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Submitted on 18 Jul 2018

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Ultrafast laser-induced nanostructuring of metals in regular patterns

Chen Li

To cite this version:

Chen Li. Ultrafast laser-induced nanostructuring of metals in regular patterns. Optics / Photonic.

Université de Lyon; University of Chinese academy of sciences, 2016. English. �NNT : 2016LYSES019�.

�tel-01842330�

Jn MonnUniriy–Sin-Éinn

U rfr- inucnnorucur inof in ru rrn

y

CnLI

Tirninrifufinofruirnfor

rofDocorofPiooy

inujcofOic,oonicnyrfrunci.

Dfnon22My2016forcoi:

Prof.Yon-fnLU (UniriyofNrk-Lincon,USA) Prin Prof.YCHENG (ECinNorUniriy) Rorur Prof.Tin-inJIA (ECinNorUniriy) Rorur Dr.Jn-Pii

COLOMBIER (Jn MonnUniriy,Sin-Éinn) Exinor Prof.JinjunYANG (NnkinUniriy) Exinor Prof.GunuCHENG (UniriyofCinAcyof

Scinc,XIOPM) Co-ircor Dr.RznSTOIAN (Jn MonnUniriy,Sin-Éinn) Dircor Dr. Wn-uiFAN (UniriyofCinAcyof

Scinc,XIOPM) Ini

Prof.QinPn (NionNurScincFounionof

Cin) Ini

2

UniriJn Monn–Sin-Éinn

Lcoocor Scinc,Inniri,Sn

Nnorucur ionuxro if

ru  irinu irru rrf

r

CnLI

TrnouronirrDocurnScincn

ciiOiu,ooniuyrfrunc.

Sounu22Mi2016njurycoo:

Prof.Yon-fnLU (UniriNrk-Lincon,USA) Prin Prof.YCHENG (UnirinorCin'E) Rorur Prof.Tin-inJIA (UnirinorCin'E) Rorur Dr.Jn-PiiCOLOMBIER (UniriJn Monn,Sin-Éinn) Exinur Prof.JinjunYANG (UniriNnkin) Exinur Prof.GunuCHENG (Uniri'Acicinoi

cinc,XIOPM) Co-ircur Dr.RznSTOIAN (UniriJn Monn,Sin-Éinn) Dircur Dr. Wn-uiFAN (Uniri'Acicinoi

cinc,XIOPM) Ini

Prof.QinPn (Fonionnioncinc

nurCin) Ini

Arc

Foconr-inucrioicurfcrucur(f-LIPSS)

rccinificncnicnionuoiiyo

roucnnorucurooic n. Tr

niforurfcninrinnrn,noyinriooy,

iiy, cnic, rkinncounrfiin. Dninon

riofrinrcion,ricuryonrfunc,

unurn riy,urorucninuc

o-ni-i-fruncy-LIPPS(LSFLnHSFL),i

orinion rnicur(┴E) or r(║E)or

orizion.Conirinironiinnno-nufcurin,

i orkfocuononi cniforLIPSSforion,

ciyHSFLforiononicoy.

Inorroinirninoicinicofxci

riinf-LIPSSforion, firoi-ro

ioryourynicoicinicofxciri. Tu ininiinynicoficricfuncion

riiinrinicyrocronicconfiurionn

icrucur.Firrinciiuionrnuor

ocronicconfiurioncnurinxciion, roniforrninoicinic.Tffcofrnin oicinicrconirinLIPSSforioncni.

B onxrin of f-LIPSSforion onix

iffrnri,inoinunn,iconucoriicon,

icricfuiic,in-cryuroyCMSX-4,orou

oy Zr-BMGnicorronincryoy Zr-CA, 

iniLIPSSforion cniincronic

oin y fini-iffrnci-oin (FDTD) iuion, rocronicnryiriuionfooy

ynic of oicxciion,oinoooi i u

nurnri.

WfocuoncronicoriinofLIPSSforionn

r oni riryfcorfor LIPSSforion. LIPSS forioncnxinyoinry ouionon

urfcicronicffc.Tnry ouion iny cofroinrfrncnincinrncr

urfc  (for LSFL(┴E)), in con y 

inrfrnc ncrurfc (for HSFL(┴E)). Sciy,forHSFL(║E)onZr-CA,rooforion

cnrioryoniniiunioroicfi-nncnroc. Toinurfcoooy irunuro

fck-rinnryouionoionurfc.

ii

Ru

L rucur rioiu  urfcinui rr focon(f-LIPSS)irn'nioncinifiucniu

nrionoiiirouirnnorucurnou

onuur'onoiu. Cnonniour

'inniriurfcroc,nonnriooi,

ouiii, cniu, ruuconr

conrfon.Sonri'inrcionr,nricuir

funcur,nor'iuionyriux,

iuionurcouruninuiru

frunci-LIPSS(LSFL  HSFL), c'orinion

rnicuir(┴E)our(║E)àoriionur. Conuuroniournno-fricion,cri

concnrurcnioniforionLIPSS,n

ricuirforionHSFLuriiu.

Afin'uirinicoiurnioir riux

xcinforionf-LIPSS,nouon'oro

iorirounfinurrinicoiu

yniu riuxxci. Aini,nouononuun

ruyniufoncionicriuinrinun

iàconfiurioncroniuurucriin. D

iuionrirrincionnuiuiiourrr

fononconfiurioncroniucnucour

'xciion,roninicoiurnioir.Lff

inic oiurnioiron rinco n

cniforionLIPSS.

Surxrincforionf-LIPSSurix

riuxiffrn,incunuunn iu,uiiciu

iconucur,  iicfonu icriu,unuri

onocriin CMSX-4,unior Zr-BMGon

icriincorronnZr-CA,nouuioncni

forionLIPSSnoincroniur

iuioniffrncfininoinor(FDTD),

iàiriuion'nricroniuuii r

yniu'xciionoiur'ouionoooi

cnoriuionriux.

Nounouconcnronur'oriincroniu

forionLIPSSronunfcurrincioni

urforion. E urxiu r ouion 

'nrioururfcrffcroniu.L

ouion'nriroinrincin'inrfrnc

nrrincinonurfciffu(ourLSFL (┴ E)),cor'inrfrncnronurfc

iffu(ourHSFL(┴E)).Scin,ourHSFL(║E)ur Zr-CA,nouonrooucnrioforionron

urrocuiniiuxionniorouc.L

oooi  urfc, oun c nor 'iuion

r,inuiunouion'nrioururfcfini

ifirrrocion.

ii

Con n 

1 Inroucion 1

2 GnrcofLIPSS 6

2.1InroucionofLIPSS∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙6 2.2 McniofLIPSS∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙8 2.2.1TSiiffrcionory∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙10 2.2.2Surfconorion(SPP) i

LIPSSforion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙12 2.2.3FDTD-cronic(EM)roc∙∙∙∙∙∙∙∙∙13 2.2.4 Sf-ornizion o  on

riiniiy∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙15 2.2.5Sconronicnrion(SHG)∙∙∙∙∙∙∙∙∙∙∙16 2.2.6TrninoiccouinforLIPSS∙∙∙∙∙∙∙∙∙∙16 2.3 MrirnforionunrLIPSS∙∙∙∙∙∙∙∙∙∙∙∙∙18 2.4AicionofLIPSSinriurfcrocin∙∙∙19 2.4.1Surfcin∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙19 2.4.2Triooynicrofuiic∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙20 2.4.3 Moificionofoicrori∙∙∙∙∙∙∙∙∙∙∙∙∙20 2.4.4 Mrkinncoin∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙21 2.4.5Lirinniin∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙22 2.4.6Bio-icicion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙22 2.5Cnnoorunii∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙23 2.6Concuion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙23 3 Dynicofxci ri:funnrocin oiccouinnrion 25 3.1Oicroriofoi∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙25 3.2Ur-orurinrcionioi∙∙∙∙∙∙∙∙∙∙28 3.3Trninronofourfr∙∙∙∙∙∙∙∙34 3.3.1Ecronicffc∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙34 3.3.2Licrucurffc∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙38 3.3.3Ponicffc∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙38 3.4Trninronoficonucorourfr∙∙39 3.5Concuion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙40 4 Dynicofxciri:Exrinofi-ro

rfcoryniory 42 4.1Ti-roiory∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙43 4.2Trninronofiiconourfr∙∙∙∙∙∙∙∙∙45 4.2.1Tcronicnoicroriofincry

iicon∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙45 4.2.2 Murnof ui-u oificion

rooniicon∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙45 4.2.3 Murnofrninoicinic

ofxciiiconinrufuncrn∙∙∙∙∙46 4.3Trninronofunnourfr∙∙∙∙∙∙∙52 4.4TrninronofBMGourfr∙∙∙∙∙∙∙∙∙56 4.5Concuion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙60 5 LIPSSxrinoncri 62 5.1LIPSSxrinu∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙63 5.1.1LIPSSxrinonunn∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙64 5.1.2LIPSSxrinoniconucor(Si)∙∙∙∙67 5.1.3LIPSSxrinonicricfuiic∙∙69 5.1.4LIPSSxrinonin-cry

uroyCMSX-4∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙73 5.1.5LIPSSxrinonorouoyZr-BMG

nicorronincryoyZr-CA∙∙∙∙∙∙∙∙77 5.2CryizionffcurinfionofZr-BMG∙∙∙∙82 5.3Concuion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙83 6 LIPSSforion cninroof icro/

nno-rucur 85

6.1FDTDo∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙86 6.2FDTDiuiononSiory∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙88 6.2.1SioryouLIPSSforonGnA∙∙∙88 6.2.23D-FDTDiuionouLIPSSonGnA∙91 6.2.3FDTDiuiononnryiriuioninuc

ynnocironurfc∙∙∙∙∙∙∙∙∙∙∙∙95 6.3Locizurfcon(LSP)ncrin

cronic(SEW)∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙98 6.4Trooficro/nno-rucurinLIPSSforion∙102 6.4.1 Micro/nno-rucururinLIPSSforion onZr-BMG∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙102 6.4.2Enry ouioninucyinurfc

nnorucur∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙102 6.4.3LSFLforionfrouicrincnr∙107 6.5Roofon-inionnno/icrorucurn

ooryfcinLIPSSforion∙∙∙∙∙∙∙∙∙∙∙∙∙∙111 6.5.1Lruxour ifixorizion

ircion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙111 6.5.2Effcofryinorizionircionon

roo∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙114 6.5.3FDTDiuiononffcofinr

roo∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙115 6.6FDTDiuionforHSFLforion∙∙∙∙∙∙∙∙∙∙∙118 6.6.1HSFL(┴E)onCMSX-4∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙118 6.6.2HSFL(║E)onCA∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙122 6.7FDTDiuionfor LIPSSforionon

fuiic∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙130 6.8Concuion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙132 7 Concuionnrci 135 7.1Concuion∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙135 7.2Prci∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙∙137

Biiory 139

Cr1 In rouc  ion

Nnonufcurin i  inuri-c nufcur of nnocnooy- ojc, ii onocon

riiiy. Tiinoc-u,ri, n co-ffci

nufcurin of nnoc ri, rucur, ic, n

y.Nnonufcurincnirororiofri,

kinronr,ir,orur,infuncionn

ccii. In c of urfc rn x incu

r-rn, ni-rfci, f-cnin, urio- or infrr-rin, nifo, niicroi, crc-rin,

cricyconucifuncionizurfcnoon[NNI16].

Aonnnonufcurincnooi,urfroffrn

xcncciyfori-ffcifricion,roi

nnoccnriyci.

Sincinnionofrin1960[Mi60],rourc

orinconinuouon.Norourccn

ci irnof nfrouriooinfrr, ouu ofroconinuououroru,nn ur-ikorof10²²W/c²,uofiofriiic oic.Duo uicoicinroinofnry,

i n c, r cn ify  ruirn of 

nufcurininrnof cro-c. Aonrr

ourcofcoic,urfr,ciyfoconr

(f),crncinificfioourfnon. Tiinioic oion,rniionorforion

nrkinofciconinioinofcronic

xciion,yonornruiiriucofyic, ciryniooy. Duourfcrcriic,fr

uircyxcicronicyicoccurucfr

nrxionin oic y. T cifici

couinnxciionnrxionoorciy conroinrcionnoroucoificiononicroc. Aoninoninrc,iiuy rruiiof

yiniffrcioniinciinnnocfricion.

Aconuncofiuroruurion,froo concnrrnryofonyf Joinniyuofnof TW/c², yon  rucion ro of ny ri. Furror,iinniioffronyoxin

riouyunknonnon.

Infiof nufcurin,frrn: Aooi ricnrucur ifocon

r,uc ,iconucor,icric,oyr,or

iooiciu,no rifoi riirnrnor ou,rorfri;Bcuurrouninrinfr

cininrnoffc,o-rocininon; A

riyoficro-cnnno-crucurcnfricin on-rocur,forx,o,roonrinuc

rioicurfcrucur(LIPSS). Morrcny,iincr

ofnouuorincorcifr,frcon iorn inrun for nnonufcurin in  inury [Wn11].

A jor xi in  rrc fi of urf r nnonufcurini riurfcrocin.Ariyof

rciicro-cnnno-crucurcnfricyf

riononurfc,iniiyoociznryon

ciiroriionn.Aroinnxi

 ccur rnc ofrinuc rioic urfc

rucur(LIPSS)nrin-ikon ri

urfcirri iiynorycornourc. Oro50yro [Bir65],yroyujcof incrnionuonurofcinificncnooic ron,oniruniriyniiyoociznry

ooicn.LIPSSrnrycini

r n,ou r c of rioicii r

or[BMJ⁺14,SYP⁺83,BRK11],noyronnin

ccorinoircionofxciincricfi. LIPSS

roi  f, rci n o-co oo for urfc

icro/nno-rucurin.Frorcici,nrionof rurnnocrninLIPSScnicioninurfc

ninrin n rn, noy in riooy, iiy,

cnic, rkinncounrfiin [VG13, HVG12, DSS⁺10, BKH⁺15]. Ginironiinfuncionizin ri,i

orkifocuononicniforLIPSSforion.

Tforion cniofLIPSSniriiiu i

nnornnryorforofirriion(..ion

[VRV⁺15])orinurucnonriunr,

uin forr cn of rinin or corn irriion-rfurnnon-cornro cni

n ri on.Sr cni ruo

xinforion of LIPSS,incuin roy o corniroc-nrizcrinninrfrnc

(Si) o[SYP⁺83],oicrnin ocouo

crinroc[BRK11],urfc on orion(SPP)

iLIPSSforion [MM08, DTS⁺12, OTN⁺11, MM12],or

crocoicf-ornizionofun r [VRV⁺15].Ty inooiccouinirninoicinic,onof

crinourcnnryoiion ifufinof

yncroninconrion,innuyonorr

ri on.Ayoiirccnci

on  inrfrnc of  incin r riion i

urfc-crcronic , ic,inc of

 ykforofurfconorion [BRK11, OTN⁺11],uorforofcrrnoxcu(no

 xinc of cronicfi rucur riion rnn inSi o[SYP+83]).SPPinucforion

oryioninrfrncofincinrfi i

rinucSPPfor,or,SPPrxciunr

coniionof-cin,ifficuofufiforfurfcor forrnofriroiciniconouorSPP. Frorrnciyofkininoconirionro

of riu roun [SRO⁺12, AKO⁺14] n, uy, i

nrionnouion irirriion,noyiroin

iinfufiinonuconrionforrrnof

coruuyroofiniiucrincnr. Trn orkironinouionro

cronicnryiriuionnifocuonynic

ofoicxciion,oinoooiiirriiono,n

croniciuion. Sr ri in ic,

iconucinnicriciorru;izin

 uin rinricuryoyinorou

ncryin.

Inorroinirninoicinicofxci

riin LIPSSforion, firoi-ro

cniuofooynicofxci ri.Tu in iniinynicoficricfuncion rii

inrinicyro cronic confiurion nic

rucur.Firrinciiuionrnuoro

cronicconfiurioncnurinxciion,roni

forrninoicinic.

Orin LIPSSforion cni,xrinof riforionon ,iconucornicric r

crriou.TnorooyofLIPSSiornnyz

oiniroofurfcicro/nno-rucurinLIPSS forion.).

Tfiruionroiriuionofcronic

nry on urfc. In orr o ini  ro of

icro/nno-rucur in LIPSS forion, fini-iffrnc

i-oin(FDTD) o[Y66]i uoccu

inoonoucronicnryiriuiononurfc. A coriiiinircoriionSio. Incronicoin,LIPSSforionoriinfro

inrfrncnkinofcroniconurfc, incuinurfccr ,incinr,urfcon

orion(SPP)ncooiiffrcincn[GA06, LM7]. Wriouci incrinnon

inoLIPSS.Scrcronic(SEW)oriin

fro  nno-rournc on urfc, u r 

nnoric on urfc. T crin crcriic of nnoriciniffrn riuoocicrino

urfcrouoooinoinicroofocizurfc

on(LSP)onnnoric[Mi07].Srori

o uo ui corn crin cnriofor or

ou nry fi. Pricur  o o- n

i-i-fruncy-LIPPS(LSFL n HSFL)forion r

ouin.

Tiirucurfoo:

Cr2ri nrcofr-inucrioic

urfcrucur(LIPSS). Afir riLIPSSroron

iffrn oi uon nr-infrr f-r u irriion. Hor,LIPSSforioncnirnoyfuyunroo

niunruninonrniononon

uioninfi.SrLIPSSforionoriiri

n fc rinrouc,incuin Siory, FDTD-EM

roc,f-ornizion oofun rn LIPSS forionrciy i iurfc onorion (SPP),conronic nrion(SHG) rnin oicroriurinirriion. Wuyinrouc ri

rnforionunrLIPSS,rornncnof

 riinciry,cooiion,cryrucurn

urfc orooy.A,oicionofLIPSSin

riurfcrocin,incuinurfc in,riooy,

oificion of oic rori, rkin n coin,i

rinniin,io-icicion.

In Cr3, ri inyicnoninr

ionrocronicxciionnrxion. Wifocu

onoiccouin,fir inroucoicroriof

oirify. Nx, icurioucoxrocin

urfr-rinrcion. Tnrninronof

niconucorourfrrrioo

coxrocrocronicconfiurionn

icrucur,ucoo-xciionof/-n-cron,

cron-cronrizion,inrnninrnrniion, cnofcronicconfiurion,cron-icrizion,

iciorrnoon.

In Cr 4, xrin y ofi-ro

ioryiuinxrinirinrouc.Finy,

urruonicricfuncionnoicynic

ofin-cryiicon,unnn Zr-uk 

(Zr-BMG)rinroucnicurciy.

Cr 5 cri xrin off-LIPSS onix

iffrnri,inoinunn,iconucoriicon,

icricfuiic,in-cryuroyCMSX-4,orou

oyZr-BMGnicorronincryoyZr-CA.Tn

orooyof LIPSSiornnyz icnnin

cronicrocoy(SEM)noicforcicroco(AFM).In

iion,for Zr-BMG,rucurcn iin LIPSSr

ur y cron ck-cr iffrcion(EBSD). Finy, LIPSScrcriicforixrirrciynyzn

uriz,roiinxrinruforiniin

LIPSSforioncni.

InCr6,fir,FDTD oirifyinroucn

niiuoiucof Siory. Scony,

ociz urfc onin nnorucur,ir ffc on

crincronic,rooficro/nno-

rucurinLIPSSforionrinroucnnyzyFDTD

iuion.Nx,forioncniofLSFLnHSFLon

ruroyrrciynyznicu.Finy, LIPSSforiononfuiicinyzyFDTDiuion.

Finy,concuionrof Cr7ru in

xrinrunicuioncion,uinforr

yni of  roo LIPSS forion cnrio. T

rci cion offr n i on funn

uionouxrinnFDTDiuionrrin

LIPSSforion,onociicion.

Cr2

Gnr c ofLIPSS

Inicr,nrcofr-inucrioicurfc

rucur(LIPSS)rinrouc. Afir  icu riou

cox rocin urfr-rinrcion. W

unrinroofoicnrucurrninnirroin riforion.Scyof LIPSSroroniffrn

oiuonnr-infrrf-ruirriionruriz. TnrLIPSSforionoriiirrinfc

ricu. Nx, inrouc rirnforionunr LIPSS,rornncnof riin

ciry,cooiion,cryrucurnurfc orooy. Finy,riooniicionofLIPSSinri

urfcrocinnconuncinoicncnic.

2 .1Inrouc ionofLIPSS

Trinucrioicurfcrucur(LIPSS)rrn

ruruccionofrucurrinrinrrnn,

onnouynrycornrriionon ri

urfc;oxofLIPSSroninFi.2.1.In1965, Birnufiryornononofriinucy

ruyroniconucorurfc，iciconiofrur

rnofcrcknyofrroo(cinofou 1 )[Bir65].Ti inninofroificrrcfi

ircoforioncninicionfi.In

fooinyrLIPSSrcrnoronnykinof

oiriforrnofruurion.Tiu

rinrncofunirnononinucyi,

forinuyojcofuyofi ork. Morrcny, uroruriionrcicificnionfori

oniinrininriurfc,fooini noninrxciionncronicnon-uiiriucninucno inrcionfur.Inricur,focon(f)r-inuc

riornoforinionnrioiciioonc,

ucrnr n [BNJ14]. Unrurf

rioninrnfrofoconoicoconr,

or r y of rur ri rn:

o-i-fruncyLIPSS(LSFL),i-i-fruncyLIPSS (HSFL),iiffrnorinionr(║E)orrnicur (┴E)ororizion. Tyron irnof

rininonirriionconiionnoinici

xroino.ForxinFi2.1,LSFL(┴E)

xiiyonunn,iconucorincryiicon,

uk (BMG),cryoy(CA)fro BMGn

uroy CMSX-4. Ty crcriz oy ic n

o-nri.LSFL(║E)xionrnoficricn

 or onfuiic(Fi. 2.1(c)). Hii fruncyrucurruyroronriou rii

rioicii(ono100n), HSFL(║E)xionCA(Fi. 2.1()).Fi.2.1(f)onx r HSFL(┴E)co

iionuroyCMSX-4.Iniion,corcro-ri

(ocroo)roriirioofr

icron ucirnr-n,forx,roo

roroniiconinFi2.1().

In nr, LIPSS forion i ffc y irriion coniion,incn ri.Tirriionconiion

incurfunc,nurofru,orizion, incinn,cnnin,c. Tyicinconiion

incuir,oxyn,cuu,r,irfrciinxiuin

orfcorcn oifyrorirouninrfc. Tfcorxrcicoxinfuncyffci couinncrin,yniccofncnoooi

nfckiu.Iniork,iniLIPPSforion inirnironn. Mriconiionincucoxoic crcriici..rfrciinx,urfcrounnr

rori,ucrcofficinnrniionoin(in

oin,orizinrur,c).

Ayicroucofrionorrucurin,LIPSS forioninocoxcinofyicrocro

 r-ri inrcion; fro r xciion, nry

oiionono ri onnonof

urfcoooi.Iuyino uicynicfix

yoicnr riron.Brifrnionof

xciion nrnforion roc rinroucin

fooincrnifocuroncrcriicfur

inoorrrucurrn.

Fiur 2.1: SEMi of LIPSS on iffrn riirri y

inry-orizfru:() unn;()iconucorin

cryiicon;(c)Fuiic;()Buk (BMG);()Cryoy (CA)froBMG;(f)CMSX-4.Trorizion(E)ircioniinic

in()iou-rro.Noiffrncinci.

2 .2 Mcn iofLIPSS

WnininroucoryrLIPSSiunir

nonononooi,incuin [DTS⁺12, GIK⁺11],iconucor[BH03, BBK⁺02],icric[CKR04, HCT⁺07], cric[DRW⁺03] n oyr [BBK99]. T

coninuou r[KIA⁺11]nur ionu

urioncnnrcicriirioofou

r n, iciofnro-i-fruncy LIPSS(LSFL) [BNJ14]. Unrurfrionin

rnfrofoconoicoconr,xc LSFL,fin

nno-rirnr iirio ucr

nfofirn,iciofnr

i-i-fruncyLIPSS(HSFL)[BNJ14].Furror,cor

cro-riiirioinricronrn,

rryofconicfurrnrinurfr

ion[BBK⁺02]. Gnry, LIPSS coyfor fr

crinnurofufuncnrin-uion

ro.Tfckrocnincinrnurfc

nnorucur yniornroinriforion [LCC⁺16].TLIPSSorinioniconroyorizionof

rcricfi. Hor,urfc fco yn iornroinLIPSSorinion[LCC⁺16].

SrLIPSSxrinonirnofriunr

iffrnrnncrriounnyzi

innioricui,or,LIPSSforioncni

rnoyfuyunrooniunrunino.Sr

cni ruoxinforionof LIPSS, incuin roy o o corni roc– 

nrizcrin ninrfrnc(Si) o [YPD⁺83, SYP⁺83],  i LIPSSforion[BNJ14, SHT⁺09, OHM⁺10], urfc on orion (SPP) i LIPSS forion[HG10,VMG07,VG08,CGB⁺12],nf-ornizion ofun r[VRV⁺15].ProfLIPSSroroniffrn

oiuonnr-infrrf-ruirriionnroo

forion cnirurizin 2-1. T in LIPSSforioncniricuinfooin.

T2-1:LirururyofLIPSSroroniffrnoi(,

iconucornicric)uonnr-infrrf-ruirriion (=740-800n, =25-160f, <5kHz)nnrynorincinciniror

cuu, n roo forion cni. Lic rucur: c–in-cryin, –orou; LIPSS orinion: ┴:ri in

rnicuroorizion,║:riinroorizion;LIPSS forion cni: Si: Siory[SYP⁺83], SPP:urfcon

orion,rounffc,ffc,urfc,inrfrnccni, Dru:Dru oforrninoicrori,CE:Couoxoion. Mric: –rcoor,iconucor–rncoor,icric–u

coor.