HAL Id: hal-00489490
https://hal.archives-ouvertes.fr/hal-00489490
Submitted on 5 Jun 2010HAL is a multi-disciplinary open access archive for the deposit and dissemination of sci-entific research documents, whether they are pub-lished or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers.
L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.
Comment on “Diagnostics of 13.56 MHz RF sustained
Ar-N plasma by optical emission spectroscopy” by F.U.
Khan, N.U. Rehman, S. Naseer, M.A. Naveed, A.
Qayyum, N.A.D. Khattak and M. Zakaullah
N. Sadeghi, F.J. Gordillo-Vazquez
To cite this version:
N. Sadeghi, F.J. Gordillo-Vazquez. Comment on “Diagnostics of 13.56 MHz RF sustained Ar-N plasma by optical emission spectroscopy” by F.U. Khan, N.U. Rehman, S. Naseer, M.A. Naveed, A. Qayyum, N.A.D. Khattak and M. Zakaullah. European Physical Journal: Applied Physics, EDP Sciences, 2009, 47 (1), pp.1-3. �10.1051/epjap/2009104�. �hal-00489490�
!" #$ ! " ! !$ %& '($ ) !!"'($ * + ,,-. ,, / ! "# $ % # # & ' ( )!*+ ,*-. / 012 # & # 3 # / ' ( + # / "# ,*.4- ' 5.6 7# 8# 9:# 8 ' 7' !; ) 5,..- *.*. # 0 % # # # # " < => ! "# 8 ! "# * ? ..6@ .. A # ## 7 # # B # 99 # 9 5 9, 4- , 44 # # 9 # # # " 99 # ' # > C D E9 9
7 9 9 # ( 9 < % # ## # # "?;> @ ( # 5 # 9 3 # # 5 # # 9# # # " 8 F 3 # 9 ## # " 9# % # ## 9 # 9 # # 3 # 9 # # # % # # # # # 1 7 # 9 9 ) 9 ## # # 9# 58 # # 3 > ?4@ # 9 # # 9 ? @ ## # 9 # % # " 5 9 # 8 # " % " 1 B % # % # % 9 5 99 # < B # # 9 # # 9 ?<E > # ? @ ?-@ E > ? @ 9( 9 # "< # % " # 9 9B # , 9( 9 # "@ > ? @ 9( 9 < # # # # 9 # → 1 B % # B # " E , > ? +@ 9 # B # 5 ## # # # # " 9 # 9 # 5 # # B ) # # # 9 % # 9 # # 9 # , + 9 - + 9 + + 6 ,9 +,* ,6 4 9 +4 -G # 9 % #" " H # 9 - G# 9 G6, +G # I. # # # ? % # 3 9( 9 # -@ 7 # 9 ## 9 % # 9 # # # # #
, 3 % # 9 # # 9 # # # 9 # % # # 9( 9 % " # > ? @ # # # # 9 # 9 # % # #- # B # # # 3 3 # B " 9 # # " B # 99 # % 9 5 9 # 9 9 # #- # 7 # 9 # # 5 # 9 "< " # 8# 5 B % 5 99 9 , + # # " 5 ## #
σ
- G? @ 9 G -9 B , + # #σ
- G? @ B # H 9 4 9 " 3# 4 < ?, +@ 99 # 9 C ∞ ∞ − = = . - G J , - G . - G - G +@ ? @ ? @ ? @ ? @ ? J @ , ? σ π σ B - GI. .,+ 9 - G - # " " # # "- " % 9 9 , + # G ? @ # " # 9 ## / 5B ? @ # % " # ## 7 # # ## σ- G? @ 9( 9 4 # # 5 # 9 , + # # 1 B % B " # # K % " " # σ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ΣO%KI. → P ΣO%KI @ B # # - + * . 3 . . 9 # # ,6 --# # # " % 9 GG+ + # # 9 B +4. ,6 # # 1 B % 7 3 # 6 # " 9+4. ,6 # .. # 9GG+ + 3 # .. # 5# # # # 9 # #- 8 # # " 9G6, +G # .. # # 9 G6G 4- 6 3 B H ## 9 # # "# +4. ,6 G6G 4- # # 9 % # # ## 9 H#
4 GG+ + G6, +G # 8 % 5 9 9 # H# 9 9 # # ## 9 99 9 3 # # 9 " # 9 # # # # # 9 # 3 # " 5# # 9 -6, 4 8 7 3 # 6 # # - 4 # B H 4+ 4 " 9 +- ,G +-- , +-G *, # B # # 9 " 3 3 % H# % # B H # "< # # " ; ## # # " # % "# # 99 % % " # " 1 B % # " " 3 # 9 # # % # 9 # 9 # ) 9 " # 9 % # # # 9 # 9 # " 9 # # # " B H 3 " # # # # # # # # # 8 % # # H 9 % # " # 9 " " # # # 9 5 ?'@ # # # % " 99 " " " #9 9 # # ( ?( @ 9( 9 3 9 9 # # % # " 9 # % # # > ?6@ 9( 9
G 4!! !5 ! * ! ! ! 6 + . * 5 5 5 - 5 5 5 - 5 7 - 5 * 8 +,- . ,5 , - 7 7 , 3 >5 # H3 I 9# % # B > ?-@ E % # 93 9( 9
+ 0 1 2 3 4 5
1x10
-51x10
10
-4 -310
-210
-110
010
110
210
310
410
5 E xc it at io n ra te (1 0 -1 2 c m 3 .s -1 ) kTe (eV)This work
From Ref. 1
> 9 5 9 , +# 9 ( 9 ? # @ # # B H?# @* 0 $ < $ ( # / 8 % 8 Q "" 8 R < H / S H > ! "# 8 ! "# * ? ..6@ .. / ' ' 8 5 ! # # 3 ? ..G@ -, 3 E ! "# *5 ? 6+6@ G4 -N N # N ) < R 1 / < H ! "# ( % 8 - ? 6*6@ -G 4 3# 3 / " H < / # ! "# )C8 / ; ! "# - ? 66G@ +*4 G 7 R N # ' ! "# 5 ? 6* @ 6++ + / 8 8 66- ? B T HC N "@ / 8 R ! # 3 R ( R 1 B 8 ! "# 57 ? 664@ --G * $ ( / S H $ < # 8 ! "# ,*? ..*@ ,,.-6 CJJ "# # # %J! "#( 9R J8 RJ 5 . 8 9 # !1 < ! "# ' ( 9R ? 6++@ , Q N R / R " R > ! "# RC8 ! "# *, ? ..+@ - .