• Aucun résultat trouvé

Optimization of nanopores generated by chemical etching of swift-ion irradiated LiNbO3.

N/A
N/A
Protected

Academic year: 2021

Partager "Optimization of nanopores generated by chemical etching of swift-ion irradiated LiNbO3."

Copied!
18
0
0

Texte intégral

(1)Optimization of nanopores generated by chemical etching of swift-ion irradiated LiNbO3. M. Crespillo, M. Otto, A. Muñoz-Martín, J. Olivares, F. Agulló-López, M. Seibt, M. Toulemonde, C. Trautmann. To cite this version: M. Crespillo, M. Otto, A. Muñoz-Martín, J. Olivares, F. Agulló-López, et al.. Optimization of nanopores generated by chemical etching of swift-ion irradiated LiNbO3.. The Seventh International Symposium on Swift Heavy Ions in Matter, Jun 2008, Lyon, France. �hal-00256612�. HAL Id: hal-00256612 https://hal.archives-ouvertes.fr/hal-00256612 Submitted on 30 Jul 2008. HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers.. L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés..

(2)   

(3)    

(4) !"!#%$'& $( )*+!$&, .0/1 23"

(5) ' 4 56)+&,78! 9 : ; u. <>=@?+=BAC4DFEHGJILKLKLMONQPR< =BS(TUTQMRNWVYXWPRZ=[<]\J^_MO`@ab<*cdCQTQIe^BNQPOfg=hSiKLIkjlcdC4DFEHm3V NWVonQP_p=hZqR\lKUKLrJab?sr0GJDd`NWV tWP ƒ. < =JvJDdIkwRTQx3P_<>=RyzMR\JKLD[{M|^_}0D[~cd^0}A=By€C4c\0TQ{c[^0^R‚=. „ Ž “. – • 0 : ; u [ƒ „ Ž [“ – :J• z: :0: :J; :0u :”ƒ. N A5Dd^hTQC4M,}0D<*IL dC4MJcd^_†@K‚IWE4IbE€}0D‡<ˆc‰T3DdCHI‚c[K‚DFEŠHA<*Z<Œ‹4PR^0IkjlDdC E4IU}0cg}Z(\0T3r0^0M0{c}0D!<*c[}RC4I‚} ŠWZ(<‹4P|A5cd^hT3M_wJKc@^J gM|PF‘a’:”“B•RuJ–'<ˆc[}RCHIL}0Pv0GJc@IL^l= m3—H^”EQTHI˜TW\BTQM}0D(™GFTQI‚ [c[PJAvO—šA!PJA›4vJDdCQC4cd^_Mœ:zPF‘sa’:”“B•0•B„<ˆc[}RC4IL}0PvOGJc[IL^”= tLžDGJcdC’T3c[{D[^FT3MŸ}0Dp¡ ‚E4IU gc}|D<ˆc‰T3DdC4ILc[K‚DFE4P¡^0IkjlDdC

(6) E4I‚}Jc[}¢Z(\0T3rO^_MO{c}0D,<*cg}RC£I}œŠWZ'<‹ A5c[^FTbM_wJKc@^J gM|P0:”“B•RuJ–'<*cg}RCHIL}0PvOGJc[IL^”= x —H¤= ¥¡¦R§lE4IL¨Jc@K‚IWE @¦_DFE*—4^|E’T3I˜TW\0Tš=^0IkjODdC

(7) E4I˜T3©‰Tˆªi«FT‚TQIL^RqJD[^”=,—3^|E’T3I˜TW\0T¬U­JCˆ®9c[KwJK‚D[I˜T3DdC3G|¦R§lE4Ie¨= yc[{{,c[^0^JE’TQC=[=[žaH;0Ž0•0Ž0Žª«FTUTQIL^RqJD[^_P|ªDdC4{c[^R§l= ~¯A5D@^hTQC4D—H^FT3DdCš}OIUEš [IeGJKUIL^Jc[ILC4D°}0D²±‡D[ [¦JDdC4 d¦JD—4M0^|E4aW?sc_EšD[C

(8) E4P€<]±³0°As‘sZaHAz´±vJPiuJ•RuJ• A5c[D[^A5D[}0DdµOP_pCšc@^_ [DR=  ªDRE4D[KUKWEš @¦Jc[¬UT+¬U­JCvJ [¦F¶9DdC4ILM|^_D[^0¬QMOC

(9) Eš [¦F\l^RqŠHªv0—H‹4P·<¸c‰T3DCHILc[KU¬QM0C

(10) E4 [¦h\”^BqJP·¥zK‚c[^0 d¨”EQTQC4cFE

(11) EšDœP „Ru0:J–¡ž9cdCH{E’T3cg}FTQPJªiDdC3{c[^R§”= 9¹º£»4¼½0¾d». :J„. y¦_D.{M0CHG|¦_M|KLM0qO§¿MO¬TQ¦0D.^Jc[^0M0GJMRC4DFE¸MRwRT3cdIL^_D[}¿w0§À @¦_D[{,I‚ hc@KÁD‰T3 d¦0IL^0qÂM0^ÃILM0^0a’wODFch{. :JŽ. ILCHCšc[}OIc‰T3D[}>?sIY´wlSĦJcFEÅwlDgD@^"IL^RjlD_EQTHIÆqJc‰T3D[}6¬QM0C¢c]jJcdC4I‚D‰TQ§"M|¬ILMJ^”E¢ŠWpÇPiÈ(CšP'ÉC4PA\lP'¥Çw0‹4P. :”“. D^0DdCHqJI‚DREŠb\JG¢TQM¢:J;0•0•Å<*Dd¤‹4Pcd^0}]EQTQM0G0G0Ie^BqGJM_¶9DdC

(12) EŠW\JGÅTQMŸ;|ƒ¨JDd¤›W^0{‹IL^ÁTQ¦_DD[KUDg ‰TQCHM0^0I‚ . :J–. D^0DdCHq0§KLM·E ECšDdq|IL{DR=0yz¦0DC4M0KLDM|¬ÇD‰T3 d¦0IL^0qT3IL{,Dc[^_},DdT3 d¦0IL^RqÊcdqJD[^FTËMO^TQ¦0D(GJM0C4D'{9MOCHG0¦_M|KLM0qO§_P. ;0•. }0ILc[{D‰T3DdC4PÇ}0DdGFTQ¦_P¡cd^_}ÁE4¦_cdGJD¦_cFE+c[KWE4M²wlD[D[^¢EQTW\l}OILDg}”=”yz¦0DiTQC4cd^JEHjJDdC

(13) Ešc[Kzc[^0}°}0DdGRTQ¦G0C4M0¬’ILK‚DRE+M|¬. ;¡. TQ¦_DÌGJMRC4D̦0cdjJDÌwJD[D[^ͬQM_\J^_}ÀT3MÎwODÐÏF\”I˜T3DÃEšDd^|E4I˜T3IejOD.T3MÎwJMFTQ¦ÂIkC3C4c[}0IUcTQILMO^Íc[^_}ÑD‰T3 ¦0Ie^Jq. ;R:. GJcC4c[{D‰T3DdC

(14) EÒ=<*MRC4DgM_jODdC4PTW¶M¸DÒT3 d¦0IL^BqÓC4DdqJIU{DFE¶I˜T3¦ }RIL¬H¬3DdC4D[^FT{9MOCHG0¦_M|KLM0q|IDFEc[^_}ÓD‰T3 d¦0IL^0q. ;0;. Cšc‰T3DFEz¦_c‰jJD(wJD[D[^IL}JD[^FTQIL¬HI‚D[}”=. ;Ru ;|ƒ.

(15) ;0„. A5M0CHC4DFE3G0M0^0}0IL^Rqc‰\0TQ¦0M0C. ;0Ž. fÒM ESiKLIkjlcdC4DFEšPO—H^JE’T3I˜TW\0TQM}0D™GFTQIL gc[P|Av0—4A5PJAs›švJDdCHC4cd^_M¢:zP ‘saQ:”“B•0•0„<ˆc[}RCHIL}0Pv0GJc[Ie^l=. ;|“. ‘a’{c[I‚K =YM|KLIkjlcdC4DhEˆILM=Y [¬’{ch R=Y FE4I‚ R=YDFE PJyD@K¯=  ¡;Ru–¡5u0–0Ž;0„0Ž0•. pÇc‰µ

(16)  Ç;Ru–¡uJ–0Ž0;0„R:J;. ;0– uJ•. XL¥¡CšDFE4Dd^hTHKk§Ác‰T5—H—Ò=|¥¡¦R§lE4IL¨Jc@K‚IWE4 [¦0DRE+—£^JE’T3I˜TW\0T4=|^0IkjlDdC

(17) E4I˜Tš©‰T+ª«FTUTQIÆ^RqJD[^”=”pC4I‚D[}RC4IL [¦0ab®\”^_}0ab¥zK‚c‰TQ`Ÿh=. uz. ž9aH;0Ž0•0Ž0Žª«FTUTQIL^BqJD@^l=RªDdC4{c[^R§=. u0:. ¥ÇZAvO“h=Y•0Ž”=Yabw_„¡h=k“B•”= f ¦Ru0:=YŽ0•”= <ŒG=. uJ;. ÉDd§B¶M0C4}|E´,cd^_MOGJM0C4DFEšP|E’¶IL¬UTËILMO^IkC3C4c[}0IUcTHILM0^0P0ILM0^iTQC3c[ d¨”E4P0Zp”<*P|KLI˜T3¦0Ik\”{1^0ILMOwOc‰T3DR=. u0u u”ƒ uJ„ uJŽ u”“ uJ– ƒB• ƒ ƒh: ƒB; ƒhu ƒ0ƒ ƒB„ ƒBŽ ƒ0“ ƒB– „0• :.

(18) „¡.  ”»4¼ ¾d»

(19) .   . „R:. ´,c[^0MJ{D‰T3DdC4a3}RILc[{,DT3DdCc[{M0CHG0¦_M_\E(TQCšc[ d¨”EcdC4DqJDd^0DC4c‰T3D[}¢w0§]ILCHCšc[}OI‚c‰T3ILM0^¢¶I˜TQ¦ŒE’¶I‚¬UTILM0^”E. „0; „Ru. M0^°cijJcdC4ILDT’§²MO¬s}OI‚D[K‚D[ ‰TQCHI‚  dCH§JE’T3c[KWE+c[^0}Å{IL^JDdC4c[KWE¶¦JDd^_DgjlDCTQ¦_DDdK‚D[ ‰TQC3MO^0IL ,EQT3MOG0G0IL^Rq°GJMR¶DdC IWEcdwJMRjJD°c [DdC’T3c[IL^ÅTQ¦BC4DFE4¦0MJKL}œjJc[Kk\lDRX Ä ŠHIW=YDR=€ƒ°¨JDd¤›Q^0{ ¬QM0C(?IY´wlSÄH‹=Çyz¦0DFEšDTQC4c[ d¨”E gc@^wlD. „|ƒ. ¦0D[{,I‚ hc[KeKL§¸D‰T3 [¦0D[}]T3M GBCHMJ}F\l [D¢^0c[^0M0GJMRC4DFEc^0}*cœ^R\l{9wODdCMO¬cdG0GJKUI‚ hc‰TQILM0^”EXUV HV ¦JcdjJD¢wJD[Dh^. „0„. T3DhEbT3Dg}ŒMOCE’\Jq0qJDhE’T3D[}ŒIL^0 [Kk\l}OIL^0qÓ¬QIWEE4ILM|^0aH¬WC4cq|{D[^FT9}0M E3IL{,DTQCš§_P({MJKLD[ ‰\lK‚cdCE4IUDdjlDFEšP({cdq0^JD‰TQI‚ . „0Ž. EQTQM0C4cdqJD[P¬QIUD[K‚}0aHD[{,IWEE4ILM0^ }OIWE3G|K‚cd§”EšPb=L=L=pÇM0CŒ{M”E’TˆcdGRGJKLIU gc‰THIMO^JEˆTQ¦_D.{M0CHG0¦0MJKLMOq0§ M0¬œTQ¦_DFE D. „|“. ^_c[^0M0GJMOC4DhE¦0chET3MÊwOD [cdC4D[¬W\”KLKL§ [MO^hTQCHM0KLK‚D[}Åc[^_}MOGRTQIL{,IL`hDg}”=·vJMŬQcC4P·K‚c‰T3Dd^hTzTQC4c[ d¨”E5IL^,?sIY´wJSÄ. „0–. ŠW?Ç´‹4PzchE(C4DKLDdjlc@^hT5G0¦0MFTbMO^0I ,{,cT3DdCHI‚c[K4P¡¦0cdjlDwlD[D[^ÅG0C4MJ}F\l [D[} cd^0}¢ ¦0cdC4cg ‰T3DdC4Ik`hD[}Åw0§°±5ÈvR›3A. Ž0•. c^0}]M0GRTQIL [c[K{D‰TQ¦_M|}|EHV 

(20) =Çy€¦_D,¨|IL^JD‰T3IL REM|¬‡ @¦_D[{,I‚ [c[K5D‰T3 d¦0IL^BqŒ¦0cFEc[KWE4MœwJDgD@^ŒEQTW\l}OILDg}Áw0§

(21) LX . Ž¡. vR‘< cd^_} TQ¦_DD‰T3 d¦0IL^0qC4c‰T3D{D[cRE’\JCšD[}Åw0§G0C4M|¬QILKLM|{DdTQC’§IL^Ddµ0GlDdC4IL{,D[^hT4E(¶¦0DC4DTQ¦0D,C4M0KLDM”¬. ŽR: Ž0;. ^h\l [KUDgcdC]G0C4MJ [DFE E4DREŒIWEÓE4IkqJ^0IU¬3IU gc@^hTLX =S^TQ¦0D6MRTQ¦0DC]¦0c[^_}0PÊjODdCH§ÃEš [cdC4 [D6IL^J¬QMOC4{c‰TQILM0^ÌIQE cjJc[IUK‚cdwJK‚DRX Ä M0^TQ¦JD}0DT3c@ILK‚D[}Å{9MOCHG0¦_M|KLM0qO§ÊM|¬5E4IL^0q|K‚DDdT3 d¦_D[}TQC4c[ ¨”ETQ¦0cTIUETQ¦JDiC4D[K‚DdjJc[^FTGJM0IL^FT. ŽRu. ¬QM0Cz^0c[^_M|a’GJcTUT3DCH^0IL^RqcdG0GJKUI‚ [c‰T3ILM0^|E=. Ž|ƒ. y¦_D9GR\JC3GJM EšDM0¬zTQ¦0IbE¶9M0CH¨¢IUET3M¢DµRT3Dd^_}Åcd^_}Å gM|{G|KLD[{D[^FTsG0C4D‰jJILMR\E¶9MOCH¨X Ä TQM¢chE4 [DdCWT3cdI‚^. Ž0„. TQ¦_D¿C3MOKDÃM|¬ IkCHCšc[}OI‚c‰T3ILM0^ gMO^_}OI˜T3ILM0^”EŠHILM0^ D@^_DdCHq0§_P ILM0^ EQT3MOG0G0Ik^Bq GJMR¶DdC3‹cd^_} D‰T3 d¦0IL^0q. Ž0Ž. GJcC4c[{D‰T3DdC

(22) E‡M0^²TQ¦_D,{MOC3G0¦0M0KLMOq0§ M0¬5D‰T3 d¦JD[}TQC4c[ d¨”EÒ=”—HM0^|E5¶I˜TQ¦¢IL^0GR\0TEQTQM0G0G0IL^Rq¢GJMR¶DC

(23) E(¬WCšM|{. Ž|“. ;”=ou¨JDd¤'›¯^0{Њ’pcTƒi<ˆDd¤‹]\JG,T3MÃ;|ƒ¨JD¤'›¯^0{Њb¥w c‰Tz:J;0•0•<*Dd¤‹¦JcgjOD'wJDgD@^\E4D[}0P¡EšMTQ¦0c‰T. Ž0–. TQ¦_D,D[¬Q¬QDF T4EM0¬5D[KLD[ ‰TQCšMO^0IL }0c[{,cqJD, [c[^ÅwOD,D[cRE4ILKe§Á}OIWE dC4IL{,IL^Jc‰T3Dg}ŬWC4M|{ÐTQ¦0M”E4D,}F\lDiTbMÁ^h\l [KLD[c[C. “B•. gMOKLKUIWE4ILMJ^”E=yz¦0DCšMOKLDM|¬TQ¦_DdC4{c[Kc@^0^_D[c[KUIL^0qc[¬UT3DdCIkC3C4c[}0ILc‰T3ILMO^ M0^²TQ¦_D9TQC4c[ ¨¢{M0CHG0¦0M|KMOq0§°¦0c0E. “. wOD[D[^c[KWE4M,IL^RjJDFEQTHIÆqJc‰T3D[}”=. “h: “B;. . h¼. ”»4½.   !  "#!$ &%. “hu. A!M0^Rq0CQ\lD@^hT?IY´wOS'Ä+Š£ƒ[µlƒŒ{{'H‹E4c[{G|K‚DFE¶9DdC4D ‰\0T¬WC4MJ{ E4IL^Bq|K‚D dCH§”EQT3c@K+M0GRTQIL [c[K5q0C4c[}JD. “0ƒ. GJKLc‰T3DhEGR\JC4 d¦JcFEšD[} ¬QC4M|{ ¥Ç¦_M_TbM_µ —3^0 R=+y€¦_Dd§Ó¶DdC4DŒILCHC4c[}RI‚c‰T3Dg} cT,^_MRCH{c[KIL^J [I‚}|D[^0 gDˆIL^ÓTQ¦JD ;.

(24) “B„. ƒ<Œ¤ÌT3cd^0}0D[{Àc[ [ [D[K‚DdC4c‰T3M0C(IÆ^”E’T3c[KLKUDg}¢c‰T+A<ŒZ<*aWZ<*PzIL^¢ªZ(´—’?"Š3A!cgD@^_P·pC4c[^0 gDd‹cd^_}œI‚^. “BŽ. ªv0—Šbž9cdCH{E’T3c[}FT3PŒªD‰C3{,c[^R§B‹=yz¦0D D@^_DdCHqJI‚D_EšP E’TbMRG0G|IL^Rq GJM_¶9DdC

(25) E ŠHc‰TŒTQ¦_DÎE’\JC4¬Qc[ hDd‹ cd^J}. “0“. G0CšM 4Dg ‰T3D[},C4cd^BqJDRE5M|¬¡TQ¦_D9IM|^”E\E D[}IL^,TQ¦0IWEE’TW\l}R§cC4DKLIWE’T3D[}IL^°ycdwJK‚Di—=0—HC3C4c[}0ILc‰TQILM0^ŬQKk\lD[^J [DRE. “B–. ¶9DdC4D°Ie^¢TQ¦_Dˆ•&•&s d{' ¬QK\ D[^0 [DC4cd^BqJDR=zA5¦0D[{,I¯ [c[KD‰T3 ¦0Ie^0q”E¶9DdC4DGJDdC4¬QMOC4{Dg}]c‰T‡CHM0M0{. –0•. T3D{GJDdC4c‰TW\JCšDŊb±‡yz‹iIL^ŸGR\JC4DÊ®p ¶IYTH¦ [MO^_ [D[^FTQC4cTQILMO^JEMO¬ƒ c[^0}œuJ•ÁPc[^0}œwJK‚D[^0}”EMJ¬!®p. –¡. ŠQuJ•¢‹¶I˜TQ¦®‡´,S;ŠHŽ0•¢‹sIk^] W C4c‰TQILM=Jy€¦_D9{9c@IL^° [¦0cC4c[ ‰T3DdC4Ik`@c‰THIMO^T3D[ d¦0^0I‚ÏF\lD'\E4Dg}²¬QM0CTQ¦0D. –R:. DµJc[{,IL^Jc‰T3ILM0^M0¬!EQ\JC£¬Qcg [D{MOC3G|¦_M|KLM0qO§¶9cFE5c[^Zp”< [M0{{DdCš @I‚c[K¡IL^”EQTQC’\J{D@^hT¬WC4M0{´,c[^_M_T3D[ . –0;. ‘sK‚D[ ‰TQC3rO^0I Fcv= ?+='¶I˜TQ¦GJ¦0cRE4D[aHKLMJ d¨JD[}1KLM|M0G Šb¥?z?‹¢¬HDgD[}_wOc[ d¨ c[}0}0D[}6T3M TQ¦_D }F§0^Jc[{IU M0C. –Ru. T3cG0G0Ie^BqÅ{9M|}0DR=R<ˆM EQT{DgcFE’\JC4D[{D[^FT4E5¦_cgjODiwlD[D[^,C4D[c[K‚Ie`@D[}\¡E4IL^0q° [MJ{{DdCš @I‚c[KÇD‰T3 d¦_D[}ÁE4IL^0qJK‚D[a. –|ƒ. Cš§JEQT3c@KLK‚Ie^JD E4IUKUI‚ [M0^6^0IYTQC£I}0DˆTQIkGE²¶9I˜TH¦"c ^_M|{IL^Jc@KD[^0} C4c[}0Ik\EM0¬]•^0{ c[^0}6cŒC4DRE4M0^0c[^hT. –0„. ¬WCšD[ÏF\D[^_ g§ˆMO¬Ž|ƒ¨R®`0=z—H^ [DdC’T3cdIL^ FchE4DRE¦0ILqJ¦ŒcREHGJDh ‰T‡C4c‰TQILM*Šzƒ b ‹,E4ILKeI‚ [MJ^œTQIkG”E9Šš¦_c[KU¬ [M0^JD. –0Ž. c^RqJKUD E4{c[KUK‚DdCTQ¦0c[^ ƒ’‹Êc@^_} C4c[}0ILIM|¬ ‰\JC’jlc‰TW\JCšDœK‚DRE

(26) ETQ¦0c[^.[ƒ¸^0{8¦_cdjJDœwJDhD[^Œ\E4D[}”=5y¦_D. –|“. cg [ÏF\”IWE4I˜T3ILM0^c[^0}"c[^0c[Ke§lE4IbE°¶cRE {,cg}0D\ÇE4IL^Rq TQ¦JD v0µR< EšM|¬UTW¶9cdC4D[P'¶¦0IL [¦6IWEÁ}OIWE’TQC4IkwR\0T3Dg}. –0–. ¬WCšDFD[KL§Ìw0§´c[^0MRT3D[ >‘sKLDh ‰TQC3rO^0I [cÌv= ?+=Zp”< IL^RjlDFEHTQIkqJc‰T3ILM0^|E]¶9DdC4D GJDdC4¬QMOC4{Dg}ÌMO^ aH ‰\0T. •0•. Ešc[{GJK‚DFE]TbM¿cjJM|IL}TQ¦JD%E’TQCšMO^Bq.TQIkGJa£EQ\JC£¬3c[ [DIL^FT3DdCšc[ dTQILMO^TQ§RGJI‚ [c[KUKL§ÐMOwlE4DdCHjOD[}.TQ¦RC4MR\Jq0¦%TQ¦_D. •¡. Dµ0GJDdC4I‚D[^0 [D¬QMOC

(27) saH ‰\0T+E4c[{GJK‚DFE+Š’GJI‚Dd`hMJD@KD[ ‰TQC4IL 9wOD[¦0cdjJILM0C(M0¬z?IY´wOS'ÄH‹Ò=OpÇM0C5¬U\JC’TQ¦0DdCEQTQC’\l ÒTW\_C4c[K. •R:. ¦0cdC4cg ‰T3DdC4Ik`hc‰T3ILM0^ M|¬TQ¦0DŒ^0c[^_MOGJMRC4DhE,TQ¦0Dœ¥Ç¦0ILKUILGE°A<:J•0•0abp”‘ªiab9y T¯C4cd^JE4{,IWEE4ILM0^6D[K‚D[ ‰TQC3M0^. •0;. {I‚ dC4M”E4 [M0GJDŠ’y¡‘<‹¶cFE\EšD[}”=¡vJcd{G|K‚DRE¶DC4DG0C4DdGlcdC4D[},¶I˜TQ¦,TQ¦_D¬QMJ ‰\E4D[}°ILM|^wJD[c[{ŠWp—’È+‹. •Ru. c^0}¢c,qJM0KL}œ¬QIUK‚{ÍM|¬:J•0•¢^0{ÃTQ¦0I‚ d¨J^0DFEE5¶cRE(jOcdGJMR\JC}0DdGJM”E4I˜T3D[}¢M0^TQ¦0D²EQ\JC4¬Qc[ [DR=ZiK‚KI‚{cdqJDRE. •|ƒ. ¶9DdC4D(CšD[ [MRC4}0D[}IL^iw_C£ILqJ¦FTǬQIUD[K‚}{9M|}0DR=. •0„  [! º L% »4º. •0Ž. . •|“. ;”=Wh=. •0–. y¦_Dœy¡‘< {M0CHG0¦_M|KLM0qO§ˆM|¬K‚c‰T3Dd^hTTQC4c[ d¨”EqJDd^_DdC4cdT3D[}ŒM0^*cÅ?IY´wOS'ÄE4c[{GJKUDŠ

(28) sa3 ‰\0TQ‹w|§. 0•. ILCHCšc[}OIc‰THIMO^Œ¶I˜T3¦ÓA\ ILMO^JEcTƒÅ<*D¤ IUEI‚KUKk\E’TQCšc‰TQD[}ÓIL^Œp¡ILq=cŸ [cdGRTW\JC4D[}Œ¶I˜TQ¦*uJ• ¨0¤= u.

(29) ;;;.  

(30) 

(31)  

(32) !"$# &%

(33) %$

(34) !

(35) '

(36) (*)',+-./0

(37) *)'1234567$

(38) !*8# &%9:. ;;,Q. <* 5>=> 6?,

(39) 

(40) @A< + BC D  6"E(AFG H

(41) /I67*J"K<"( *)L <M;N7 6O5P6H,

(42) !*. ;;(R. ( 5SRTKU 6. ;;,g. 5<<,

(43) 2 >E$

(44) F

(45) !*! Kab

(46) !*  5c d

(47) /*2e'

(48) !%% "*K L /5c '5

(49) 

(50) ()c 2E$

(51) 9# &%ef. ;;. ( 5h

(52) /*ei3I*S  5 5i<FK6. ;;(|. nFo p 8qsruts6 /67&

(53) 83vw

(54) 7 H  &%P*G$

(55)  @#%w

(56) !*M <xRTT@)yvfC6H%P*

(57) "

(58) M /z{G5. ;;(€. <8

(59) 67*I//3v  IB{+{;$b:+}  

(60) 8

(61) /~6*2)555**EE(* 

(62) x

(63)  '$

(64) {\v+. ;;N. ! H '‚$

(65) YMf'6"JH6 G&<%P$

(66) ! 'ƒ( EG 

(67) 8

(68) /* > @\zf 3P> 5 P,

(69) !

(70) $

(71) 

(72) M*2e'

(73) ! %. ;;(=. 

(74) J„

(75) F */* J5† 5XK6Ic)K 5†K<MLEK//Gd

(76) * w

(77) !K †M

(78) !*)* †E% + o 3I$#*M37. ;,QT. /*#~

(79) !"

(80) !*)  > /

(81) 8

(82) /$

(83) D2 ~

(84) / o p 8qsr‡6H /67&

(85) D*G"*!:‚ˆ $

(86)  KˆGK67. ;,Q;. ‰K %S67*e. ;,QQ.  #J

(87) ‰$

(88) 2 '8

(89) !()Π-EK%P #P$346767 

(90)  n F+k+% "

(91) /0

(92) F()t6 {

(93) {b *25

(94) ‚+. ;,QR. B8{+ ; + bm237†<

(95) !*u$

(96) !* j

(97) !67]`# *2elbGK52<!]‘ *$

(98) !(2’U <“Rg” K6. 5(E

(99) SVW3" J+M.X '$

(100) ZY[ 5]\^ _

(101) /`<X2 2E 5_

(102) _

(103) /. 6Š<F6. jiGK%k

(104) 2 l

(105) * 6HF,K m%P$

(106) ! m6@P*G:G E.

(107) ‹*2e'

(108) !&%%PŒ Š6I$

(109) !*2P%l2G/ /5  [

(110) 

(111) G*){+ŽBJV

(112) /*. ;,Qg. 567$

(113) !** /5R'+v 6l5(E

(114) f3' 2e676H,

(115) GeI*•FsF1%P*%9ecP<

(116) !5@ %P$

(117) ! M

(118) !v

(119) /$

(120) < . ;,Q'.

(121) /ˆ  –2,

(122) !*5

(123)  *){+. ;,Q| ;,Q€ ;,Q'N. R'+—Q{+„˜ ™P™š› œKP™"žŒŸ‚Ÿ„ ¡žŒ Jœž¢7¢"¢ ¢2£DŸ¤šˆ¥"Ÿ‰£ƒ¦§¨© s/v

(124) G*)L6 !E% eL<

(125) !*ª$

(126) !* c67*!)5 %eZ5*E* /5:ª H

(127) /I2G5 P$

(128)  L 5w

(129) !K  «. ;,Q=. K m& /5O *2eJ+ ¬ 674 <“

(130) lYˆB{r. EKP$

(131) F X(h!3" m OB8{+HQ fdbf 4 5m5Kf. ;(RT.   !E /5  >

(132) L a 5L& /*2Pˆ 5P$

(133) !5L 

(134) F/@67* ,+ BC 

(135) V EE -cE3(„a*%'‚. ;(R8;.

(136) Vc

(137) I

(138) -/K%5c#J%w{ n c)(y~­® 6@tGfsM<ˆB¯$

(139) MHr°(y n *tGfC

(140) c(E> <ƒ

(141) >  / E. ;(RQ. ,•bJw

(142) 1*•P&%2e676H,

(143) e& /5HFƒ(EE/•P67$

(144) !%e9‚*'%*,+"‚6H"(E FD%F>b'(G# 5. ;(RR. <%*2(H

(145) !EE †E3*‚$

(146) M%3* †$

(147) !(Œ ±

(148) 67 n. ;(Rg.   / 

(149) „

(150)  Vn o u B ³´ 5Hb% 5K!t,+} > * “

(151) !EE9 LE3*ª* 5 

(152) !* /5*5>$

(153) !(Π. ;(RK.

(154) 67 n QT–!|Td6 

(155) !D,

(156) p ts

(157) / E GD%P*%Œed5*#J&% EL EeG&67P5&%

(158) J„

(159) F~3vw

(160) H3I%%–. ≤. ;(TŽ67Œ -t 5²3I *)*P5.

(161) ;(R|. 5< 5²< $

(162) Gfs  %%98

(163) „

(164) !5cbec

(165) /d9!5,

(166) 2 Ka3w

(167) !c\aM$

(168) ag|ZrŽ*y n B{9{+{Qbt,+{Yˆ

(169) z$#. ;(R€. *7

(170) EE †E3(„fƒF+k+<"92 5 P$

(171) ! K 3Iw

(172) M",

(173) "N-TT rŽ*y n BŒ{+Q*t" /58bu$

(174). ;(RKN. QRTTHr°(y n B9{+KQ5tGfJ

(175) /"< $

(176) 2 -d

(177) F2 ˆ

(178)   G$

(179) *6

(180) L* /5c% $

(181) ! 5dE! <%P+J./. ;(R=. %K  •F1%P1$

(182) RR<FG 6S

(183) "(GeJ

(184) !%%*EM*•F n  zB{+K+k*t1* 5>>*EE!•Œ67$

(185) !%e. ;,gT.    P583w

(186) !

(187) /  2e>%P*#(ˆEK%P  ,+-.G*)7$

(188) !,"EKk

(189) 5b%P–„*E03I%%

(190) $

(191) {3I. ;,g;. %F>b'G*# 5H >sE,#/{3I !)

(192) „+-V

(193) xbJ >( *)5"

(194) $

(195) 

(196) M$b# 6I 2E% P %. ;,gQ.

(197) G* 5l† 5*EJ 5 

(198) ² <c

(199) /]Y~BJr. ;,gR. 59 $

(200) 2 J+.

(201) !9Ej{‚5l<²

(202) /]b'(G# $

(203) ! † /5

(204) jG  Œ . ;,gg.  >5*

(205) @b $

(206) 

(207) !* 5(„

(208) !* /5@

(209) "29 ><8

(210)  EJ  2e6H67$

(211) efK3I *#" #

(212) !9$

(213) ! 5. ;,g'.

(214) / << $

(215) x <{\ˆ1925$

(216) ! 7$

(217) g|"r°*y   4* 57–S<!1 I

(218) /~E62E% eJ+. ;,g|. GJ%w

(219) D("5VE%P*e5> dB{+R@

(220) $

(221) D//37D9‚%Cb/ # D+k+

(222) ~

(223) F3IdE/ GI67*a(. ;,g€. 679267*8

(224) 7*

(225) /*,+. ;,g'N ;,g=. R'+kR'+„˜ ™P™š› œKP™"š œŒ›(¦žŒ¢ ¨LœžŒ¥všžŒ¢ ›žŒ¡v š,§œŒžP¢. ;-T. s/X*#K%w

(226) ! S<H

(227)  EX5&67$

(228) !(“* 5]E!X5*E

(229) _3Iw

(230) S$

(231) !(Π-]

(232) 267X$

(233) p ?F. ;{;. G2E,

(234) #J%e>%P%9{

(235) $

(236) ! 5HŒ HB9{+—g" /5Hg bL<s

(237) "9!5$

(238) ! 3w

(239) !@\aD$

(240) g|@rŽ*y7+I„

(241) ! < . ; Q.

(242) -5 K%k

(243)  'a(@ %9J55{« o Bu$

(244) 1gTH³“f o B†,

(245) D ³´* 5†;-«V;v6@9•-

(246) F <b

(247) L5'. ;-R. nFo B“gT³ f o }. ; g. F76"J&†%P*!*

(248)  ±

(249) /$

(250) v/b-

(251) !* 5°Œ ¯cE*#{L

(252) FJ5e±3Iw

(253) 2uX;-«V;L6H9•

(254) FZK< o B  5. ;. o }. ;-| ;-€.

(255).

(256). €T³Zt,+"6'

(257) 1<<P

(258) 1$

(259) !* KLƒ3k

(260)  o Bu$

(261) gT³†+/./"$

(262) !* >$

(263) !. +-./2E $

(264) ¤

(265) H5*< 55*E

(266)  ­567$

(267) !*FEK%/

(268) F

(269) !5MŒ MB8{+ g+. R'+—g{+ „ ¢®™§ š*¢› š™œ9¦š*Ÿ„¥M §K ¢¢š* §PžŒ¢ ¨. ;N. s/*6H%K

(270) G$

(271) 6 

(272) 1<

(273) !*ƒ‰25$

(274) ! H67*e>  /%{

(275) ƒ!6MK<C

(276) / 5<!$

(277)  *,

(278) !5H. ;-=. ( 5 * 5O

(279) j

(280) *) * /5

(281)  8U <2%9J& / ”

(282) / b{"!J 

(283) `$

(284) !* - ,

(285) !U 5?E . ;(|T. 6I 2E%K/¤+'"'%k

(286) a*@%P%

(287) G¤

(288) !5> dB{+CG2E 5 >

(289) H

(290) @‰25$

(291) ! H3w

(292) !. |.

(293) ;(|8;. \a K1 <{g|"r°*yvfK<K%%375"befJ&  /% H 7s<! |T"6 

(294) !$

(295) {# */{

(296) !&6vE*$

(297) F . ;(|Q.  6H(2)5† ²

(298) “Y~BJr. ;(|R. b'G*# /†

(299) /$

(300) “

(301) 4*  %PŒ 

(302) $

(303) 6I&

(304) °5-K° //

(305) W*6I/#J4* 

(306) !9%ei

(307) /j%$

(308) !( 

(309) ±

(310) G*)',+. ;(|g. rŽ G*#*Gf w

(311) > /5J  °%P*Z&% -$

(312) 2 U<@

(313) †E 2/*E  /5_# c‚±

(314)  9*. ;(|K. <!E',

(315) 8G¤

(316) ',+. 67*fD 5†<2 %%ŒeŽ$

(317) !*5† o BUgT³“fD< I|TŽ6 

(318) !,+} . ;(|| ;(|€.  

(319)  . ;(|KN. }z1$•

(320) !( 55cG$

(321) x <x$

(322) !* >*•E(AP67&

(323) 1 <96>

(324) $

(325) 

(326) E~6I 2E/K% e

(327) ! -K%e. ;(|=. 5(E* 5'Z X

(328) ¯ / 

(329) ,

(330)  U<@

(331) °P5j%w

(332) 2P U* 5S$

(333) !(Π

(334) 267+ x ZΠk

(335) 2%P%e. ;(€T. ,•bJw

(336) I*EE•67$

(337) !%9e¯*•%"2e/6H67$

(338) 2e†b

(339) M 5*$•

(340) !( 55 ,

(341) !* Ž

(342) / e¯5*# &% E 3I%%. ;(€8;. 5< 5d<!,

(343) s

(344) ,

(345) 12!E /5I

(346) VdE*F

(347) $J%P*D*2eJ

(348) !%%  E% //¤+./I<!,

(349) !5d6I 2E/K% e/f. ;(€Q. //

(350) uE$#{%9e b'‚*#5?< ƒ  b}

(351) f  %FOb /bJ*2# 5  ?

(352) ( *e

(353) !%F ,+. ;(€R. ¬ 1  b}.

(354). Fˆ /  

(355)  2e667$

(356) fK

(357) /I6I 2E% e H

(358) /.   5l<! ªK<8

(359) . ;(€g. G6@E%P ( 62s67*ƒ<F6l M 

(360) *,+ B8 /&%P%Œe/f'67& e<2 ,

(361) ƒ5,#%E> 5"

(362) "*E. ;(€K. G/ /5KsE>b

(363) D2//3IΠ-  # *2eL%P(D% -',

(364) !5>* G

(365) 2EeJ+./@*•-

(366) *E%$

(367) !  <

(368) v5$

(369) !. ;(€|.  B8{+g

(370) 7œ  /5 P$

(371) !ˆ

(372) ,

(373) '

(374)   w

(375) !P%'$

(376) !(Π7*

(377) !~P!Jw

(378) ! < 

(379) 8E"

(380) V>$b

(381) x n 9,'%(2t. ;(€€. EM5P&67$

(382) !(ƒ<;(T–gTH 6 5>v5*E

(383) ><"<$3 * /K6$

(384) !*‚D5*E* /5  L @

(385) /@

(386) !EE9 . ;(€KN. E3I*D<.

(387) /@ '+J.Fa</

(388) ˆ

(389) !**%5db ,*

(390) !5@

(391) @

(392) /v

(393) G*)Z* n 3vw

(394) L567$

(395) !*. ;(€=. <ad<,3  K6I$

(396) !*„!tŒ %9J5Œ -

(397) >Œ%Œe 5<2 $

(398) 29# c2 5 W% 3I'>56H,

(399) !*. ;N-T. 6 

(400) >

(401) !S$b /-

(402) >Q–2R

(403) 67d

(404) /$

(405) L<@

(406) /X ‚+ˆ  w

(407) !%"G5 P%$

(408) !(]$

(409) !X

(410) !( F. ;N{;. <%Œ% 3 5 be”_%PŒ  *†%3I*†

(411) !* n 3v* <2 $

(412) W5*#%Et

(413) /$

(414) Z*/W& 4*#J*G*. ;N Q. 567$

(415) !*D<1@<$3mJ 5G5c< * K67$

(416) !(„a* 5L5*E

(417) L%'

(418) †;(TTd 6+'H%3?

(419) !*. ;N-R. /ƒM$

(420) !M <xI<!$3” 6"­6H >5*EJ 5 L I

(421) /"  *

(422) $

(423)  7& /5>K6"E'w

(424) ! H<C

(425) MF5. ;N g. G %k

(426) 2  5>'%5@  2G2E 5

(427) 

(428) /$

(429) !* 7 <x*e'

(430) !%Œ%P  1  b}

(431) fKF+k+

(432) ,

(433) !* @G$

(434) !. ;N. !'%5Ib , 

(435) !%%e"!J%

(436) !~

(437) ,

(438)  <'

(439) /0bJ%9)"' 9!„ 5 ,

(440) !5@6,

(441) !*%F+. €.

(442) ;N-|.     

(443)   . ;N-€. UH()K //3%5H<VJ 5 “<FK6i

(444) /@E,

(445) ƒr†YMQTTK-–2T|RK-=–DTR–2TQ <FGK6ir° V

(446) Ae. ;NN. <Hqª5J$

(447)  S 5l¬P X<“¬EŒ J+ Yˆ

(448) / „ *) //3%5Ž

(449) !_

(450) ±

(451) !* P%>

(452) !(<<ZK<. ;N-=. sr°YˆrŽ–Yr. +. ;(=T ;(=8; ;(=Q ;(=R ;(=g ;(=K ;(=| ;(=€ ;(=KN ;(== QTT QT8; QTQ QTR QTg QTK QT| QT€ QTKN QT=. N.

(453) Q;(T.    . Q;; Q;,Q.  ; . p +¬Ef '+ 7+\z$

(454)  n qD5'+—tf",¢œŸ‚ ›"ƒ ¢¡ XžP›*Ÿ,œš›*¦¢§¨©

(455)  D ,žP›ƒŸ,žŒ¢› ž £D§š"ƒ ¢¡. ££D§žP›* JœŒžP¢ Jy $3(f.;(==T'+ .  * /fe'¤+ p. $#:+ fKN-TQ| n ;(==K t,+. Q;(R.  Q "+K¬. Q;,g.  R .Y+rŽ<

(456) !*f + r. Q;. r`+%6K /5f. Q;(|.  g @r. Q;(€. ! K

(457) '6>+r°,

(458) '+"8e¤+ p ¤+. Q;N.  %&,–. Q;(=. n QTTgt,+. QQT.  | . QQ;. !"0;(=8;. QQQ.  € . QQR. . + D'

(459) !*

(460) Œ Pf. . . + v%<!'f8¬{+\z/J5   5*f + 1+'¬

(461) !J*V

(462) Vf B+'¬

(463) FJ5*ƒ( 5. J%F+ 2 K

(464) J6>+&rŽ$

(465) '+"e'¤+ p ¤+. !"-f:-|R. n QTTK t„+. +a/%6 5f   +ˆ$-

(466) 6  fˆq+ƒ\z&%&  $

(467) f 7+ o   F

(468) * 5 Y+ `  P5  *f #$f8;. . J&%+. n QTTgt„+. o +('1%%K /5 f  /5_Y+ `  5 *f. . J%F+a2 '2

(469) 6>+ƒr°$

(470) J+  eJ,+ p ¤+)*f>;(€KN. p +¬{+ `  F 5HD+ 7+M*e%5f   £ £D§žPš*¡+ƒ¦,© , žP› . -, .  Jœš*Ÿ,ž § .›žPš*¢›šˆ ¢¡/ƒŸ,› š  ¤ žŒ¢ ¨. n QTTgt‚+. ¬{+ r + r`+ D  * 

(471) !f p + p 6:Gf 1  +d\a( (f1 + a+Z./*# *G5  5Or + %6 5f. J%F+—2 '

(472) 6>+&rŽ$

(473) '+"e'¤+ p ¤+23"-f.;(=g n ;(==|t„+. . *#J*2Gf@+#M*4f.Y+Kr76 5 & /5cB+'Y'%P%98– :8 E  f8YEEK%+. QQg. % N )+{}%9#J*Gf.Y+#M*54–. QQ'. eJ,+ 1$

(474) F

(475) +%;<f;. QQ|.  = xr`+ 1$#e/f. QQ€. YEE%F+"eJ,+ 1$

(476) F

(477) +%"!fQQ=R n ;(==KN t,+. QQ'N.  ;(T + a+ˆ¬/ /fM¬C+r°%Ff . QQ=. ƒ6>+5f Q=K. QRT . QR8;. vQ=KN. QRQ.  ;,Q0r. QRR. +. n QTT|t‚+. p + r`+}I!K5=‚„+kf p + ƒkJf q+>~!:‚f@+¬{+ D*2%P%'22fY+ '67*Gf o + \()Jf +¬{+.\a*)%2be f p +  +.qª ° 5? + p +1}z3I* /f)+r°$

(478) !(,+. n QTTQ-t,+. ;;@+ p  FfB+K¬*-6E&%Pf0+% F-)$

(479) x* 5 4  + `  ‚f+qD% $

(480) *6>+¬K-+BA CD0 n QTTKN t‚+ +'\P  f.B+{\(26@ PfE+F@+'\z&

(481) 2 PfsY7+ D  *

(482) 

(483) f8r + 0  P* Kf 1  + I . "(  

(484) 2f . .   %Pf. J%F+ 2 K

(485) J6>+&rŽ$

(486) '+"e'¤+ p ¤+ n QTTN t n  "E „2t¤+. =.

(487) . *# *2fKY+r76* 5 &f+}M%Œ9#J*G/Gf+ (54f B+-Y'%P%98K–:8 E &f r +'1*e $

(488) !f. QRg.  ;(R.Y+M*54 –. QRK. + 1$#e7 5a+ y"  !J  f . QR|.  ;,g ~+-8$-

(489) 6  f. QR€. . J%F+ 2 K

(490) 6>+r°$

(491) J+   e',+ p ,+  <f8;(€Q n QTT|t,+. 7+¬*3@*

(492)  f+r + ƒ  'V

(493) !( 

(494)  Pf'0+¬

(495) !()* w

(496) !(* 5 r +-/%6 5f. J%F+ 2 K

(497) '6+&rŽ$

(498) '+"eK¤+ p ¤+3"-zfR|€ n ;(==KN t‚+. QRKN.  ;%E+}%Œ9#J*Gf{Y+M*54 –. QR=. eJ,+ 1$

(499) F

(500) +%;<fT€8;(=QR. . *# *2f#"+M*4 f:Y+r76* 5  5@B.+KYJ%%98– :8E  f'YEEK%+. n QTT| t,+. QgT Qg; QgQ QgR Qgg Qg' Qg| Qg€ Qg'N Qg= Q'-T Q'{; Q' Q Q'-R Q' g. ;(T.

(501) Q'. $    . Q'-| Q'-€ Q'N. $b%PH; .

(502)  .

(503)  . $ . )+*. . . % & '(.  ,. . B. Q'-=. "!#. T'+—Q|. R'+—g. µ Q{+9. \a. ;,Q. T'+F;. |'+F;. R'+—Q. \a. QQ. T'+—Q=. N+9N. g{+9. \a. g|. T'+9-€. ;,Q. |'+k€. s. {;. T'+9N-T. ;,Q. €'+—Q. M. N-TT. ;(T'+—g. ;(R. |T. QRTT. ;; +F;. RK. €KN. {b. Q|T Q|8;.   -.   . Q|Q Q|R.  0/8qƒ /*2Pf&%P,

(504) 2 H

(505) !EE LE/3I*„a$

(506) 

(507) F/<2 f n ¬*ta* /5dE!$

(508) !5>* -. Q|g. nFp Etx <'

(509) /~ K{5'+. Q|K Q||. ;;.

(510) Q|€ Q|KN Q|= Q€T Q€8; Q€Q Q€R Q€g Q€K Q€| Q€€ Q€KN Q€= Q'N-T Q'N{; Q'N Q Q'N-R Q'N g Q'N Q'N-| Q'N-€ Q'NN Q'N-= Q=T Q=8; Q=Q Q=R. "  

(511) #  -.  . . b }

(512) + n (ts%

(513) 

(514) 2‰E/ 5 $

(515) !0

(516)   /$

(517) !*/5_

(518) *)'Z 5J5_be4K bK6"b *56H

(519)   '‚$

(520) “//3^

(521) / 5<2<G$

(522) ! E$

(523) F

(524) !(2 K n bt oMp 8qr´6H( 3 7$

(525) !*/5@ /& / EDŒ I*‚:‚ƒ,

(526)  /%K#P$3>+   8qsr‹67*K< sL{;0rŽ*y4925P$

(527) !51. )DYˆB'r. 677<"5<<2( 

(528) I$

(529) !*†Ew

(530) 6I 2E/ % 7b

(531) ! 5°<

(532) !*7$

(533) !* †

(534) ()' nFo BWgT³‹$

(535) p X<a5 <2<!* 

(536) 

(537) 67/!tDEK5J 53Iw

(538) L5 P<2<!* 

(539) 1)K /5cK<1K 'a 5  /*2  « n *t8B“r°*yvfK(<

(540) !*|T@6 '+kf n bt8\ag| r°*yvf&<

(541) !(|T@6 '+kf n *t MƒN-TT r°(y"f<

(542) !*;(T"6@ {+ ( 5 n 5t {bLQRTTrŽ*yvfC<

(543) !*v;(Td67Π{+ P<<!*

(544) ƒYB{r[67*H  D 5L5*E

(545) –%PD #  b  c5'+./d 'G$

(546) aŒ n 5t"2//37ˆ

(547) >5(E

(548)  E<%PH55“*% -

(549) /d%P >*'„ˆ

(550) / %K 7*•Fƒ<C

(551) /0

(552) F37*% $

(553) ! 5IE¤+% /.*ˆ

(554) ˆE%ŒF dG*$

(555) !(*# &%P57<

(556) !* ,

(557) !* E„ n (t,+  67*Ja<ƒ$

(558) !(5H

(559) *)'a @

(560) /]<2  n *tƒ#',+

(561)  j<  n bta <1%w

(562) 9{6.  b$

(563) !7<

(564) !*ˆ9!5$

(565) ! >3w

(566) !>\ˆag|dr°(yO( 5 $

(567) !(5 5  |T 6 “ o Bug T³^$

(568) p 0+ p *# &%P5<2 $

(569) *EE *% *%Œe7 I

(570) /*•w

(571) !$

(572) ! @<FG !J( *e767*ˆ 55 be   †6IK5 !3  ',

(573) 8  ‚"+ I*E

(574) –AG%«RT" 6L+  !{YˆB'r. x U56H ' K†#*‚†$

(575) !(Πl

(576) 67. G<  u5Œ<<!* 

(577) W,

(578) !*  GK%w

(579)  '“8  G6@E%PD92G5 P$

(580) ! 5@3w

(581) @\aƒ 'ª <g|@rŽ*yH+ n ( t  -L •Fª5 P67$

(582) !*f n btƒE/ v5*E

(583) /fC( 5 n *t2E $

(584) {„

(585)  n 5*E

(586)  ­2/ 

(587) C$•F5 &67$

(588) !(2t,+  .  YˆB{r. Œ 67*JL<@E±62E/K% L/b-

(589) !* 5_< 6E% c2G5 P$

(590) ! 5¯3Iw

(591)  \a K KzK<ƒg|drŽyO /5²b ‚$

(592) !5d

(593) V“*  %PŒ -“Œ &M< 7;"„

(594) a5<<2*G&

(595) ƒ

(596) !*6"E($

(597) FGf EC

(598) V~

(599) ,

(600) !* E„ nVo BLgT³ f8;0//x¤

(601) p 8t¤+ I*E

(602) /–A &%«RT" 6L+. ;,Q.

(603) ;  

(604) #  . . .  #. ;(R.

(605)  

(606) . 4655&798. ) *+,-

(607) . . /0/213  

(608) .   !#"%$&

(609) '(. . .  . ;,g.

(610)  5798  / 103.   . ) 5798  / 103. . .  !. ;.

(611) HF 40% HF 5% BLEND 1:1 (HF 40%:HNO3 70%). Diameter (nm). 400. 

(612) . 300 200 100. Depth (nm). 0 100.  . 80 60 40 20 0.  . Aspect Ratio. 0.4 0.3 0.2 0.1 0.0. 0. 30. 60. 90. 120. 150. 180. Etching Time (min). . ;(|.

(613) 

(614) .  .  !.    

(615).  !.   

(616). . . .

(617)

Références

Documents relatifs

To test whether the vesicular pool of Atat1 promotes the acetyl- ation of -tubulin in MTs, we isolated subcellular fractions from newborn mouse cortices and then assessed

Néanmoins, la dualité des acides (Lewis et Bronsted) est un système dispendieux, dont le recyclage est une opération complexe et par conséquent difficilement applicable à

Cette mutation familiale du gène MME est une substitution d’une base guanine par une base adenine sur le chromosome 3q25.2, ce qui induit un remplacement d’un acide aminé cystéine

En ouvrant cette page avec Netscape composer, vous verrez que le cadre prévu pour accueillir le panoramique a une taille déterminée, choisie par les concepteurs des hyperpaysages

Chaque séance durera deux heures, mais dans la seconde, seule la première heure sera consacrée à l'expérimentation décrite ici ; durant la seconde, les élèves travailleront sur

A time-varying respiratory elastance model is developed with a negative elastic component (E demand ), to describe the driving pressure generated during a patient initiated

The aim of this study was to assess, in three experimental fields representative of the various topoclimatological zones of Luxembourg, the impact of timing of fungicide

Attention to a relation ontology [...] refocuses security discourses to better reflect and appreciate three forms of interconnection that are not sufficiently attended to