HAL Id: jpa-00227636
https://hal.archives-ouvertes.fr/jpa-00227636
Submitted on 1 Jan 1988
HAL is a multi-disciplinary open access archive for the deposit and dissemination of sci- entific research documents, whether they are pub- lished or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers.
L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.
NONLINEARITY OF THIN-FILM
SEMICONDUCTOR INTERFEROMETERS DUE TO INTERLAYER BOUNDARY PHOTOEMF AND
ELECTROOPTIC PROCESSES
F. Karpushko
To cite this version:
F. Karpushko. NONLINEARITY OF THIN-FILM SEMICONDUCTOR INTERFEROMETERS
DUE TO INTERLAYER BOUNDARY PHOTOEMF AND ELECTROOPTIC PROCESSES. Journal
de Physique Colloques, 1988, 49 (C2), pp.C2-87-C2-90. �10.1051/jphyscol:1988219�. �jpa-00227636�
NONLINEARITY OF THIN-FILM SEMICONDUCTOR INTERFEROMETERS DUE TO INTERLAYER BOUNDARY PHOTOEMF AND ELECTROOPTIC PROCESSES
F.V. KARPUSHKO
Institute of Physics, BSSR Academy of Sciences. Minsk 220602, USSR
A b s t r a c t
-
The t h i n - f i l m semiconciuct;or i n t e r f e r o n ? c t e r s a r c co~xsiclcred a s d i m e n s i o n a l o p t i c a l and e l e c t r i c s t r u c t i l r e s . It i s s:-lovn L;Ilat i l l b j s t a b l a d e v i c e s b a s e d on ~ ~ and 7 h 3 ~ 5 3 ~serllicollductors t h i n - f i l o l i t ~ t e r f e r o n i e t e r s a s w i t c h i n g t i m e o f-
10-12 s and s w i t c h i n g erlcrgy of 104 p h o t ~ ~ ~ ~ / d e v i c e c a n b e o b t a i n e d .From t h e f i r s t p u b l i c a t i o n / I / and u p t o now / 2 / t h e t h i n - f i l m semiconductor i n - t e r f e r o ~ n e t e r s ( T F I ) b i s t a b l e d e v i c e s h a v e beer, t h e s u b j e c t o f s e r i o u s i n t e r e s t t o r e a l i z e t h e components o f t h e o p t i c a l d i g i t a l coinputers. T h i s p e r s i s t e n t i n t e r e s t i s d e t e r m i n e d by some a t t r a c t i v e p r o p e r t i e s o f o p t i c a l b i s t a b l e ( O B ) d e v i c e s baser1 on TFI /3/. But t o widen t h e p r a c t i c a l u s e of t h e TFI 0 5 d e v i c e s , i t i s n e c e s s a r y t o improve t h e i r k i n e t i c f e a t u r e s . The i n s u f f i c i e n t r e s p o n s e t i m e of t h e T F I i s t h e r e s u l t o f t h e t h e r m a l n o n l i n e a r i t y o f i t s semicorlductor l a y e r s .
The f a s t and s t r o n g n o n l i n e a r i t y o f t h e e l e c t r o n n a t u r e i n TFI c a n be r e a c h - ed o n l y a t narrow s p e c t r a l i n t e r v a l s which c o r r e s p o n d t o t h e s i n g u l a r p o i n t s of t h e e n e r g y band s t r u c t u r e a t t h e i n t r i n s i c a b s o r p t i o n t a i l o f t h e semiconductors used. The q u e s t i o n a r i s e s , what k i n d o f i n t e r a c t i o n siechanistns c o u l d a l l o w t o e x h i b i t t h e s e s i n y l a r i k i e s i n t h e b e s t way.
TO answer t h i s q u e s t i o n , it i s u s e f u l t o c o n s i d e r TFI n o t o n l y a s a dimen- s i o n a l o p t i c a l s t r u c t u r e ( a s compared w i t h t h e l i g h t wavelength) b u t a s a n e l e c - t r i c s t r u c t u r e , t o o ( a s compared w i t h t h e c h a r a c t e r i s t i c s i z e s o f t h e m a t e r i a l s ' e l e c t r i c p a r a m e t e r s ) . A s a n o p t i c a l d e v i c e , t h e TFI i s a system c o n s i s t i n g of a l - t e r n a t i n g l a y e r s w i t h d i f f e r e n t o p t i c a l c o n s t a n t s . The i n t e r n a l s e ~ n i c o n d u c t o r l a er, w i t h t h e complex r e f r a c t i v e i n d e x
3
=n -
L2 ,
h a s g e o m e t r i c a l t h i c l t n e s sI = m h r n / 2 n ,
whereA m
i s t h e wavelength o f t h e i n t e r f e r o m e t e r t r a n s - m i s s i o n peak;n, =
a r e t h e r e a l and i m a g i n a r y p a r t s o f,
r e s p e c t i v e l y ;m
i s t h e i n t e r f e r e n c e o r d e r . For TFI OB d e v i c e s M e q u a l s 1 o r 2, a s a r u l e . Thequarterwave a l t e r n a t i n g l a y e r s w i t h r e a l r e f r a c t i v e i n d i c e s
n 4
andn2
have o p t i - c a l t h i c k n e s s e s4, n, = e2 nl
=Am /4 .
They form d i e l e c t r i c m i r r o r s w i t h r e f r a c t i v i t y R c l o s e t o 1. Only t a k i n g i n t o c o n s i d e r a t i o n t h e a b s o r p t i o n i n s i d e t h e i n t e r n a l semiconductor l a y e r , t h e peak t r a n s n i s s i o n Tm and t h e s p e c t r a l h a l f w i d t h of t h e TFI A 0,s a r e g i v e nArticle published online by EDP Sciences and available at http://dx.doi.org/10.1051/jphyscol:1988219
C2-88 JOURNAL
DE
PHYSIQUEIt should b e noted t h a t
2%aern/n
( even whenae - - 10 3cm'1). The d i s p e r - s i v e b i s t a b i l i t y o c c u r s i f t h e r e f r a c t i v e i n d e x change i s
For t h e l i g h t beam of wavelength and a r b i t r a r y i n p u t power t h e absorbed power h a s a maximum i f
R -exp(- 2mem T).
Then Eqs. ( 1) and ( 2 ) r e s u l t i nT :
"- 0.25 and AhqS
c4 = X , /n .
I n t h i s c a s e , c l o s e t o t h e optimum, t h e OB o c c u r s i fThus, Eq. ( 4 ) i s a c r i t e r i o n f o r choosing n o n l i n e a r i t y mechanisms which permit r e a l i z i n g OB d e v i c e s based on TFI.
For a system of a l t e r n a t i n g d i e l e c t r i c and semiconductor l a y e r s , such a s TFI, t h e o p t i c a l and e l e c t r i c c o n s t a n t s can d i f f e r widely a s compared w i t h t h e c o r r e s - ponding p r o p e r t i e s of t h e i n i t i a l b u l k c r y s t a l s . T h i s d i f f e r e n c e i s due t o t h e energy b a r r i e r s a r i s e n a t t h e neighbouring l a y e r boundaries. A t y p i c a l example of t h e energy b a r r i e r i s t h e h e t e r o j u n c t i o n a t t h e boundary between t h e i n t e r n a l se- miconductor l a y e r and t h e neighbouring quarterwave l a y e r s . Also, one can p o i n t o u t t h e boundary between t h e semiconductor l a y e r and t h e t h i n metal l a y e r (Shot- t h y ' s b a r r i e r ) i n t h i n - f i l m i n t e r f e r e n c e systems known a s i n t e r f e r e n c e f i l t e r s w i t h induced t r a n s m i s s i o n /4,5/.
The e l e c t r i c p r o p e r t i e s of t h e b a r r i e r domain a r e formed by t h e f i e l d of t h e s p a t i a l charge r e s u l t i n g from t h e achievement of e q u i l i b r i u m between t h e c o n t a c t - i n g m a t e r i a l s / 6 / . The c h a r a c t e r i s t i c s i z e of t h e s p a t i a l charge domain ( ~ e b y e ' s r a d i u s ) i s determined by t h e c a r r i e r c o n c e n t r a t i o n i n s i d e each of t h e c o n t a c t i n g l a y e r s , by t h e i r d i e l e c t r i c p r o p e r t i e s and temperature. A t 3 0 0 ' ~ and t h e concen- t r a t i o n of 10~5-1017 cm-3, t h e t y p i c a l v a l u e s of Debyefs r a d i u s a r e about 0. lp.
It i s j u s t comparable t o t h e geometrical t h i c l t n e s s of t h e TFI l a y e r s . That i s why t h e e l e c t r i c f i e l d of 104-105 ~ / c m i s a p p l i e d t o t h e whole semiconductor l a y e r of t h e TFI. A s a r e s u l t , t h e o p t i c a l c o n s t a n t s
( n , ae
) of t h e l a y e r a r e changed a s compared t o t h e i n i t i a l bulk c r y s t a l c o n s t a n t s by means of Franz-Keldyshfs e f f e c t ( o r o t h e r e l e c t r o o p t i c mechanisns).
The i n f l u e n c e of t h e e l e c t r i c f i e l d on t h e o p t i c a l c o n s t a n t s of a semicon- d u c t o r i s b e s t observed a t s i n g u l a r p o i n t s of t h e energy band s t r u c t u r e
/7/.
A t t h e i n t r i n s i c a b s o r p t i o n t a i l such c h a r a c t e r i s t i c p o i n t s correspond t o t h e i n t r i n -s i c a b s o r p t i o n edge and e x c i t o n s t a t e s . The l a t t e r a r e u s u a l l y seen poorly a t room temperature. Note a l s o t h a t
2Saem/n
i s not l a r g e enough i n t h i s s p e c t r a l a r e a t o s p o i l t h e good f i n e n e s s of t h e TFI. I n t h e c a s e of a doped semiconductor t h e r e i s one more s i n - l a r p o i n t n e a r t h e i n t r i n s i c a b s o r p t i o n edge. T h i s p o i n t i s due t o t h e implanted impurity.The s i n y l a r i t i e s of t h e energy band s t r u c t u r e a r e expressed by s h a r p r e s o - nances and o s c i l l a t i o n s i r l t h e r e f r a c t i v e i n d e x speckrum with magnitudes cl 10'~-10'~. The e l e c t r i c f i e l d a p p l i e d t o t h e semiconductor c r y s t a l changes t h e e n e r g i e s of t h e band s t r u c t u r e c h a r a c t e r i s t i c p o i n t s . A s a r e s u l t , t h e o p t i c a l c o n s t a n t s of t h e setniconductor a r e modulated i n t h e corresponding s p e c t r a l r e g i - ons. These e f f e c t s form t h e ba.sis of t h e e l e c t r o r e f l e c t a n c e and e l e c t r o a b s o r p t i o n methods knolm i n t h e l u o d u l a t i o ~ ~ spectroscopy t e c h n i q u e /7,8/. I n p a r t i c u l a r , one oE t h e m o d i f i c a t i o n s of t h e s e methods i s phoi;oreflectance based on t h e modulation of t h e senticonductor s p a t i a l charge donlain by p h o t o c a r r i e r s g e n e r a t e d a t l i g h t a b s o r p t i o n / 9 / . Thus, t h e r c i s a pliotoinduced e l e c t r o o p t i c mechanism of nonlinea- r i t y i n t h i n - f i l m semiconductor i n t e r f e r e n c e systems. Let t h e TFI b e f a b r i c a t e d f o r
A m
t h a t corresponds t o one of t h e p h o t o r e f l e c t a n c e peaks of t h e i n t e r n a l l a y e r m a t e r i a l . A s n r e s u l t of l i g h t a b s o r p t i o n a tA,
t h e r e o c c u r s t h e genera-r i e r s a r e s e p a r a t e d by t h e f i e l d of t h e s p a t i a l b a r r i e r charge, and photoEbIF a r i s e s . The corresponding response t i m e i s about 10'12 s because t h e c h a r a c t e r i s - t i c c a r r i e r speeds, f o r i n s t a n c e i n ~ 3 semiconductor, a r e 1 0 l l p m / s . ~ 5
/lo/.
T h i s photoEb1F r e d u c e s t h e b a r r i e r p o t e n t i a l and t h e e l e c t r i c f i e l d s t r e n g t h decreases.It l e a d s t o t h e r e a l r e f r a c t i v e i n d e x change
1
h n \ a n d , consequently, t o t h e de- t u n i n g of t h e TFI t r a n s m i s s i o n peak r e l a t i v e t o t h e i n p u t l i g h t wavelength. It was p o i n t e d o u t t h a t Eq. (4) must b e s a t i s f i e d t o reach t h e OB. The a n a l y s i s of t h e d a t a f o r b o t h t h e ae(A)-spectra /11/ and t h e p h o t o r e f l e c t a n c e /12,13/ and e l e c t r o r e f l e c t a n c e /7,8/ s p e c t r a shows t h a t Eq.(4) i s s a t i s f i e d f o r a wide c l a s s of t h ea and
B~ semiconductors.A t f i r s t s i g h t , t h e mechanism of OB i n TFI under c o n s i d e r a t i o n i s based on t h e same photo and e l e c t r o o p t i c p r o c e s s e s which determine t h e o p e r a t i o n of SEEDes /14,15/. However, t h e r e i s a p r i n c i p a l d i f f e r e n c e . The SEEDes u s e t h e e l e c t r i c - f i e l d dependence of t h e a b s o r p t i o n c o e f f i c i e n t w h i l e i n our c a s e d i s p e r s i v e OB i s r e a l i z e d . We b e l i e v e t h i s p e r m i t s u s t o s u b s t a n t i a l l y d e c r e a s e t h e t o t a l power d i s s i p a t e d by t h e OB device.
Now e s t i m a t e t h e energy p r o p e r t i e s of TFI OB d e v i c e s based on t h e pho- toinduced e l e c t r o o p t i c n o n l i n e a r i t y of t h e r e a l r e f r a c t i v e index. Assume t h a t t h e n o n l i n e a r r e f r a c t i v e i n d e x change
] ~ n \
r e q u i r e d f o r t h e d i s p e r s i v e b i s t a b i l i t y i s reached when t h e photoEMF completely compensates t h e b a r r i e r p o t e n t i a lu, .
Thee l e c t r i c b a r r i e r c a p a c i t y i s
C = & E 0 - ,
S( 5 )
e
Dwhere
E,, E
a r e , r e s p e c t i v e l y , t h e vacuum d i e l e c t r i c c o n s t a n t and t h e r e l a t i v e p e r m i t t i v i t y o f t h e medium;ep
i s Debyers r a d i u s of t h e s p a t i a l charge screening, andS
i s t h e s e c t i o n o f t h e l a s e r hoam i n c i d e n t on t h e TFI. To compensate t h e p o t e n t i a l U, i n t h e c a p a c i t y C one i s t o keep t h e ~ l g h o t o l t - c l ~ a r g eHere,
e
i s t h e e l e c t r o n charge, and i s t h e number of g e n e r a t e d e l e c t r o n - h o l e couples. 111 t h e s t e a d y - s t a t e one can w r i t e f o r Nwhere
IobS
i s t h e absorbed i n t e n s i t y , C i s t h e l i g h t v e l o c i t y ,h
i s Planckl s c o n s t a n t , and i s t h e photoEPIF r e l a x a t i o n t i m e c o n s t a n t . E q s . ( 6 ) and( 7 )
g i v e f o r t h e energy absorbed i n t h e TFI d u r i n g t h e t i m e<
A t
E =lo,
U o = l V,h, =o.
8 p ~ t ~ , [,=x,/zn
=O. 1p m ,
Eq. ( 8 ) r e s u l t s i n Iobs'i:-15 2
@ 1 . 4 10 J / ~ I
.
T h i s v a l u e corresponds t o about 5 . 6lo3
absorbed p h o t ~ n s / ~ m 2 which i s c l o s e t o t11e quantum s t a t i s t i c l i m i t .The r e l a x a t i o n t i m e c o n s t a n t
<
of t h e photoE?IF i s determined by t h e pro- c e s s e s t a k i n g p l a c e i n t h e b a r r i e r a r e a of any r e c t i f y i n g e l e c t r i c c e l l a t f o r - ward b i a s v o l t a g e / 6 / . F i r s t of a l l t h e s e p r o c e s s e s a r e t h e c a r r i e r t r a n s f e r over t h e b a r r i e r , t h e t u n n e l c a r r i e r t r a n s f e r through t h e s p a t i a l charge domain, and t h e c a r r i e r recombination c o l l i s i o n s i n s i d e t h e s p a t i a l c h a r g e domain. The f i r s t and t h e second p r o c e s s e s have t h e d i f f u s i o n n a t u r e and t h e i r c h a r a c t e r i s b i c t i m e s a r e t h e t i m e s of c a r r i e r t r a n s i t over t h e d i s t a n c eeD .
For TFI l a y e r s , say f o r doped GaAs and InP l a y e r s , t h e s e t i m e s a r e of about 1 0 ' ~ ~ - 1 0 ' ~ ~ s. Tile recontbina- t i o n time i s u s u a i l y g r e a t e r tlian Lhese values. But one shoulcl n o t e t h a t t h e r e -C2-90 JOURNAL
DE
PHYSIQUEcombination p r o c e s s i t s e l f d o e s n o t change t h e photoEMF b e c a u s e t h e l a t t e r i s t h e r e s u l t o f t h e c h a r g e s e p a r a t i o n a l o n e . That i s why t h e r e c o m b i n a t i o n r a t e d o e s not c h a r a c t e r i z e t h e OB d e v i c e o p e r a t i o n r a t e . To r e a c h a h i g h o p e r a t i o n r a t e , primary c o n s i d e r a t i o n must b e g i v e n t o t h e c r e a t i o n o f b a r r i e r l a y e r s w i t h o u t d e e p t r a p s c a p a b l e of l o c a l i z i n g s e p a r a t e d c a r r i e r s . The h e t e r o - and p i n - d i o d e s w i t h t h e r e s p o n s e t i m e o f 1 0 - l 2 s a r e e x c e l l e n t examples of such f a s t s y s t e m s i n photo- e l e c t r o n i c t e c h n o l o g y
/lo/.
Tile above e s t i m a t e s o f s w i t c h i n g e n e r g y and o p e r a t i o n r a t e s o f T F I OB d e v i - c e s w i t h t h e photoinduced e l e c t r o o p t i c r e a l r e f r a c t i v e i n d e x n o n l i n e a r i t y a r e c l o s e t o t h e fundamental l i m i t s . We b e l i e v e t h i s w i l l permit them t o compete suc- c e s s f u l l y w i t h o t h e r a l l - o p t i c a l d e v i c e s and, p a r t i c u l a r l y , w i t h e l e c t r o n i c i n - f o r m a t i o n p r o c e s s i n g d e v i c e s .
REFERENCES
/ I / Karpushko, F.V. and S i n i t s y n , G.V., Zh. P r i k l . S p e k t r o s k .
2
(1978) 820./ 2 / From O p t i c a l B i s t a b i l i t y Towards O p t i c a l Computing. The EJOBP. Ed. P. tIandel, S.D. S n i t h and B.S. W h e r r e t t . Amsterdam, North Holland (1987) 362 p.
/3/ Apanasevich, S.P., Karpushko,F.V. and S i n i t s y n , G.V. In: L a s e r O p t i c s o f Condensed H a t t e r . New York, Plenum Publ. Corp. (1988) 475.
/4/ L i s s b e r g e r , P.II., Appl. Opt.
20
(1981) 95./ 5 / G ~ t k i n ~ T . 1 . ant1 R a i s , B I G . ,Opt.-Iblekhan. Prom. No. 6 (1985) 59.
/6/ Pilius, G.E. Furtdamentals o f t h e Theory o f Semiconductor Devices. 1Ioscow, Nauka (1965) 448 p. us.).
/7/ Tyagai, V.A. and S h i t k o , O.V. L i g h t E l e c t r o r e f l e c t a n c e i n Semiconductors.
Kiev, Naukova Du~nka (1380) 302 p. (Rus.).
/8/ Cardona, M. idodulation Spectroscopy. Moscow, i4ir (1972) 416 p. (Rus.).
/9/ Wang, E. Y., A l b e r s , W. A., B l e i l , Jr. and C. B. In: 1 1 - V I Semiconducting Com- pounds. Ed. D.G. Thomas. N e w York (1967) 136.
/lo/
Korolkov, V. I. I n : P h o t o r e c e i v e r s and P h o t o c o n v e r t e r s . Ed. G. I. Alf e r o v and Yu.V. Shmartsev. L e n i n ~ ~ a d , Nauka ( 1986) 6 (Rus. )./11/ O p t i c a l P r o p e r t i e s o f S a n i c o n d u c t o r s . R e f e r e n c e Book. Ed. M.P. L i s i t s a . Kiev, Naukova Dumka (1987) 607 p. us.).
/12/ I,Iaronchuk, Yu.E., Shestryakov, A.P. and Tolcarev, A.S.,Fiz. Tekhn. Poluprov.
z
(1973) 552./13/ Cardona, i4., Shaklee, K.L. and P o l l a k , F.H., Phys. Rev. (1967) 696.
/14/ Ryvkin, B.S., Fiz; Tekhn. Poluprov. (1981) 1380.
/15/ i.lil.ler, D.A.B., C!lemla, D . S . , Damen, T.C., :ioocl, T.H., Burrus, C.A., Gos- s a r d , A.C. and ?<eignlan, W., Opt. L e t t . ) (1984) 567.