Modèle compact paramétrable du SCR pour applications ESD et RF

HAL Id: tel-00648390

https://tel.archives-ouvertes.fr/tel-00648390

Submitted on 5 Dec 2011

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Modèle compact paramétrable du SCR pour applications ESD et RF

Sorin Romanescu

To cite this version:

Sorin Romanescu. Modèle compact paramétrable du SCR pour applications ESD et RF. Autre.

Université de Grenoble, 2011. Français. �NNT : 2011GRENT055�. �tel-00648390�

THÈSE

Pour obtenir le grade de

'2&7(85'(/¶81,9(56,7e'(*5(12%/(

Spécialité : Optique et Radiofréquence

Arrêté ministériel : 7 août 2006

Présentée par

Alexandru ROMANESCU

Thèse dirigée par Philippe FERRARI et codirigée par Jean-Daniel ARNOULD

préparée au sein du Laboratoire IMEP-LAHC dans l'École Doctorale GHO¶(OHFWURQLTXHGH

O¶(OHFWURWHFKQLTXHGHO¶$XWRPDWLTXHHWGX7UDLWHPHQWGX Signal

Modèle compact paramétrable du SCR pour applications ESD

& RF

Thèse soutenue publiquement le 27 octobre 2011, devant le jury composé de :

M. Christian PERSON

Professeur, Telecom Bretagne, Président du Jury

M. Guido GROESENEKEN

Professeur, Katholieke Universiteit Leuven, Rapporteur

M. Christophe GAQUIERE

Professeur, Université de Lille, Rapporteur

M. Philippe FERRARI

Professeur, Université de Grenoble, Membre

M. Jean-Daniel ARNOULD

Maitre de Conférences, Université de Grenoble, Membre

M. Pascal FONTENEAU

Ingénieur STMicroelectronics, Membre

M. Charles-Alexandre LEGRAND

Ingénieur STMicroelectronics, Invité

THESIS

Submitted for the degree of

Doctor of Philosophy of the UNIVERSITY OF GRENOBLE

Speciality : Optics and Radiofrequency

Presented by

Alexandru ROMANESCU

Thesis directed by Philippe FERRARI and Jean-Daniel ARNOULD

Prepared at the IMEP-LAHC

In the Doctoral School of Electronics, Electrotechnics, Automatisation and Signal Processing

Scalable SCR Model for ESD and RF Applications

Defended on the 27th of October 2011, in front of the following committee : Christian PERSON

Professor, Telecom Bretagne, President of the Jury

Guido GROESENEKEN

Professor, Katholieke Universiteit Leuven, Referee

Christophe GAQUIERE

Professor, Université de Lille, Referee

Philippe, FERRARI

Professor, Université de Grenoble, Member

Jean-Daniel ARNOULD

Senior Lecturer, Université de Grenoble

Pascal FONTENEAU

Engineer STMicroelectronics, Member

Charles-Alexandre LEGRAND

Engineer STMicroelectronics, Invited Member

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F F n

UV /BTQH2 U#V rBi? 50 Ω `2bBbiM+2

+QMM2+i2/ iQ i?2 Lq U+V rBi? 50 Ω `2bBbiM+2 +QMM2+i2/ iQ i?2 Sq

6B;m`2 kXkj,

UV K2bm`2K2Mi

6B;m`2 kXk9,

ZmbB@biiB+ +?`+i2`BbiB+

6B;m`2 kXk8,

6B;m`2 kXke,

R

En

R

Ep

R

Bn

50 Ω

50 Ω R

Bp

I

rT n

I

rT p

Pp2`b?QQi +?`+i2`BbiB+

6B;m`2 kXkd,

C

J C

V

J C

I

T F

kX8 *QM+HmbBQM

"B#HBQ;`T?v

j a+H#H2 KQ/2H

jXR :2QK2i`v M/ T`K2i2`b

jXRXR :2QK2i`B+H p`BiBQMb iF2M BMiQ ++QmMi

w l

w = w

f inger

· N

f ingers

N

f ingers

w

l

d2nw

w;

l

d2nw

6B;m`2 jXR,

jXRXk a+H#H2 T`K2i2`b

*m``2Mib

I

Sn

I

SRn

I

Sp

I

SRp

I

Spsub

I

SRpsub

I

SF n

I

SF p

I

SR

I

SEn

I

SEp

I

SC

I

KF n

I

KRn

I

KF p

I

KRp

IHC

KF n

IHC

KF p

I

rT n

I

rT p

_2bBbiM+2b

R

A

R

C

R

Bn

R

CM n

R

CT n

R

Bp

R

CM p

R

CT p

R

Cpsub

*T+BiM+2b

C

J En

C

J Ep

C

J C

C

J S

h`MbBi iBK2

T

F F n

T

F F p

T

R

Pi?2`b

N

En

N

Ep

N

C

V

AF n

V

ARn

V

AF p

V

ARp

V

BCbk

m

c

V

J En

V

J Ep

V

J C

V

J Csub

mje

n

mje

p

mjc mjc

sub

jXRXj h?2 i2bi THM

w (µm) l (µm) d2nw (µm)

h#H2 jXR,

l l

l d2nw

w l d2nw

jXk a+HBM; Hrb

jXkXR h?2 #b2 rB/i? +QM+2Ti BM M a*_

l d2nw

6B;m`2 jXk,

l

d

np

d

ST I

d

pw

γ

γ l

6B;m`2 jXj,

γ N

γp

d2nw

d2nw W

Bp

d2nw

W

Bn

= p

(γ

n

· l)

²

+ ∆d

²_w

+ ∆d

d

W

Bp

= q

(γ

p

· l + 2 · d2nw)

^Nγp

+ ∆d

²_w

+ ∆d

d

∆d

w

= d

pw

− d

ST I

∆d

d

= d

ST I

− d

np

jXkXk *m``2Mib b+H#BHBiv

"BTQH` 2z2+i bim`iBQM +m``2Mib

I

S

= q · A

E

· D

nB

· n

²_iB

N

AB

· W

B

q N

AB

D

nB

n

iB

A

E

W

B

J

_S^w

=

^q·DnB·n

2 iB

NAB

I

S

= J

_S^w

· A

E

W

B

I

Sn

= J

_Sn^w

· l · w

p (γ

n

· l)

²

+ ∆d

²_w

+ ∆d

d

I

Sp

= J

_Sp^w

· l · w

p (γ

p

· l + 2 · d2nw)

^Nγp

+ ∆d

²_w

+ ∆d

d

I

Spsub

= J

_Spsub^w

· (l + γ

snw

· d2nw) · w

W

Bpsub

W

Bpsub

J

Spsub

J

Spsub

= J

_Spsub^w

W

Bpsub

I

Spsub

= J

Spsub

· (l + γ

snw

· d2nw) · w

I

Spsub

d2nw

d2nw

γ

snw

I

Sn

I

Sp

l

l

EM22 +m``2Mib

I

KF n

= J

_{KF n}^w

· l · w p (γ

n

· l)

²

+ ∆d

²_w

+ ∆d

d

I

KF p

= J

_{KF p}^w

· l · w

p (γ

p

· l + 2 · d2nw)

^Nγp

+ ∆d

²_w

+ ∆d

d

I

KRn

= J

_KRn^w

· l · w p (γ

n

· l)

²

+ ∆d

²_w

+ ∆d

d

I

KRp

= J

_KRp^w

· l · w

p (γ

p

· l + 2 · d2nw)

^Nγp

+ ∆d

²_w

+ ∆d

d

IHC

KF n

= J HC

_{KF n}^w

· l · w p (γ

n

· l)

²

+ ∆d

²_w

+ ∆d

d

IHC

KF p

= JHC

_{KF p}^w

· l · w

p (γ

p

· l + 2 · d2nw)

^Nγp

+ ∆d

²_w

+ ∆d

d

h`MbBi iBK2 /2T2M/2M+2 QM i?2 +m``2Mi H2p2H

I

T F F n

= J

_{T F F n}^w

· l · w p (γ

n

· l)

²

+ ∆d

²_w

+ ∆d

d

I

T F F p

= J

_{T F F p}^w

· l · w

p (γ

p

· l + 2 · d2nw)

^Nγp

+ ∆d

²_w

+ ∆d

d

CmM+iBQMb bim`iBQM +m``2Mib

w

I

SF

= q · A

E

· D

pE

· n

²_iB

N

DE

· W

E

J

SF

I

SF

= J

SF

· A

E

I

SF n

= J

SF n

· l · w

I

SF p

= J

SF p

· l · w

I

SR

= J

_SR^w

· lw · w l + d2nw + d

pw

+ ∆d

d

lw · w lw

lw lw

I

SR

_2+QK#BMiBQM +m``2Mib

I

SEn

= J

SEn

· l · w

I

SEp

= J

SEp

· l · w

I

SC

= J

SC

· lw · w

I

rT n

= J

_{rT n}^w

· l · w · p

(γ

n

· l)

²

+ ∆d

²_w

+ ∆d

d

I

rT p

= J

_{rT p}^w

· l · w · q

(γ

p

· l + 2 · d2nw)

^Nγp

+ ∆d

²_w

+ ∆d

d

jXkXj _2bBbiM+2 b+H#BHBiv

R

A

= R

AA

l · w

R

C

= R

CA

l · w

R

EnA

R

EpA

R

CM n

= R

CM nA

w

R

CM p

= R

CM pA

w R

CM n

R

CM p

lw

R

CM nA

R

CM pA

R

CT n

= R

CM nA

w + R

CT nl

· l + R

CT nd2nw

· d2nw w · l

R

CT p

= R

CM pA

w + R

CT pl

· l + R

CT pd2nw

· d2nw w · l

R

CT n

R

CT p

R

CM n

R

CM p

R

Bn

= R

Bn_l

· l + R

Bn_d2nw

· d2nw

w · l

R

Bp

= R

Bpl

· l + R

Bpd2nw

· d2nw w · l

R

CT n

R

CT p

R

Bn

R

Bp

l d2nw

R

Cpsub

= R

Cpsub

(l + d2nw) · w

R

Cpsub

jXkX9 *T+BiM+2b b+H#BHBiv

C

bottom

C

ST I

C

J En

= C

J Enbottom

· l · w + C

J EnST I

· 2 · (l + w)

C

J Ep

= C

J Epbottom

· l · w + C

J EpST I

· 2 · (l + w)

C

J C

= C

J C_bottm

· (l+d2nw+dwell+ lw

2 ) · w+C

J C_{ST I}

· 2 · (l+d2nw+dwell+ lw 2 +w)

C

J Csub

= C

J Csubbottom

· 2 · (l+d2nw+dwell+lw) · w+C

J CsubST I

· 4 · (l+d2nw+dwell+lw+w)

jXkX8 h`MbB2Mi T`K2i2`b b+H#BHBiv ƘƘƘ

T

F n

= T

F n0

· hp

(γ

n

· l)

²

+ ∆d

²_w

+ ∆d

d

i

T

F p

= T

_{F p0}

· q

(γ

p

· l + 2 · d2nw)

^Nγp

+ ∆d

²_w

+ ∆d

d

T

R

= T

_R0

· lw

l · l + d2nw + d

pwell

+ ∆d

d

jXj *?`+i2`BxiBQM M/ pHB/iBQM

J

_Sn^w

J

_Sp^w

R

AA

R

CA

γ

n

γ

p

N

γp

γ

snw

jXjXR a+HBM; T`K2i2`b 2ti`+iBQM M/ BM/BpB/mH T`K2i2`

b+HBM; pHB/iBQM

*m``2Mib I

Sn

I

Sn1

= J

_Sn^w

· l

1

· w

1

p (γ

n

· l

1

)

²

+ ∆d

²_w

+ ∆d

d

I

Sn1

I

Sn

l

1

w

1

∆d

w

∆d

d

J

_Sn^w

γ

n

γ

n

J

_Sn^w

= I

Sn1

· p

(γ

n

· l

1

)

²

+ ∆d

²_w

+ ∆d

d

l

1

· w

1

J

_Sn^w

w

d2nw l

UV w p`BiBQM U#V d2nw p`BiBQM U+V l p`BiBQM

6B;m`2 jX9, I

Sn

γ

n

J

_Sn^w

l = 0.66 µm l = 2.1 µm

γ

n

0.4

J

_Sp^w

γ

p

= 0.7 N

γp

= 2

J

_Sp^w

= I

Sp1

· p

(γ

p

· l

1

+ 2 · d2nw)

^Nγp

+ ∆d

²_w

+ ∆d

d

l

₁

· w

₁

γ

p

0.75 N

γp

J

Spsub

= I

_Spsub1

(l + γ

s

· d2nw) · w

UV w p`BiBQM U#V d2nw p`BiBQM U+V l p`BiBQM

6B;m`2 jX8, I

Sp

UV w p`BiBQM U#V d2nw p`BiBQM U+V l p`BiBQM

6B;m`2 jXe, I

Spsub

γ

S

I

SF n

I

SF p

J

SF n

= I

SF n1

l

₁

· w

₁

J

SF p

= I

SF p1

l

₁

· w

₁

I

SF n

I

SF p

w = 80 µm d2nw = 0.31 µm l = 1.38 µm

UV w p`BiBQM U#V d2nw p`BiBQM U+V l p`BiBQM

6B;m`2 jXd, I

SF n

UV w p`BiBQM U#V d2nw p`BiBQM U+V l p`BiBQM

6B;m`2 jX3, I

SF p

I

Sn

I

Sp

I

SF n

I

SF p

γ

n

γ

p

N

γp

I

Sn

I

Sp

γ I

Sn

I

Sp

I

Spsub

I

Sn

I

Sn

I

Sp

I

Sp

h#H2 jXk, I

Sn

I

Sp

I

SF n

I

SF n

I

SF p

I

SF p

h#H2 jXj, I

SF n

I

SF p

J

_{KF p}^w

=

I

KF n

· p

(γ

n

· l)

²

+ ∆d

²_w

+ ∆d

d

l · w

J

_{KF p}^w

=

I

KF p

· p

(γ

p

· l + 2 · d2nw)

^Nγp

+ ∆d

²_w

+ ∆d

d

l · w

γ

n

I

Sn

UV a*_k, r 4 Rkyµm U#V a*_j, r 4 Reyµm U+V a*_9, /kMr 4 y-ekµm

U/V a*_e, H 4 y-eeµm U2V a*_k, H 4 k-Rµm U7V a*_8, /kMr 4 yKNjµm

6B;m`2 jXN, I

KF n

_2bBbiM+2b

R

A

R

C

R

CM n

R

CM p

R

Cpsub

R

CT n

R

CT p

R

Bn

R

Bp

*T+BiM+2b

h`MbBi iBK2b

T

_{F n0}

T

_{F p0}

T

_R0

LQi2

jXjXk Pp2`HH b+HBM; pHB/iBQM ƘƘƘ

50Ω

ZmbB@biiB+ +?`+i2`BbiB+

hBK2 /QKBM +?`+i2`BbiB+

Pp2`@b?QQi +?`+i2`BbiB+

d2nw

w

d2nw l

l

d2nw

UV a*_R, r 4 3yµm U#V a*_k, r 4 Rkyµm U+V a*_j, r 4 Reyµm

6B;m`2 jXRy, w

50 Ω

UV a*_R, /kMr 4 y-jRµmU#V a*_9, /kMr 4 y-ekµmU+V a*_8, /kMr 4 y-Njµm

6B;m`2 jXRR, d2nw

50 Ω

UV a*_R, H 4 R-j3µm U#V a*_e, H 4 y-eeµm U+V a*_j, H 4 k-Rµm

6B;m`2 jXRk, l

50 Ω

UV a*_R, r 4 3yµm U#V a*_k, r 4 Rkyµm U+V a*_j, r 4 Reyµm

6B;m`2 jXRj, w

50 Ω 50V

UV a*_R, /kMr 4 y-jRµm U#V a*_9, /kMr 4 y-ekµm U+V a*_8, /kMr 4 y-Njµm

6B;m`2 jXR9, d2nw

50 Ω 50V

UV a*_R, H 4 R-j3µm U#V a*_e, H 4 y-eeµm U+V a*_j, H 4 k-Rµm

6B;m`2 jXR8, l

UV a*_R, r 4 3yµm U#V a*_k, r 4 Rkyµm U+V a*_j, r 4 Reyµm

6B;m`2 jXRe, w

50 Ω

UV a*_R, /kMr 4 y-jRµmU#V a*_9, /kMr 4 y-ekµmU+V a*_8, /kMr 4 y-Njµm

6B;m`2 jXRd, d2nw

50 Ω

UV a*_R, H 4 R-j3µm U#V a*_e, H 4 y-eeµm U+V a*_j, H 4 k-Rµm

6B;m`2 jXR3, l

50 Ω

jX9 *QM+HmbBQM

w l

d2nw

"B#HBQ;`T?v

9 _6 JQ/2H

9XR 1a. _6 +Q /2bB;M T`Q#H2KiB+ Ƙ

UV U#V

6B;m`2 9XR,

9Xk .2pB+2b /2b+`BTiBQM

6B;m`2 9Xk,

9XkXR S`Qi2+iBQM /BQ/2

6B;m`2 9Xj,

9XkXk h`B;;2`BM; /BQ/2

6B;m`2 9X9,

9XkXj a*_

9XkX9 .ha*_

9Xj .2pB+2b KQ/2HHBM;

9XjXR .BQ/2b

C

S

R

ON

R

S

C

sub

R

sub

6B;m`2 9X8,

C

beAC

L

beA

L

beC

C

S

C

sub

C

S

= C

_S0

1 −

V^VJ S^D

mjs

C

sub

= C

sub0

1 −

V^VJ sub^sub

mjsub

C

S0

C

sub0

V

J S

V

J sub

m

js

m

jsub

V

D

V

sub

R

ON

= R

ONhc

+ V

D

I

S VD

VT

R

ONhc

R

ON

I

S

V

T

26 mV 300 K

V

D

C

sub

9XjXk a*_

6B;m`2 9Xe,

C

A

R

onA

C

C

R

onC

C

np

R

S

R

nw

R

pw

C

sub

R

sub

C

beAC

C

beAN W

C

beN W C

L

beA

L

beN W

C

np

C

A

= C

A0

1 −

_V^V_{J SA}^A

m_jA

C

C

= C

_C0

1 −

V^VJ SC^C

mjC

C

np

= C

_np0

1 −

V^VJ Snp^np

mjnp

R

ON

R

ONA

= R

ONAhc

+ V

A

I

S_A VA

VT

R

ONC

= R

ONChc

+ V

C

I

S_C VC

VT

9X9 a@T`K2i2`b +?`+i2`BxiBQM

6B;m`2 9Xd,

9X9XR .BQ/2b +?`+i2`BxiBQM

6B;m`2 9X3,

6B;m`2 9XN,

9X9Xk a*_ +?`+i2`BxiBQM

6B;m`2 9XRy,

9X9Xj .ha*_ +?`+i2`BxiBQM

9X9X9 .2@2K#2//BM; bi`m+im`2b

6B;m`2 9XRR,

UV dzQT2MǴ /2@2K#2//BM; bi`m+im`2 U#V dzb?Q`iǴ /2@2K#2//BM; bi`m+im`2

6B;m`2 9XRk,

9X8 S`K2i2` 2ti`+iBQM M/ KQ/2H pHB/iBQM

S

₁₁

S

₁₂

S

12

S

21

−→

Z

₁₁

Z

₁₂

Z

12

Z

21

Z

₁₁

= (1 + S

11

)(1 − S

22

) + S

12

S

21

∆S · Z

₀

Z

₁₂

= 2S

₁₂

∆S · Z

₀

Z

₂₁

= 2S

₂₁

∆S · Z

₀

Z

22

= (1 − S

₁₁

)(1 + S

₂₂

) + S

₁₂

S

₂₁

∆S · Z

0

∆S = (1 − S

₁₁

)(1 − S

₂₂

) − S

₁₂

S

₂₁

6B;m`2 9XRj,

C

beAC

9X8XR .BQ/2 T`K2i2` 2ti`+iBQM

*b+/2 +QM};m`iBQM

C

beAC

6B;m`2 9XR9,

Y

₁^′

= jω (C

met

+ C

s

) − R

s

ω

²

C

s

C

met

Y

₂^′

= jωC

s

+ 1 R

s

+ C

s

R

s

C

met

Y

₃^′

= jωC

met

+ 1 R

s

+ C

met

R

s

C

s

Z

2

Z

2

= 1

Y

₂^′

+ R

sub

+ 1 jωC

sub

1

Y

₂^′

= 1

Cmet+Cs

RsCmet

+ jωC

s

=

Cmet+Cs

RsCmet

+ jωC

s (Cmet+Cs)²

R²_sC_met²

+ ω

²

C

_s²

C

met

≈ 10

⁻¹⁴

F C

s

≈ 10

⁻¹⁴

F R

s

≈ 10 Ω ω ≈ 10

¹⁰

Hz





10⁻¹⁴

z }| { C

met

+

10⁻¹⁴

z}|{ C

s





2

R

²_s

|{z}

10²

C

_met²

| {z }

10⁻²⁸

| {z }

10⁻²

≫ ω

²

|{z}

10²⁰

C

_s²

|{z}

10⁻²⁸

| {z }

10⁻⁸

Z

₂

= R

s

C

met

C

s

+ C

met

+ R

sub

+ j

ωC

s

· R

²_S

C

_met²

(C

met

+ C

s

)

²

− 1 ωC

sub

ωC

s

|{z}

10⁻⁴

· R

²_S

C

_met²

(C

met

+ C

s

)

²

| {z }

10²

| {z }

10⁻²

≪ 1

ωC

sub

| {z }

10⁴

Re(Z

₂

) ≃ R

s

C

met

C

s

+ C

met

+ R

sub

Im(Z

2

) ≃ − 1 ωC

sub

R

s

C

met

C

s

R

sub

C

sub

C

sub

= − 1 ω · Im(Z

2

)

C

sub

C

sub

= 61 f F

R

s

C

met

C

s

R

sub

Re(Z

2

)

6B;m`2 9XR8,

S`HH2H +QM};m`iBQM

C

s

C

beAC

R

s

L

beA

L

de

Z

₁

Z

1

= jωL

de

L

de

= Im(Z

1

) ω

Z

1

UV U#V

6B;m`2 9XRe, Z

1

Z

2

Y

₂

=

_Z¹

2

Y

2

= jωC

met

+

jωC

s

k 1

R

s

+ 1

R

sub

k jωC

sub

= jωC

met

+

jωC

s

k 1 + ω

²

C

_sub²

R

sub

(R

s

+ R

sub

) + jωC

sub

R

s

R

s

(1 + ω

²

R

²_sub

C

_sub²

)

ω

²

|{z}

10²⁰

C

_sub²

|{z}

10⁻²⁸

R

sub

|{z}

10²

R

s

+ R

sub

| {z }

10²

| {z }

10⁻⁴

≪ 1

ω

²

|{z}

10²⁰

R

²_sub

|{z}

10⁴

C

_sub²

|{z}

10⁻²⁸

| {z }

10⁻⁴

≪ 1

ω

10 GHz Y

2

R

sub

Y

2

≃ jωC

met

+

jωC

s

k 1 + jωC

sub

R

s

R

s

= ω

²

R

s

C

_s²

+ jω (C

met

+ C

s

) + jω

³

R

s

C

s

C

sub

(C

s

+ C

sub

) 1 + ω

²

R

_s²

(C

s

+ C

sub

)

²

ω

²

|{z}

10²⁰

R

²_s

|{z}

10⁴

(C

s

+ C

sub

)

²

| {z }

10⁻²⁸

| {z }

10⁻⁴

≪ 1

Y

2

≃ ω

²

R

s

C

_s²

+ jω (C

met

+ C

s

) + jω

³

R

s

C

s

C

sub

(C

s

+ C

sub

)

Re(Y

2

) = ω

²

R

s

C

_s²

Im(Y

₂

) = ω (C

met

+ C

s

) + ω

³

R

s

C

s

C

sub

(C

s

+ C

sub

)

Re(Y

2

) R

s

C

s

R

s

C

_s²

= Re(Y

2

) ω

²

R

sub

Im(Y

2

) C

s

C

met

|{z} ω

10¹⁰

(C

met

+ C

s

)

| {z }

10⁻¹⁴

| {z }

10⁻⁴

≫ ω

³

|{z}

10³⁰

R

²_s

|{z}

10⁴

C

s

|{z}

10⁻¹⁴

C

sub

|{z}

10⁻¹⁴

(C

s

+ C

sub

)

| {z }

10⁻¹⁴

| {z }

10⁻⁸

C

met

+ C

s

= Im(Y

2

) ω

L

be

R

s

C

s

0 20 GHz C

met

C

sub

R

sub

UV AM7Q`KiBQM Q#iBM2/ 7`QK Re(Y

₂

) U#V AM7Q`KiBQM Q#iBM2/ 7`QK Im(Y

₂

)

6B;m`2 9XRd,

6B;m`2 9XR3,

L

be

0 V R

on

oQHi;2 /2T2M/2Mi KQ/2H

C

s

R

on

C

s

R

on

C

s

Y

₂

C

beAC

C

s

UV U#V

6B;m`2 9XRN,

V

J S

m

jS

V

J S

m

jS

C

S0

I

S

R

ON hc

R

ON

UV U#V

6B;m`2 9Xky,

6B;m`2 9XkR,

9X8Xk a*_ T`K2i2` 2ti`+iBQM

C

beAC

C

beAN W

C

beN W C

Z

1

C

A

C

beAN W

L

beAC

R

ONA

UV U#V

6B;m`2 9Xkk, Z

₁

C

np

C

beN W C

Z

₂

C

sub

20 GHz R

np

R

np

Z

₂

R

sub

UV U#V

6B;m`2 9Xkj, Z

2

Z

3

R

nw

C

beN W C

Im(Z

2

) L

beN W

UV U#V

6B;m`2 9Xk9, Z

₃

6B;m`2 9Xk8,

oQHi;2 /2T2M/2Mi KQ/2H

C

A

C

np

C

sub

6B;m`2 9Xke,

C

np

C

sub

C

A

Z

1

0 V C

A

C

A

UV U#V

6B;m`2 9Xkd, C

A

C

np

C

sub

Z

2

UV U#V U+V

6B;m`2 9Xk3, Z

2

C

np

C

sub

V

J

m

j

C(V )

6B;m`2 9XkN,

9X8Xj .ha*_ pHB/iBQMƘ

Z

₂

C

total

= − 1 ω · Im(Z

2

)

UV U#V

6B;m`2 9Xjy,

C

total

C

_s^D2

C

_np^SCR

C

_s^D1

C

_A^SCR

UV U#V

U+V U/V

U2V U7V

U;V U?V

6B;m`2 9XjR,

9Xe *QM+HmbBQM

"B#HBQ;`T?v

*QM+HmbBQM

*QM+HmbBQM U7`MÏBbV

GBbi Q7 Tm#HB+iBQMb

dz LQp2H S?vbB+H JQ/2H 7Q` i?2 a*_ 1a. S`Qi2+iBQM .2pB+2Ǵ-

jkM/ 1H2+i`B+H Pp2`bi`2bbf 1H2+i`QbiiB+

.Bb+?`;2 avKTQbBmK

dzJQ/2HBM; a*_@#b2/ T`Qi2+iBQM bi`m+im`2 7Q` _6@1a. +Q@/2bB;M bBKmHiBQMbǴ-

AMi2`MiBQMH JB+`Qrp2 avKTQbBmK kyRR

dza+H#H2 JQ/2HBM; aim/B2b QM i?2 a*_ 1a. S`Qi2+iBQM .2pB+2Ǵ- jjM/ 1H2+i`B+H Pp2`bi`2bbf 1H2+i`QbiiB+ .Bb+?`;2 avKTQbBmK

ǴJQ/ûHBbiBQM ¨ >mi2 6`û[m2M+2 /2 .BbTQbBiB7b /2 S`Qi2+iBQM *QMi`2 H .û+?`;2 1H2+i`QbiiB[m2Ǵ-

dzoQHi;2 .2T2M/2Mi >B;? 6`2[m2M+v JQ/2HBM; Q7 1a. S`Qi2+iBQM .2pB+2bǴ-

@ BM T`Q;`2bb

#bi`+i

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