HAL Id: hal-00759987
https://hal.archives-ouvertes.fr/hal-00759987v2
Submitted on 12 Mar 2013
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Pressureless Silver Sintering Die-Attach for SiC Power Devices
Stanislas Hascoët, Cyril Buttay, Dominique Planson, Rodica Chiriac, Amandine Masson
To cite this version:
Stanislas Hascoët, Cyril Buttay, Dominique Planson, Rodica Chiriac, Amandine Masson. Pressureless Silver Sintering Die-Attach for SiC Power Devices. CSCRM, Sep 2012, Saint-Pétersbourg, Russia. 2p.
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1234452363447896A32789BC329BD7E93FCC7278971327E3A934
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