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HAL Id: jpa-00225993

https://hal.archives-ouvertes.fr/jpa-00225993

Submitted on 1 Jan 1986

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SPHERICAL WAVE ANALYSIS AND MULTIPLE SCATTERING EFFECTS IN HYDROGENATED

AMORPHOUS SILICON

A. Balerna, M. Benfatto, S. Mobilio, C. Natoli, A. Filipponi, F. Evangelisti

To cite this version:

A. Balerna, M. Benfatto, S. Mobilio, C. Natoli, A. Filipponi, et al.. SPHERICAL WAVE ANALY- SIS AND MULTIPLE SCATTERING EFFECTS IN HYDROGENATED AMORPHOUS SILICON.

Journal de Physique Colloques, 1986, 47 (C8), pp.C8-63-C8-66. �10.1051/jphyscol:1986809�. �jpa-

00225993�

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SPHERICAL WAVE ANALYSIS AND MULTIPLE SCATTERING EFFECTS IN HYDROGENATED AMORPHOUS SILICON

A. BALERNA, M. BENFATTO, S. MOBILIO, C.R. NATOLI, A . FILIPPONI*

and F. EVANGELISTI*

I.N.F.N., Laboratori Nazionali di Frascati, C.P. 13, I-00044 Frascati, Italy

" ~ i p a r t i m e n t o di Fisica, Universitd "La Sapienza", I-00185 Roma, Italy

A b s t r a c t . - We have performed a s p h e r i c a l wave a n a l y s i s of t h e EXAFS s p e c t r a of h y d r o g e n a t e d amorphous s i l i c o n i n o r d e r t o d e t e c t c o n t r i b u t i o n s due t o t h e n e x t n e a r e s t n e i g h b o r s c a t t e r i n g a n d / o r m u l t i p l e s c a t t e r i n g . A h i g h f r e q u e n c y o s c i l l a t i o n was found that c o u l d be i n t e r p r e t e d I n t e r m s of a s e c o n d - s h e l l c o n t r i b u t i o n w i t h o u t m u l t i p l e s c a t t e r i n g e f f e c t s . A f e a t u r e which c o u l d n o t be e x p l a i n e d i n t h e o n e - e l e c t r o n scheme was i d e n t i f i e d and t e n t a t i v e l y a t t r i b u t e d t o a many-electron e f f e c t .

I n t r o d u c t i o n . - When t h e s t a n d a r d p l a n e wave a n a l y s i s i s a p p l i e d t o t h e EXAFS s p e c t r a of amorphous m a t e r i a l s , u s u a l l y i n f o r m a t i o n on t h e f i r s t s h e l l o n l y is o b t a i n e d . The main r e a s o n is t h e l a c k of s i g n a l from n e x t - n e a r e s t s h e l l s a t l a r g e k-values due t o t h e damping e f f e c t c a u s e d by t h e l a r g e d i s t r i b u t i o n of bond a n g l e s . On t h e o t h e r h a n d , t h e u s e of low k v a l u e s i s h i g h l y u n c e r t a i n due t o t h e p o s s i b l e o c c u r r e n c e of m u l t i p l e s c a t t e r i n g e f f e c t s . R e c e n t l y i t has been shown [ l ] t h a t s i n g l e s c a t t e r i n g t h e o r y c a n b e a p p l i e d down t o t h e XANES r e g i o n ( i . e . down t o k -1.5 i - l ) p r o v i d e d t h a t a f u l l c u r v e d wave t h e o q y of EXAFS i s used. It h a s a l s o been shown [ 2 ] t h a t a f t e r a c a r e f u l s u b t r a c t i o n of t h e EXAFS s i g n a l , m u l t i p l e s c a t t e r i n g e f f e c t s c a n b e r e v e a l e d i n t h e r e g i o n above -1.5 A-1, g a i n i n g i n f o r m a t i o n on t h e t h r e e and f o u r body c o r r e l a t i o n s .

We have i n v e s t i g a t e d t h e p o s s i b i l i t y of u s i n g a s p h e r i c a l wave a n a l y s i s i n h y d r o g e n a t e d amorphous s i l i c o n i n o r d e r t o g e t n e x t - n e a r e s t n e i g h b o r d i s t a n c e and c o o r d i n a t i o n and i s o l a t e p o s s i b l e m u l t i p l e s c a t t e r i n g c o n t r i b u t i o n i n t h e EXAFS spectrum.

E x p e r i m e n t a l . - K-edge s p e c t r a of glow-discharge amorphous s i l i c o n were r e c o r d e d a t LURE (Orsay) u s i n g t h e ACO s t o r a g e r i n g . The EXAFS s i g n a l was e x t r a c t e d by s u b t r a c t i n g a n a t o m i c - l i k e p o l i n o m i a l background t o t h e d a t a i n t h e r a n g e k = 1.5-9.5 1-l. E, has been p l a c e d i n t h e m i d d l e of t h e s t e e p r i s e of t h e a b s o r p t i o n edge. With a s i m p l e a n a l y s i s i n t e r m s of F o u r i e r t r a n s f o r m (FT) o n l y t h e f i r s t c o o r d i n a t i o n s h e l l c o n t r i b u t i o n has been d e t e c t e d [ 3 ] .

Theory. - The EXAFS s i g n a l f o r a d i s o r d e r e d system i s d e s c r i b e d by:

Article published online by EDP Sciences and available at http://dx.doi.org/10.1051/jphyscol:1986809

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JOURNAL DE PHYSIQUE

where g ( r ) is t h e r a d i a l d i s t r i b u t i o n f u n c t i o n , f ( k , r ) and @ ( k , r ) a r e t h e s c a t t e r i n g a m p l i t u d e and p h a s e , r e s p e c t i v e l y and h is t h e mean f r e e p a t h of t h e p h o t o e x c i t e d e l e c t r o n . f ( k , r ) and @ ( k , r ) have been c a l c u l a t e d i n t h e s p h e r i c a l wave a p p r o x i m a t i o n [ 4 ] . The phase s h i f t s were c a l c u l a t e d f o r a 17-atom c l u s t e r w i t h diamond geometry u s i n g a m u f f i n - t i n p o t e n t i a l a n d a l l o w i n g a 10% o v e r l a p of t h e s p h e r e s .

A mean f r e e p a t h A p r o p o r t i o n a l t o k was u s e d . T h i s is a r e a s o n a b l e a p p r o x i m a t i o n i n t h e range 30.-400. eV, w h i l e a poor one a t lower e n e r g i e s where h

r i s e s , r e a c h e s a maximum i n t h e r e g i o n a r o u n d 10 eV and t h a n f a l l s t o z e r o due t o t h e core-hole f i n i t e l i f e t i m e . However, t h e u s e of t h i s complex f u n c t i o n a l form i s n o t n e c e s s a r y a t p r e s e n t , because t h e i n f l u e n c e of h on t h e f i n a l r e s u l t s i s small a n d of t h e o r d e r of t h e e x p e r i m e n t a l u n c e r t a i n t y .

0.2 .

0 9 0 0 0

Experimental Exafs

0.1 First Shell ('Theory) /

F i g . 1 - F o u r i e r f i l t e r e d e x p e r i m e n t a l EXAFS and t h e o r e t i c a l f i r s t s h e l l s i g n a l .

A n a l y s i s . - I n o r d e r t o r e v e a l p o s s i b l e c o n t r i b u t i o n s t o EXAFS due t o m u l t i p l e s c a t t e r i n g a n d / o r t o n e x t - n e a r e s t n e i g h b o r s , we have s u p p r e s s e d t h e f i r s t s h e l l c o n t r i b u t i o n . T h i s has been done by s u b t r a c t i n g from t h e e x p e r i m e n t a l d a t a a t h e o r e t i c a l f i r s t s h e l l c o n t r i b u t i o n g e n e r a t e d from t h e o r e t i c a l p h a s e s h i f t s , It was n o t p o s s i b l e t o u s e "experimental" p h a s e s and a m p l i t u d e s b e c a u s e t h e a c t u a l f u n c t i o n s a r e d i s t o r t e d by t h e u s u a l F o u r i e r f i l t e r i n g p r o c e d u r e . For t h e same r e a s o n t h e s t r u c t u r a l p a r a m e t e r s t o o had t o be o p t i m i z e d . T h i s was accomplished by f i t t i n g a F o u r i e r f i l t e r e d t h e o r e t i c a l spectrum t o t h e back-FT of t h e e x p e r i m e n t a l f i r s t peak. The b e s t agreement was o b t a i n e d by p l a c i n g t h e m u f f i n - t i n l e v e l 1.4 eV above Eo. The r e s u l t is p r e s e n t e d i n Fig.1. The o p t i m i z e d s t r u c t u r a l p a r a m e t e r s a r e

CN = . 9 3 x 4 atoms R = 2.35 1

o2 = 0.0044 i2

T h e i r v a l u e s a r e i n good agreement w i t h t h o s e o b t a i n e d w i t h a s t a n d a r d EXAFS

a n d l y s i s [ 3 ] .

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R e s i d u a l Spectrum. - I n Fig.2 we show t h e r e s i d u a l s p e c t r u m o b t a i n e d by s u b t r a c t i n g t h e t h e o r e t i c a l f i r s t s h e l l c o n t r i b u t i o n from t h e e x p e r i m e n t a l EXAFS, a s d e s c r i b e d above. T h i s r e s i d u a l spectrum c o n s i s t s (up t o k -5.0 1 - 1 ) of a h i g h f r e q u e n c y o s c i l l a t i o n which c o u l d be due b o t h t o m u l t i p l e s c a t t e r i n g e f f e c t s a n d / o r t o a c o n t r i b u t i o n from next-neighbor c o o r d i n a t i o n s h e l l s . At k - 6 1 - I a new s t r u c t u r e i s c l e a r l y v i s i b l e . T h i s f e a t u r e was a l s o found i n low n o i s e s p e c t r a of c-Si and a-Si. S i n c e i t s p o s i t i o n i n energy i s -128 eV above t h e K-edge, i n good agreement w i t h t h e b i n d i n g energy of a 2p e l e c t r o n i n t h e Z + l a p p r o x i m a t i o n , i t i s t e n t a t i v e l y a s s i g n e d t o t h e opening of a two e l e c t r o n e x c i t a t i o n channel.

0

*

0 0 0

Residual

Higher shells (Theory)

- Triple scattering (Th.)

-

-

l I I I 3 I I I I I I I I f I

F i g . 3 - Comparison between t h e r e s i d u a l s p e c t r u m and

t h e s i m u l a t i o n o f t h e second n e a r e s t - n e i g h b o r

s h e l l and o f a t h r e e - p a t h m u l t i p l e s c a t t e r i n g .

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JOURNAL DE PHYSIQUE

The o s c i l l a t i n g p a r t h a s been r e - c e n t e r e d w i t h a smooth p o l i n o m i a l and i s r e p o r t e d i n Fig.3. Also shown is t h e t h e o r e t i c a l c o n t r i b u t i o n due t o t h r e e - p a t h m u l t i p l e s c a t t e r i n g c a l c u l a t e d f o r a t e t r a h e d r o n of 5 atoms a t f i x e d p o s i t i o n and

t h e n damped by a p p r o p r i a t e mean f r e e p a t h and Debye-Waller terms. Due t o i t s h i g h e r f r e q u e n c y and lower a m p l i t u d e t h i s t h e o r e t i c a l spectrum i s i n poor agreement w i t h t h e r e s i d u a l spectrum. Q u i t e t o t h e c o n t r a r y , a n e x c e l l e n t agreement was found w i t h a t h e o r e t i c a l spectrum s i m u l a t i n g t h e c o n t r i b u t i o n of t h e n e x t - n e a r e s t n e i g h b o r s i n t h e s i n g l e s c a t t e r i n g a p p r o x i m a t i o n . T h i s spectrum was c a l c u l a t e d by u s i n g a r a d i a l d i s t r i b u t i o n f u n c t i o n c o m p a t i b l e w i t h t h e X-ray d i f f r a c t i o n d a t a . From t h i s e v i d e n c e we c o n c l u d e t h a t t h e r e s i d u a l spectrum c a n be i n t e r p r e t e d w i t h i n a s i n g l e s c a t t e r i n g s p h e r i c a l wave t h e o r y w i t h v e r y s m a l l c o n t r i b u t i o n s coming from m u l t i p l e s c a t t e r i n g e f f e c t s .

R e f e r e n c e s . -

1 ) MULLER S.E. and SCHAICH W.L., Phys. Rev. B27 (1983) 6489.

2 ) GARCiA J.,BENFATTO M - , NATOLI c.R., BIANCONIA., DAVOLI I. and MARCELLI A.,

S o l i d S t a t e Commun. 58 (1986) 595.

3 ) FILIPPONI A., D E L L A ~ L A D . , EVANGELIST1 F., BALERNA A., and MOBILIO S,

" S t r u c t u r a l P r o p e r t i e s of a-Si and.a-Si:H by EXAFS", t h i s Conference.

4 ) REHR J.J., ALBERS R.C., NATOLI C.R., and STERN E.A., u n p u b l i s h e d .

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