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HAL Id: jpa-00220835

https://hal.archives-ouvertes.fr/jpa-00220835

Submitted on 1 Jan 1981

HAL is a multi-disciplinary open access archive for the deposit and dissemination of sci- entific research documents, whether they are pub- lished or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers.

L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

CRYSTALLIZATION OF AMORPHOUS Se FILMS

G. Fleury, C. Viger, C. Vautier, C. Lhermitte

To cite this version:

G. Fleury, C. Viger, C. Vautier, C. Lhermitte. CRYSTALLIZATION OF AMORPHOUS Se FILMS.

Journal de Physique Colloques, 1981, 42 (C4), pp.C4-947-C4-950. �10.1051/jphyscol:19814207�. �jpa-

00220835�

(2)

CRYSTALLIZATION OF AMORPHOUS S e FILMS

G. Fleury, C. Viger, C . Vautier and C . Lhermitte

Laboratoire dlEtudes des Couches Minces Amorphes e t PoZycristaZZines, i.'acuZte' des Sciences de h'ouen, 96160 l*!~nt-Snint-Aigna?~, France

A b s t r a c t - C r y s t a l l i z a t i o n i n amorphous S e f i l m s p r o d u c e d by f l a s h e v a p o r a t i o n t e c h n i c h a s b e e n s t u d i e d f r o m c o n d u c t i v i t y m e a s u r e m e n t s o n t h e t e m p e r a t u r e r a n g e 3 1 3 t o 3 5 3 K . The e x p e r i - m e n t a l r e s u l t s show a n h e t e r o g e n o u s n u c l e a t i o n a n d t h a t t h e

c r y s t a l l i z a t i o n d e p e n d s upon t h i c k n e s s ; t h e y a l l o w u s t o d e - t e r m i n e t h e p a r a m e t e r s w h i c h c h a r a c t e r i s e t h i s phonomenon : g r o w t h a n d n u c l e a t i o n r a t e s , c o n c e n t r a t i o n a n d mean s i z e o f t h e c r y s t a l l i t e s i n good a g r e e m e n t w i t h m i c r o s c o p y s t u d i e s , a s w e l l a s t h e g r o w t h r a t e a c t i v a t i o n e n e r g y .

I n t r o d u c t i o n

-

C r y s t a l l i z a t i o n i n amorphous m a t e r i a l s i n v o l v e s elec- t r o n d i f f r a c t i o n a n d m i c r o s c o p y 1 1 1 1 2 1 , d i f f e r e n t i a l t h e r m a l a n a l y s i s

13

1

14

1 ,

h o t o e m i s s i o n and o p t i c a l a b s o r p t i o n 1 5 1 1 6 1

.

R e c e n t l y G e r m a i n e t a 1 1 7 7 1 8

1

h a v e shown t h a t c o n d u c t i v i t y m e a s u r e m e n t s c a n b e a p p l i e d t o s t u d y c r y s t a l l i z a t i o n p r o c e s s e s . T h i s method c a n p r o v i d e b o t h t h e d e t e r m i n a t i o n o f t h e c r y s t a l l i z a t i o n t y p e a s w e l l a s t h e p a r a m e t e r s w h i c h g o v e r n and c h a r a c t e r i s e t h e c r y s t a l l i z a t i o n a n d h a s b e e n u s e d f o r m a t e r i a l s s u c h a s Ge a n d S i . F o r t h e s e m a t e r i a l s t h e r a t i o f r o m c r y s t a l l i n e t o a m o r p h o u s c o n d u c t i v i t i e s i s a b o u t 20 w h e r e a s f o r S e , i t i s u p t o 1 0 5 , w h i c h l e a d s t o a n a d j u s t m e n t o f t h e m o d e l . T h i s p a p e r d e a l s w i t h a n a t t e m p t t o a p p l y t h i s model t o S e f i l m s and t o g i v e t h e v a l u e s o f t h e c o r r e s p o n d i n g p a r a m e t e r s .

T h e o r e t i c a l - The model d e v e l o p p e d by G e r m a i n e t a 1 i s b a s e d o n t h e e x i s t e n c e o f two t y p e s o f c r y s t a l 1 i t e s : o n e d u e t c b m o g e n o u s n u c l e a t i o n

( c r y s t a l l i t e s b e i n g c r e a t e d a n d g r o w i n g a l l a l o n g t h e c r y s t a l l i z a t i o n t a k e s p l a c e ) , t h e o t h e r d u e t o h e t e r o g e n o u s n u c l e a t i o n ( t h e c r y s t a l l i - t e s b e i n g p r e s e n t a t t h e i n i t i a l t i m e ) , b o t h g r o w i n g i n two w a y s , f i r s t i n a t h r e e - d i m e n s i o n n a l ( s p h e r i c a l ) way a s l o n g a s t h e i r d i a m e - t e r i s s m a l l e r t h a n t h e t h i c k n e s s e o f t h e l a y e r , t h e n i n a two-dimen- s i o n n a l ( c y l i n d r i c a l ) way and i n t e r f e r i n g i n two c r y s t a l l i z a t i o n modes : b u l k i n d u c e d c r y s t a l l i z a t i o n ( B . I . C ) a n d s u r f a c e i n d u c e d c r y s - t a l l i z a t i o n (S. 1 . C ) .

B u l k i n d u c e d c r y s t a l l i z a t i o n - S t a r t i n g f r o m Avrami r e l a t i o n , w h i c h g i v e s t h e c r y s t a l l i z a t i o n v o l u m e V ( t ) , f o r homogenous n u c l e a t i o n :

( w h e r e

n

i s a s h a p e f a c t o r , Y i t h e g r o w t h r a t e o f t h e c r y s t a l l i t e s i n t h e i d i r e c t i o n a n d V I t h e n u c l e a t i o n r a t e )

Article published online by EDP Sciences and available at http://dx.doi.org/10.1051/jphyscol:19814207

(3)

C4-948 JOURNAL DE PHYSIQUE

and a s s u m i n g a n i s o t r o p i c g r o w t h r a t e , t h e a u t h o r s h a v e e s t a b l i s h e d t h e c r y s t a l l i z a t i o n k i n e t i c e q u a t i o n s :

( 1 ) Ln

2

= P

2

( a +v t 1 2 + - n t v 2 ( t 3 - - r 3 ) 1

+- -

l -X S o g 3 g 3 n ' e v 3 t 4 f o r g t > T

1 1 n '

( 2 ) Ln

-

= P

1

( a + v t ) ' +

-

n- v a t 4

3 e g f o r t < r

l -X S o g

( T b e i n g a c r i t i c a l t i m e f o r t h e g r o w t h o f a c r y s t a l l i t e t o s w i t c h f r o m a s p h e r i c a l t o a c y l i n d r i c a l mode, v t h e g r o w t h r a t e , P t h e num- b e r a n d a. t h e mean s i z e o f t h e i n i t i a l c Y y s t a l l i t e s a n d n ' t h e n u c l e - a t i o n r a t e ) .

S u r f a c e i n d u c e d c r y s t a l l i z a t i o n

-

I n c a s e o f S . 1 . C t h e y a l s o c a l c u l a - t e d b o t h t h e v a r i a t i o n w i t h t i m e o f t h e c o n d u c t a n c e o f t h e l a y e r :

v t

TT3

a e

O c

( w h e r e

7

i s t h e r a t i o o f t h e c r y s t a l l i n e t o t h e amorphous c o n d u c t i - a

v i t i e s ) a n d t h e c r y s t a l l i n e f r a c t i o n v

x = ~ a 2 n J t f o r t < T

vm

1 P11

L n - = -

l -X S (ao+v t 1 2 f o r t > T g

Then u s i n g t h e L a n d a u e r e q u a t i o n ,

w h i c h g i v e s f o r s p h e r i c a l s h a p e d c r y s t a l l i t e s t h e r e l a t i o n b e t w e e n t h e c r y s t a l l i n e f r a c t i o e X v e r s u s t h e c o n d u c t i v i t y o f t h e l a y e r , it i s p o s s i b l e a s f a r a s i s known, t o o b t a i n t h e c r y s t a l l i z a t i o n t y p e as

"a

w e l l a s t h e v a l u e s o f t h e p a r a m e t e r s . Ex e r i m e n t a l

-

The s a m p l e s h a v i n g a P h i c k n e s s r a n g i n g f r o m 50008 t o

Et)

' I I

l v m h a v e b e e n p r e p a r e d b y f l a s h e v a p o r a t i o n t e c h n i c I 9 l ~ i g . 1 e x h i b i f t a t y p i c a l c r s t a l l i z a t i o n c u r v e

-

v e r s u s t i m e

7

( a b ) i n c r e a s e

Z a

o f t h e c o n d u c t i v i t y w i t h t h e tempe- r a t u r e , ( b c ) s t a b i l i s a t i o n a n d ( c d ) r e a l i s o t h e r m i c c r y s t a l l i z a t i o n

l .

The i s o t h e r m i c c r y s t a l l i z a t i o n h a s 1 b e e n s t u d i e d f o r two s e r i e s o f

s a m p l e s : lpm t h i c k ( S . l ) a n d I

5000; t h i c k ( S . ? ) , t h e c o r r e s p o n - I t d i n g c u r v e s Ln- = f ( t ) a n d a b C

l -X d

Ln Ln (-L) = Ln ( t ) h a v e b e e n

l -X F i g . 1

-

A t y p i c a l v a r i a t i o n w i t h

p l o t t e d o n f i g u r e s 2 a n d 3 ( S . 1 )

,

t i m e o f t h e r e l a t i v e c o n d u c -

4 and 5 ( s . 2 ) ; t a n c e

-

Z t

E q u a t i o n s (1) a n d ( 2 ) b e i n g r e d u c e d Z a

t o L(-) l - X 1 3. ~ t ~ , w e c a n see t h a t t h e b e h a v i o r o f t h e s a m p l e s d e p e n d s upon t h i c k n e s s ; t h e y e x h i b i t a r = l , 2 a n d 4 b e h a v i o r f o r t h e h i g h e s t t h i c k n e s s ( S . 1 ) and r = 1 , 2 a n d 3 b e h a v i o r f o r t h e l o w e s t ( S . 2 )

,

w h i c h i n d i c a t e s i n b o t h k i n d f i r s t a n h e t e r o g e n o u s c r y s t a l l i z a t i o n a t t h e beg i n n i n g o f t h e phenomenon a n d t h e n a n homogenous c r y s t a l l i z a t i o n

i n t h e b u l k .

(4)

The v a l u e s of t h e

In l

I - 1

D

p a r a m e t e r s h a v e b e e n c a l c u l a t e d f o r e a c h s e r i e s : t h e g r o w t h r a t e v i n - c r e a s e s w i t h ? h e t e m p e r a t u r e ( 0 . 6 t o

<>,*

2 . 3 i S-' f o r a tem- p e r a t u r e r a n g e 334

t o 351K ( S 8 1 ) and 0 . 6 t o 1.8A S - ' f o r t e m p e r a t u r e r a n g e 338 t o 346K ( S . 2 ) ( a n d a p p e a r s t o b e r a t h e r i n d e p e n d e n t of t h e t h i c k n e s s w h i l e t h e n u c l e a -

t i o n r a t e n ' i n c r e a -

2 1 ' ses from 1 t o 3 10'

00 l o o 160 a o o cm-3 S-' ( S . 1) and

t'min f r o m 1 t o 1.5 109 F i g . 2

-

T h i c k n e s s e=lpm ;I,n

-

= f ( t ) w i t h tempe- C m - 3 s - ~ ( S . 2 ) i n

l -X

r a t u r e a s p a r a m e t e r :

*

351K, 3 246K,

*

340K, 337K t h e Same t e m p e r a t u r e r a n g e s . The o t h e r

1n-l-

l-X

2D

p a r a m e t e r s h a v e b e e n f o u n d

/'-

c o n s t a n t b o t h w i t h t e m p e r a t u r e and t h i c k n e s s :0,2pm f o r t h e mean s i z e of t h e c r y s t a l l i t e s ,

i n good a g r e e m e n t w i t h m i c r o s - c o p y m e a s u r e m e n t s ,and 1 0 ' c m f o r t h e i r c o n c e n t r a t i o n p e r u n i t s u r f a c e . We h a v e a l s o c a l c u l a t e d t h e a c t i v a t i o n

1.5 e n e r g y of t h e g r o w t h r a t e

from t h e c u r v e v = f ( $ ) which w e f o u n d a p p r o x i m a t i v e l y g

e q u a l t o 0.78eV w h a t e v e r t h e t h i c k n e s s .

1.0 . C o n c l u s i o n

-

The a d a p t a t i o n

o f Germain a n d a 1 method t o m a t e r i a l s l i k e s e l e n i u m which r a t i o , c r y s t a l l i n e t o amor- phous c o n d u c t i v i t i e s i s v e r y

0.5 h i g h , l e a d s t o a good d e t e r -

m i n a t i o n of t h e p a r a m e t e r s which g o v e r n t h e c r y s t a l l i z a - t i o n k i n e t i c s . The d i f f e r e n t r e s u l t s a r e i n good a g r e e m e n t w i t h t h o s e o b t a i n e d by o t h e r methods : e l e c t r o n m i c r o s c o p y

0 5 0 l00 '5O l,'min

l and d i f f e r e n t i a l t e r m a l E i g . 3

-

T h i c k n e s s e = 5 0 0 0 i , ~ n ==f ( t ) a n a l y s i s .

w i t h t e m p e r a t u r e a s p a r a m e t e r :

3 346K,

*

341K, 338K

(5)

C4-950 JOURNAL DE PHYSIQUE

0

F i g . 4

-

T h i c k n e s s e = l u m F i g . 5

-

T h i c k n e s s e = 5 0 0 0 A

1 1

L n L n = f ( L n t ) w i t h t e m p e r a t u r e L n L n

-

= f ( L n t ) w i t h t e m p e r a -

1 X l - X

a s p a r a m e t e r :

*

3 5 1 K , i 2 4 6 K , t u r e a s p a r a m e t e r :i 3 4 6 K ;

*

3 4 0 K ; 3 3 7 K

*

3 4 1 K ; 3 3 8 K

R e f e r e n c e s

1 1 1 R . F . ADAMSKI, J . A p p l . P h y s .

40,

4 3 0 1 ( 1 9 6 9 )

1 2 1 K . S . KIM a n d D. TURNBULL, J . A p p l . P h y s .

44,

5 2 3 7 ( 1 9 7 3 )

1 3 1 J . GRENET, J . P . LARMAGNAC a n d P . MICHON, T h i n S o l i d F i l m s ,

67,

L 1 7 ( 1 9 8 0 )

1 4 1 M . MATSURA a n d K. S U Z U K I , J . M a t . S c i .

14,

3 9 5 ( 1 9 7 9 )

1 5 1 C . G . R I B L I N G , D . T . P I E R C E a n d W.E. S P I C E R , P h y s . R e v . B ,

4 ,

4 4 1 7 , ( 1 9 1 2 )

1 6 1 N.A. BLUM a n d C . FELDMAN, J . N o n - C r y s t a l l i n e S o l i d s

2 ,

2 9 , ( 1 9 7 6 ) 1 7

1

P . GERMAIN, K. ZELLAMA, S . SQUELARD a n d J . C . BOURGOIN, J . A p p 1 .

P h y s .

S,

6 9 8 6 ( 1 9 7 9 )

( 8 ( K. ZELLAMA, P . GERMAIN, S . SQUELARD a n d J . C . BOURGOIN, J . A p p l . P h y s .

S,

6 9 9 5 ( 1 9 7 9 )

1 9 1 G . FLEURY, A . HAMOU, C . VAUTIER a n d C . V I G E R , P h y s . S t a t . S o l i d i , 6 4 , ( 1 9 8 1 )

-

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