. Micro et nanotechnologies/Microélectronique. Université d’Orléans, 2003. Français. �tel-00006610�. HAL Id: tel-00006610 https://tel.archives-ouvertes.fr/tel-00006610 Submitted on 29 Jul 2004. HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers.. L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés..

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