Ultrafast laser-induced nanostructuring of metals in regular patterns

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https://tel.archives-ouvertes.fr/tel-01842330 Submitted on 18 Jul 2018

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Ultrafast laser-induced nanostructuring of metals in

regular patterns

Chen Li

To cite this version:

Chen Li. Ultrafast laser-induced nanostructuring of metals in regular patterns. Optics / Photonic. Université de Lyon; University of Chinese academy of sciences, 2016. English. �NNT : 2016LYSES019�. �tel-01842330�

Jn MonnUniriy–Sin-Éinn

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inujcofOic,oonicnyrfrunci.

Dfnon22My2016forcoi:

Prof.Yon-fnLU (UniriyofNrk-Lincon,USA) Prin Prof.YCHENG (ECinNorUniriy) Rorur Prof.Tin-inJIA (ECinNorUniriy) Rorur Dr.Jn-Pii

COLOMBIER (Jn MonnUniriy,Sin-Éinn) Exinor Prof.JinjunYANG (NnkinUniriy) Exinor Prof.GunuCHENG (UnScincir,XIOPM)iyofCinAcyof Co-ircor Dr.RznSTOIAN (Jn MonnUniriy,Sin-Éinn) Dircor Dr. Wn-uiFAN (UnScincir,XIOPM)iyofCinAcyof Ini Prof.QinPn (NCin)ionNurScincFounionof Ini

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TrnouronirrDocurnScincn ciiOiu,ooniuyrfrunc.

Sounu22Mi2016njurycoo:

Prof.Yon-fnLU (UniriNrk-Lincon,USA) Prin Prof.YCHENG (UnirinorCin'E) Rorur Prof.Tin-inJIA (UnirinorCin'E) Rorur Dr.Jn-PiiCOLOMBIER (UniriJn Monn,Sin-Éinn) Exinur Prof.JinjunYANG (UniriNnkin) Exinur Prof.GunuCHENG (Uncinc,XIOPM)iri'Acicinoi Co-ircur Dr.RznSTOIAN (UniriJn Monn,Sin-Éinn) Dircur Dr. Wn-uiFAN c(Unincir,XIOPM)i'Acicinoi Ini Prof.QinPn (FonnurCionnionin)cinc Ini

Arc

Foconr-inucrioicurfcrucur(f-LIPSS) rccinificncnicnionuoiiyo roucnnorucurooic n. Tr niforurfcninrinnrn,noyinriooy, iiy, cnic, rkinncounrfiin. Dninon riofrinrcion,ricuryonrfunc, unurn riy,urorucninuc o-ni-i-fruncy-LIPPS(LSFLnHSFL),i orinion rnicur(┴E) or r(║E)or orizion.Conirinironiinnno-nufcurin, i orkfocuononi cniforLIPSSforion, ciyHSFLforiononicoy.

Inorroinirninoicinicofxci riinf-LIPSSforion, firoi-ro ioryourynicoicinicofxciri. Tu ininiinynicoficricfuncion riiinrinicyrocronicconfiurionn icrucur.Firrinciiuionrnuor ocronicconfiurioncnurinxciion, roniforrninoicinic.Tffcofrnin oicinicrconirinLIPSSforioncni.

B onxrin of f-LIPSSforion onix iffrnri,inoinunn,iconucoriicon, icricfuiic,in-cryuroyCMSX-4,orou oy Zr-BMGnicorronincryoy Zr-CA,  iniLIPSSforion cniincronic oin y fini-iffrnci-oin (FDTD) iuion, rocronicnryiriuionfooy ynic of oicxciion,oinoooi i u nurnri.

WfocuoncronicoriinofLIPSSforionn r oni riryfcorfor LIPSSforion. LIPSS forioncnxinyoinry ouionon urfcicronicffc.Tnry ouion iny cofroinrfrncnincinrncr urfc  (for LSFL(┴E)), in con y  inrfrnc ncrurfc (for HSFL(┴E)). Sciy,forHSFL(║E)onZr-CA,rooforion cnrioryoniniiunioroicfi-nncnroc. Toinurfcoooy irunuro fck-rinnryouionoionurfc.

Ru

L rucur rioiu  urfcinui rr focon(f-LIPSS)irn'nioncinifiucniu nrionoiiirouirnnorucurnou onuur'onoiu. Cnonniour 'inniriurfcroc,nonnriooi, ouiii, cniu, ruuconr conrfon.Sonri'inrcionr,nricuir funcur,nor'iuionyriux, iuionurcouruninuiru frunci-LIPSS(LSFL  HSFL), c'orinion rnicuir(┴E)our(║E)àoriionur. Conuuroniournno-fricion,cri concnrurcnioniforionLIPSS,n ricuirforionHSFLuriiu.

Afin'uirinicoiurnioir riux xcinforionf-LIPSS,nouon'oro iorirounfinurrinicoiu yniu riuxxci. Aini,nouononuun ruyniufoncionicriuinrinun iàconfiurioncroniuurucriin. D iuionrirrincionnuiuiiourrr fononconfiurioncroniucnucour 'xciion,roninicoiurnioir.Lff inic oiurnioiron rinco n cniforionLIPSS.

Surxrincforionf-LIPSSurix riuxiffrn,incunuunn iu,uiiciu iconucur,  iicfonu icriu,unuri onocriin CMSX-4,unior Zr-BMGon icriincorronnZr-CA,nouuioncni forionLIPSSnoincroniur iuioniffrncfininoinor(FDTD), iàiriuion'nricroniuuii r yniu'xciionoiur'ouionoooi cnoriuionriux.

Nounouconcnronur'oriincroniu forionLIPSSronunfcurrincioni urforion. E urxiu r ouion  'nrioururfcrffcroniu.L ouion'nriroinrincin'inrfrnc

nrrincinonurfciffu(ourLSFL (┴ E)),cor'inrfrncnronurfc iffu(ourHSFL(┴E)).Scin,ourHSFL(║E)ur Zr-CA,nouonrooucnrioforionron urrocuiniiuxionniorouc.L oooi  urfc, oun c nor 'iuion r,inuiunouion'nrioururfcfini ifirrrocion.

Con

n



1 Inroucion 1

2 GnrcofLIPSS 6 2.1InroucionofLIPSS∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙6 2.2 McniofLIPSS∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙8 2.2.1TSiiffrcionory∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙10 2.2.2Surfconorion(SPP) i LIPSSforion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙12 2.2.3FDTD-cronic(EM)roc∙∙∙∙∙∙∙∙∙13 2.2.4 Sf-ornizion o  on riiniiy∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙15 2.2.5Sconronicnrion(SHG)∙∙∙∙∙∙∙∙∙∙∙16 2.2.6TrninoiccouinforLIPSS∙∙∙∙∙∙∙∙∙∙16 2.3 MrirnforionunrLIPSS∙∙∙∙∙∙∙∙∙∙∙∙∙18 2.4AicionofLIPSSinriurfcrocin∙∙∙19 2.4.1Surfcin∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙19 2.4.2Triooynicrofuiic∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙20 2.4.3 Moificionofoicrori∙∙∙∙∙∙∙∙∙∙∙∙∙20 2.4.4 Mrkinncoin∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙21 2.4.5Lirinniin∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙22 2.4.6Bio-icicion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙22 2.5Cnnoorunii∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙23 2.6Concuion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙23 3 Dynicofxci ri:funnrocin oiccouinnrion 25 3.1Oicroriofoi∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙25 3.2Ur-orurinrcionioi∙∙∙∙∙∙∙∙∙∙28 3.3Trninronofourfr∙∙∙∙∙∙∙∙34 3.3.1Ecronicffc∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙34 3.3.2Licrucurffc∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙38 3.3.3Ponicffc∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙38 3.4Trninronoficonucorourfr∙∙39 3.5Concuion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙40 4 Dynicofxciri:Exrinofi-ro rfcoryniory 42 4.1Ti-roiory∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙43 4.2Trninronofiiconourfr∙∙∙∙∙∙∙∙∙45 4.2.1Tcronicnoicroriofincry

iicon∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙45 4.2.2 Murnof ui-u oificion rooniicon∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙45 4.2.3 Murnofrninoicinic

ofxciiiconinrufuncrn∙∙∙∙∙46 4.3Trninronofunnourfr∙∙∙∙∙∙∙52 4.4TrninronofBMGourfr∙∙∙∙∙∙∙∙∙56 4.5Concuion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙60 5 LIPSSxrinoncri 62 5.1LIPSSxrinu∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙63 5.1.1LIPSSxrinonunn∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙64 5.1.2LIPSSxrinoniconucor(Si)∙∙∙∙67 5.1.3LIPSSxrinonicricfuiic∙∙69 5.1.4LIPSSxrinonin-cry uroyCMSX-4∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙73 5.1.5LIPSSxrinonorouoyZr-BMG nicorronincryoyZr-CA∙∙∙∙∙∙∙∙77 5.2CryizionffcurinfionofZr-BMG∙∙∙∙82 5.3Concuion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙83 6 LIPSSforion cninroof icro/ nno-rucur 85 6.1FDTDo∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙86 6.2FDTDiuiononSiory∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙88 6.2.1SioryouLIPSSforonGnA∙∙∙88 6.2.23D-FDTDiuionouLIPSSonGnA∙91 6.2.3FDTDiuiononnryiriuioninuc ynnocironurfc∙∙∙∙∙∙∙∙∙∙∙∙95 6.3Locizurfcon(LSP)ncrin cronic(SEW)∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙98 6.4Trooficro/nno-rucurinLIPSSforion∙102 6.4.1 Micro/nno-rucururinLIPSSforion onZr-BMG∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙102 6.4.2Enry ouioninucyinurfc nnorucur∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙102 6.4.3LSFLforionfrouicrincnr∙107 6.5Roofon-inionnno/icrorucurn ooryfcinLIPSSforion∙∙∙∙∙∙∙∙∙∙∙∙∙∙111

6.5.1Lruxour ifixorizion ircion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙111 6.5.2Effcofryinorizionircionon

roo∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙114 6.5.3FDTDiuiononffcofinr

roo∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙115 6.6FDTDiuionforHSFLforion∙∙∙∙∙∙∙∙∙∙∙118 6.6.1HSFL(┴E)onCMSX-4∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙118 6.6.2HSFL(║E)onCA∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙122 6.7FDTDiuionfor LIPSSforionon

fuiic∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙130 6.8Concuion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙132 7 Concuionnrci 135 7.1Concuion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙135 7.2Prci∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙137 Biiory 139

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

ion

Nnonufcurin i  inuri-c nufcur of nnocnooy- ojc, ii onocon riiiy. Tiinoc-u,ri, n co-ffci nufcurin of nnoc ri, rucur, ic, n y.Nnonufcurincnirororiofri, kinronr,ir,orur,infuncionn ccii. In c of urfc rn x incu r-rn, ni-rfci, f-cnin, urio- or infrr-rin, nifo, niicroi, crc-rin, cricyconucifuncionizurfcnoon[NNI16]. Aonnnonufcurincnooi,urfroffrn xcncciyfori-ffcifricion,roi nnoccnriyci.

Sincinnionofrin1960[Mi60],rourc orinconinuouon.Norourccn ci irnof nfrouriooinfrr, ouu ofroconinuououroru,nn ur-ikorof1022_W/c2_{,uofiofriiic} oic.Duo uicoicinroinofnry, i n c, r cn ify  ruirn of  nufcurininrnof cro-c. Aonrr ourcofcoic,urfr,ciyfoconr (f),crncinificfioourfnon. Tiinioic oion,rniionorforion nrkinofciconinioinofcronic xciion,yonornruiiriucofyic, ciryniooy. Duourfcrcriic,fr uircyxcicronicyicoccurucfr nrxionin oic y. T cifici couinnxciionnrxionoorciy conroinrcionnoroucoificiononicroc. Aoninoninrc,iiuy rruiiof yiniffrcioniinciinnnocfricion.

Aconuncofiuroruurion,froo concnrrnryofonyf Joinniyuofnof TW/c2_{, yon  rucion ro of ny ri.} Furror,iinniioffronyoxin riouyunknonnon.

Infiof nufcurin,frrn: Aooi ricnrucur ifocon r,uc ,iconucor,icric,oyr,or iooiciu,no rifoi riirnrnor ou,rorfri;Bcuurrouninrinfr cininrnoffc,o-rocininon; A riyoficro-cnnno-crucurcnfricin on-rocur,forx,o,roonrinuc rioicurfcrucur(LIPSS). Morrcny,iincr ofnouuorincorcifr,frcon iorn inrun for nnonufcurin in  inury [Wn11].

A jor xi in  rrc fi of urf r nnonufcurini riurfcrocin.Ariyof rciicro-cnnno-crucurcnfricyf riononurfc,iniiyoociznryon ciiroriionn.Aroinnxi  ccur rnc ofrinuc rioic urfc rucur(LIPSS)nrin-ikon ri urfcirri iiynorycornourc. Oro50yro [Bir65],yroyujcof incrnionuonurofcinificncnooic ron,oniruniriyniiyoociznry ooicn.LIPSSrnrycini r n,ou r c of rioicii r or[BMJ+_14,SYP+_{83,BRK11],noyronnin} ccorinoircionofxciincricfi. LIPSS roi  f, rci n o-co oo for urfc icro/nno-rucurin.Frorcici,nrionof rurnnocrninLIPSScnicioninurfc ninrin n rn, noy in riooy, iiy, cnic, rkinncounrfiin [VG13, HVG12, DSS+_10, BKH+_{15]. Ginironiinfuncionizin ri,i} orkifocuononicniforLIPSSforion.

Tforion cniofLIPSSniriiiu i nnornnryorforofirriion(..ion [VRV+_{15])orinurucnonriunr,} uin forr cn of rinin or corn irriion-rfurnnon-cornro cni n ri on.Sr cni ruo xinforion of LIPSS,incuin roy o corniroc-nrizcrinninrfrnc (Si) o[SYP+_{83],oicrnin ocouo} crinroc[BRK11],urfc on orion(SPP) iLIPSSforion [MM08, DTS+_{12, OTN}+_{11, MM12],or}

crocoicf-ornizionofun r [VRV+_15].Ty inooiccouinirninoicinic,onof crinourcnnryoiion ifufinof yncroninconrion,innuyonorr ri on.Ayoiirccnci on  inrfrnc of  incin r riion i urfc-crcronic , ic,inc of  ykforofurfconorion [BRK11, OTN+_{11],uorforofcrrnoxcu(no}  xinc of cronicfi rucur riion rnn inSi o[SYP+83]).SPPinucforion oryioninrfrncofincinrfi i rinucSPPfor,or,SPPrxciunr coniionof-cin,ifficuofufiforfurfcor forrnofriroiciniconouorSPP. Frorrnciyofkininoconirionro of riu roun [SRO+_{12, AKO}+_{14] n, uy, i} nrionnouion irirriion,noyiroin iinfufiinonuconrionforrrnof coruuyroofiniiucrincnr.

Trn orkironinouionro cronicnryiriuionnifocuonynic ofoicxciion,oinoooiiirriiono,n croniciuion. Sr ri in ic, iconucinnicriciorru;izin  uin rinricuryoyinorou ncryin.

Inorroinirninoicinicofxci riin LIPSSforion, firoi-ro cniuofooynicofxci ri.Tu in iniinynicoficricfuncion rii inrinicyro cronic confiurion nic rucur.Firrinciiuionrnuoro cronicconfiurioncnurinxciion,roni forrninoicinic.

Orin LIPSSforion cni,xrinof riforionon ,iconucornicric r crriou.TnorooyofLIPSSiornnyz oiniroofurfcicro/nno-rucurinLIPSS forion.).

Tfiruionroiriuionofcronic nry on urfc. In orr o ini  ro of icro/nno-rucur in LIPSS forion, fini-iffrnc i-oin(FDTD) o[Y66]i uoccu inoonoucronicnryiriuiononurfc. A coriiiinircoriionSio. Incronicoin,LIPSSforionoriinfro inrfrncnkinofcroniconurfc, incuinurfccr ,incinr,urfcon orion(SPP)ncooiiffrcincn[GA06, LM7]. Wriouci incrinnon inoLIPSS.Scrcronic(SEW)oriin

fro  nno-rournc on urfc, u r  nnoric on urfc. T crin crcriic of nnoriciniffrn riuoocicrino urfcrouoooinoinicroofocizurfc on(LSP)onnnoric[Mi07].Srori o uo ui corn crin cnriofor or ou nry fi. Pricur  o o- n i-i-fruncy-LIPPS(LSFL n HSFL)forion r ouin.

Tiirucurfoo:

Cr2ri nrcofr-inucrioic urfcrucur(LIPSS). Afir riLIPSSroron iffrn oi uon nr-infrr f-r u irriion. Hor,LIPSSforioncnirnoyfuyunroo niunruninonrniononon uioninfi.SrLIPSSforionoriiri n fc rinrouc,incuin Siory, FDTD-EM roc,f-ornizion oofun rn LIPSS forionrciy i iurfc onorion (SPP),conronic nrion(SHG) rnin oicroriurinirriion. Wuyinrouc ri rnforionunrLIPSS,rornncnof  riinciry,cooiion,cryrucurn urfc orooy.A,oicionofLIPSSin riurfcrocin,incuinurfc in,riooy, oificion of oic rori, rkin n coin,i rinniin,io-icicion.

In Cr3, ri inyicnoninr ionrocronicxciionnrxion. Wifocu onoiccouin,fir inroucoicroriof oirify. Nx, icurioucoxrocin urfr-rinrcion. Tnrninronof niconucorourfrrrioo coxrocrocronicconfiurionn icrucur,ucoo-xciionof/-n-cron, cron-cronrizion,inrnninrnrniion, cnofcronicconfiurion,cron-icrizion, iciorrnoon.

In Cr 4, xrin y ofi-ro ioryiuinxrinirinrouc.Finy, urruonicricfuncionnoicynic ofin-cryiicon,unnn Zr-uk  (Zr-BMG)rinroucnicurciy.

Cr 5 cri xrin off-LIPSS onix iffrnri,inoinunn,iconucoriicon, icricfuiic,in-cryuroyCMSX-4,orou oyZr-BMGnicorronincryoyZr-CA.Tn orooyof LIPSSiornnyz icnnin cronicrocoy(SEM)noicforcicroco(AFM).In iion,for Zr-BMG,rucurcn iin LIPSSr ur y cron ck-cr iffrcion(EBSD). Finy, LIPSScrcriicforixrirrciynyzn uriz,roiinxrinruforiniin LIPSSforioncni.

InCr6,fir,FDTD oirifyinroucn niiuoiucof Siory. Scony, ociz urfc onin nnorucur,ir ffc on crincronic,rooficro /nno-rucurinLIPSSforionrinroucnnyzyFDTD iuion.Nx,forioncniofLSFLnHSFLon ruroyrrciynyznicu.Finy, LIPSSforiononfuiicinyzyFDTDiuion.

Finy,concuionrof Cr7ru in xrinrunicuioncion,uinforr yni of  roo LIPSS forion cnrio. T rci cion offr n i on funn uionouxrinnFDTDiuionrrin LIPSSforion,onociicion.

Cr2

Gnr

c

ofLIPSS

Inicr,nrcofr-inucrioicurfc rucur(LIPSS)rinrouc. Afir  icu riou cox rocin urfr-rinrcion. W unrinroofoicnrucurrninnirroin riforion.Scyof LIPSSroroniffrn oiuonnr-infrrf-ruirriionruriz. TnrLIPSSforionoriiirrinfc ricu. Nx, inrouc rirnforionunr LIPSS,rornncnof riin ciry,cooiion,cryrucurnurfc orooy. Finy,riooniicionofLIPSSinri urfcrocinnconuncinoicncnic.

2

.1Inrouc

ionofLIPSS

Trinucrioicurfcrucur(LIPSS)rrn ruruccionofrucurrinrinrrnn, onnouynrycornrriionon ri urfc;oxofLIPSSroninFi.2.1.In1965, Birnufiryornononofriinucy ruyroniconucorurfc，iciconiofrur rnofcrcknyofrroo(cinofou 1 )[Bir65].Ti inninofroificrrcfi ircoforioncninicionfi.In fooinyrLIPSSrcrnoronnykinof oiriforrnofruurion.Tiu rinrncofunirnononinucyi,

forinuyojcofuyofi ork. Morrcny, uroruriionrcicificnionfori oniinrininriurfc,fooini noninrxciionncronicnon-uiiriucninucno inrcionfur.Inricur,focon(f)r-inuc riornoforinionnrioiciioonc, ucrnr n [BNJ14]. Unrurf rioninrnfrofoconoicoconr, or r y of rur ri rn: o-i-fruncyLIPSS(LSFL),i-i-fruncyLIPSS (HSFL),iiffrnorinionr(║E)orrnicur (┴E)ororizion. Tyron irnof rininonirriionconiionnoinici xroino.ForxinFi2.1,LSFL(┴E) xiiyonunn,iconucorincryiicon, uk (BMG),cryoy(CA)fro BMGn uroy CMSX-4. Ty crcriz oy ic n o-nri.LSFL(║E)xionrnoficricn  or onfuiic(Fi. 2.1(c)). Hii fruncyrucurruyroronriou rii rioicii(ono100n), HSFL(║E)xionCA(Fi. 2.1()).Fi.2.1(f)onx r HSFL(┴E)co iionuroyCMSX-4.Iniion,corcro-ri (ocroo)roriirioofr icron ucirnr-n,forx,roo roroniiconinFi2.1().

In nr, LIPSS forion i ffc y irriion coniion,incn ri.Tirriionconiion incurfunc,nurofru,orizion, incinn,cnnin,c. Tyicinconiion incuir,oxyn,cuu,r,irfrciinxiuin orfcorcn oifyrorirouninrfc. Tfcorxrcicoxinfuncyffci couinncrin,yniccofncnoooi nfckiu.Iniork,iniLIPPSforion inirnironn. Mriconiionincucoxoic crcriici..rfrciinx,urfcrounnr rori,ucrcofficinnrniionoin(in oin,orizinrur,c).

Ayicroucofrionorrucurin,LIPSS forioninocoxcinofyicrocro  r-ri inrcion; fro r xciion, nry oiionono ri onnonof

urfcoooi.Iuyino uicynicfix yoicnr riron.Brifrnionof xciion nrnforion roc rinroucin fooincrnifocuroncrcriicfur inoorrrucurrn.

Fiur 2.1: SEMi of LIPSS on iffrn riirri y inry-orizfru:() unn;()iconucorin cryiicon;(c)Fuiic;()Buk (BMG);()Cryoy (CA)froBMG;(f)CMSX-4.Trorizion(E)ircioniinic in()iou-rro.Noiffrncinci.

2

.2 Mcn

iofLIPSS

WnininroucoryrLIPSSiunir nonononooi,incuin [DTS+_12, GIK+_{11],iconucor[BH03, BBK}+_{02],icric[CKR04,} HCT+_{07], cric[DRW}+_{03] n oyr [BBK99]. T} coninuou r[KIA+_{11]nur ionu} urioncnnrcicriirioofou r n, iciofnro-i-fruncy LIPSS(LSFL) [BNJ14]. Unrurfrionin rnfrofoconoicoconr,xc LSFL,fin nno-rirnr iirio ucr nfofirn,iciofnr i-i-fruncyLIPSS(HSFL)[BNJ14].Furror,cor cro-riiirioinricronrn, rryofconicfurrnrinurfr

ion[BBK+_{02]. Gnry, LIPSS coyfor fr} crinnurofufuncnrin-uion ro.Tfckrocnincinrnurfc nnorucur yniornroinriforion [LCC+_{16].TLIPSSorinioniconroyorizionof} rcricfi. Hor,urfc fco yn iornroinLIPSSorinion[LCC+_16].

SrLIPSSxrinonirnofriunr iffrnrnncrriounnyzi innioricui,or,LIPSSforioncni rnoyfuyunrooniunrunino.Sr cni ruoxinforionof LIPSS, incuin roy o o corni roc–  nrizcrin ninrfrnc(Si) o [YPD+_83, SYP+_{83],  i LIPSSforion[BNJ14, SHT}+_09, OHM+_{10], urfc on orion (SPP) i LIPSS} forion[HG10,VMG07,VG08,CGB+_{12],nf-ornizion} ofun r[VRV+_{15].ProfLIPSSroroniffrn} oiuonnr-infrrf-ruirriionnroo forion cnirurizin 2-1. T in LIPSSforioncniricuinfooin.

T2-1:LirururyofLIPSSroroniffrnoi(, iconucornicric)uonnr-infrrf-ruirriion (=740-800n, =25-160f, <5kHz)nnrynorincinciniror cuu, n roo forion cni. Lic rucur: c–in-cryin, –orou; LIPSS orinion: ┴:ri in rnicuroorizion,║:riinroorizion;LIPSS forion cni: Si: Siory[SYP+_{83], SPP:urfcon}

orion,rounffc,ffc,urfc,inrfrnccni, Dru:Dru oforrninoicrori,CE:Couoxoion. Mric: –rcoor,iconucor–rncoor,icric–u coor.

2

.2

.1TS

i

iffrc



ionory

ForcicLSFLri,Sioryn iy cco criforion,  oninrfrnc nincinrnurfc-crcronic  [YPD+_83,SYP+_{83].J.E.Siooryof} LIPSSforionyociinFourircoonnofLIPSS i corronin Fourir coonn ofinoonou nry oiion n urfc [SYP+_{83]. Siory} cricricfiinniyiriuioncryn incinonin,rouurfcrion,oi iucnn.Trounofurfc rionicrcrizyfcornfiinfcorF.S

Mri

ᴧ

ᴧ

Au 580┴ [HG10,VMG07] SPP+roun+_[WG05,WG07] Cu 500–700┴ 270-370┴ [SHT+09]Surfc,_{[WG05, WG07]} Ni 750-760┴ 200║ [GCP+₁₁,_CGB+_{12]SPP+Dru}

P 550–700┴ [HG10,VMG07]SPP+roun+_[OHM+_{10]urfc}

Ti 500–700┴ 200–400┴_70–90║ [OHM+_{10] urfc .} [TAN+_06] [BKH+_12,GEI+_09,VG07]. Inrfrnc+SPP W 400–600┴ [OHM+_{10],urfc[ZMW07]}

Mo 470-720┴ _{[VG08]SPP+roun+}[OHM+10],urfc CuZn 600-680┴ [HZC+_{09]Inrfrnc+SPP} S316L 660┴ [DSS+_10] SX40Cr14 550-580┴ [BVA+10] c-InA 700 ┴ [BH03] c-Si 560-730┴ [BKH+_{12,BRK09, DIT}+_13]SPP, [YPD+_{83]Sio,} [BK10,BRK11]Sio+Dru+SPP [BBK+_02,WG07] [SRO+_12,SRO+_13] Si+Dru c-InP 590–750┴ 330–360┴ [CKR04,BMS05] c-GP 520–680┴ 150–175┴ [HCT+_07] c-ZnO 630–730┴ 200–280┴ [DRD+_09] ion 750┴ 210║ _[HZC[WMF+_09]SPP+CE+03] -SiO2 500–800 ║ 170–400 ┴ [HRK+_{12]Si+Dru} [BKH+_{12,RDH+11, SLV}+_08,RR12], [BNJ14]Surfc c-SiO2 _460-900 ║ 170-450┴ [HRK+12]Sio+Dru ri 70-170┴ [HZC+_09]SPP+CE c-SiC 500┴ 250┴ [YUK10]

fcoririoofcorrioninconurfco ickn of  , corronin o   of nnoric ic kurouurfc.FiinfcorF rrnfrcionofurfcfiuinnoric.

Fiur2.2:DrinofrincinconrouurfcinSiory.

Akcoforyofrincinconrou urfcinSioryioninFi.2.2.Trionz>0iirn rionz<0rrnukri.Turfcroun iconfininrionofickn.Tincinrior orizioncrryin corKLiincinonrou urfcnnofincinc ,iccoonnKiin orizonn.TLIPSS cori K=2/.Siory roinxrionforinoonounryoiionon urfc, icirooriono (K,Ki)×|(K)|, r fficcyfcor (K,Ki) crifficcy i ic rounoninoonounryorionK;|(K)| rrnurofiuofurfcrounK.Ii urirorornryir. Bcu|(K)|rioyforurfc ioonouy iriuroun,fficcyfcor (K,Ki)xiir kcrin K, icriniririoiciy [SYP+_83].

Si oon ounryoiion in oorni nyxrinru,ucLIPPSon  [YPD+_{83, SYP}+_{83],iconucor[YPD}+_{83, SYP}+_83, SRO+_{13]nicric[HRK}+_12].

Hor, on ii ron rici crcr on rocinfur,Si oifoiiion.Firy, Si oinroxiouion,in iconiuin coonnofcronicfiiryriion rincinrnrcoonnofcronicfi iryrurionri.TccurcyofSi oi ii.Scony,yicnurofcronicfi rucur riionrnn inSi oiiuion, ickcofurfc-crconcin

iconucor.Finy,for,xciionofurfcon ykcofriionrnnin Si o. T rioninriionrnnnurfconino cr[SYP+_83].

ToorcoroinSiory,orcni r roo,uc con ronic nrion(SHG) on urfc[BH03],rnincnofoicroriin xci ri urinr u[WMF+_{03], } f-ornizion  oniniiy of xci ri [VRV+_{15].Hor,nonofonioncnicn} xincrcriicofLIPSS.

2

.2

.2Surfc

ono

r

i

on(SPP) 

i

LIPSS

for



ion

In  Si ory, rniy or in iion o urfc-crcronic on urfc,urfc onorion(SPP) yyniornro.Si [SYP+_{83]inicforionofLSFLrioncn,} inricurconiion,nriinfroinrfrnc nincinrnSPPrforrcny ofurfccr.

Wninry orizruiirri ir-inrfcincinnof ,rioɅofLIPSS foruoinrfrncnincinrn xciSPPiiny[FS82,ZFS82,SF86,VMG07] in   (2-1) 1 R   (2-2)

Hr iincinr n, irrof ffcirfrciinxofir-inrfcforurfc on, iicricconnof.Unrinn urfirriion,ffcirfrciinx ycnn ffccrorurfcon.

C. Guoinif-LIPSSon Pn Aun foun o ccu rio of P n Au r oriyou30%inSPPory,icxiny incrinrrofrfrciinxuooffc ofurfcnno-n icro-roun, inffc [VMG07].