HAL Id: jpa-00225898
https://hal.archives-ouvertes.fr/jpa-00225898
Submitted on 1 Jan 1986
HAL is a multi-disciplinary open access archive for the deposit and dissemination of sci- entific research documents, whether they are pub- lished or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers.
L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.
THE INVESTIGATION OF FIELD IONIZATION PROCESS OF He GAS ABOVE THE SEPARATE
SURFACE ATOMS OF TUNGSTEN EMITTERS
W. Lenkow, M. Glowacki
To cite this version:
W. Lenkow, M. Glowacki. THE INVESTIGATION OF FIELD IONIZATION PROCESS OF He GAS ABOVE THE SEPARATE SURFACE ATOMS OF TUNGSTEN EMITTERS. Journal de Physique Colloques, 1986, 47 (C7), pp.C7-47-C7-51. �10.1051/jphyscol:1986709�. �jpa-00225898�
JOURNAL DE PHYSIQUE
Colloque C7, supplement au n o 11, Tome 47, Novembre 1986
THE INVESTIGATION OF FIELD IONIZATION PROCESS OF He GAS ABOVE THE SEPARATE SURFACE ATOMS OF TUNGSTEN EMITTERS
W.E. LENKOW and M.S. GLOWACKI
Institute of Physics, Surface Physics Laboratory, Pedagogical University of Czestochowa, Zawadzkiego 13/15,
PL-42-200 Czestochowa, Poland
~ 6 s u m 6 . A l ' a i d e du microscope i o n i q u e ;quip6 de l a magn6tique son- d e atomique, t r a v a i l l a n t s o u s l a p r e s s i o n b a i s s k e du gaz d e t r a v a i l /h;liwn/, on a mesur; l e c o u r a n t i o n i q u e p r o d u i t au-dessus d e s atomes i s o l 6 s l a s u r f a c e de l t 6 m e t e u r d e t u n g s t b n e , d e s e s p a c e s a u d i a m b t r e d e 6 14 2.
On a mesur; l e s c o u r b e s d e s dGpendances d e l t i n t e n s i t 6 du c o u r a n t i o n i q u e d e 1 9 i n t e n s i t 6 du champ 6 l e c t r i q u e d e l t i o n i s a t i o n pour d e s atomes l e s p o s i t i o n s m e ' t a s t a b l e s s u r l e s &ages du p l a n (110) , pour l e s atomes d e bord de c e s 6 t a g e s d a n s l e s p o s i t i o n s normales e t pour lpatorne de 1 9 a d s o r b a t e /probablement l a mol6cule CO/ s u r un 6 t a g e du p l a n (1 10)
.
On a c o n s t a t 6 l ' a p p a r i t i o n du maximum du courbe pour l e s atomes m 6 t a s t a b l e s quand l a v a l e u r du champ 6tait ;gale a u champ du raeil- l e u r e image.
Summary. F i e l d i o n i s a t i o n c u r r e n t , g e n e r a t e d above t h e s i n g l e atom s i t e s of (110) t u n g s t e n p l a n e , i n FIhi working w i t h low p r e a s s u r e He g a s , as a f u n c t i o n of f i e l d s t r e n g t h h a s been measured, by magnetic s e c t o r a l atom-probe FD4 using.The f i e l d i o n i s a t i o n c u r r e n t from 6-14 2
s i z e a r e a , h a s beon r e g i s t r a t e d by channel p l a t e d e t e c t o r , t h e f i e l d s t r e n g t h was c a l i b r a t e d on t h e base of b e s t image conditions.The meas- urements h a s been done f o r m e t a s t a b l e atoms s i t e s on t h e s t e p s of (110) p l a n e , a s w e l l as f o r l e d g e atoms of t o p and n e x t d i s k s f o r 1 4 o r i - e n t e d e m i t t e r . The c u r v e s measured f o r m e t a s t a b l e p o s i t i o n e d atoms, d i s p l a y s a d i s t i n c t maxima correspondence t h e B I P v a l u e , whereas t h e r e m a i n i n g c u r v e s showe a q u i t e d i f f e r e n t c h a r a c t e r .
1 n t r o d u c t i o n . T h e p r e s e n t paper i s a s h o r t i n f o r m a t i o n a b o u t pos- s i b i l i t i e s of i n v e s t i g a t i o n s of p a r e x c e l l e n c e l o c a l s u r f a c e phenomena as f i e l d i o n i s a t i o n p r o c e s s e s above t h e s e p a r a t e atoms s i t e s by mag- n e t i c s e c t o r a l atom probe FIM using.!Phis c o n t r i b u t i o n should be a mod- e s t completion t o t h e l o c a l s u r f a c e phenomena i n v e s t i g a t i o n s d e s c r i b e d by o t h e r a u t h o r s ,2,3]
.
Article published online by EDP Sciences and available at http://dx.doi.org/10.1051/jphyscol:1986709
C7-48 JOURNAL DE PHYSIQUE
A ~ p a r a t u s . The 60' m a g n e t i c s e c t o r atom probe FIN, b u i l t by a u t h o r s and d e s c r i b e d p r e v i o u s l y [4,g h a s been used t o i n v e s t i g a t i n g o f t h e f i e l d i o n i s a t i o n o f t h e helium g a s , above s e p a r a t e atom s i t e s of (110) t u n g s t e n micromonocrystal p l a n e . T h i s a p p a r a t u s h a s probe h o l e a p e r - t u r e a n g l e amounts 16 mrad. A t t h i s a n g l e o f view t h e a n a l y s e d s u r f a c e a r e a s i z e i s a b o u t 6
a
f o r t h e e m i t t e r r a d i u s 400 8. Good vacuum con- d i t i o n s p r e s s u r e o f g a s e o u s c o n t a m i n a t i o n s n o t e x c e e d i n g 5. 10'1° hPa/ were o b t a i n e d . The mass r e s o l u t i o n r a t i o ~ M / M o f t h e i n s t r u m e n t w a s a b o u t 1/400, t h e d e t e c t i o n system s e n s i t i v i t y was t h e o r d e r o f 1 0 - l ~ ~ . T h i s system working w i t h microchannel p l a t e m u l t i - p l i e r o f t h e P h i l i p s G 640-50 t y p e . The p r e s s u r e of imaging g a s d u r i n g t h e experiment was 4 c 6 . 1 0 ~ ~ hPa. The i o n image w a s observed by u s i n g t h e e x t e r n a l image i n t e n s i f i e r o f t h e 3311 991 2 t y p e and r e g i s t e r e d by b o t h p h o t o g r a p h i c camera and v i d e o - t a p r e c o r d e r [6].E x p e r i m e n t a l p r o c e d u r e and r e s u l t s . F i e l d i o n i s a t i o n c u r r e n t , o r i - g i n a t e d above t h e s i n g l e atom m e t a s t a b l e s i t e s o f t h e l e d g e o f (110) p l a n e [7], f o r t h e f i r s t and second n e t p l a n e s t e p s , as a f m c t i o n o f a p p l i e d f i e l d was measured. The measurements were made on t h e [110]
o r i e n t e d , w e l l e v a p o r a t e d e m i t t e r s w i t h t i p r a d i i 360 2, 470 8 and 870 8, a t t h e f i e l d r a n g e 3 , 5 t o 5 , 5 f / 8 and t e m p e r a t u r e 80 K. Compar- a t i v e l y t h e s i m i l a r measurements were made f o r norma1,ledge p o s i t i o n e d atom s i t e s on t h e f i r s t and second (110) p l a n e n e t s t e p s , as well as f o r a d s o r b a t e o b j e c t / p r o b a b l y CO molecule/ s i t u a t e d s i m i l a r l y . The l a s t m e a s u r e x e n t s were made on t h e e m i t t e r w i t h t i p r a d i u s 420 2.0n t h e Fig. I a, b, c , d t h e photographs a l l t h e i n v e s t i z a t e d o b j e c t s a r e p r e s e n t i n s .
Piy.1. The p h o t o z r a p h s o f i n v e s t i q a t e d o b j c t : a/ t h e m e t a s t a b l e atom on t h e second n e t s t e p of t h e 360
fi
e m i t t e r ; b/ a d s o r b a t e on t h e second s t e p and t h e f o u r normal p o s i t i o n e d atoms on f i r s t a n d second s t e / R = 420 g/; c/ m e t a s t a b l e p o s i t i o n , second s t e p / R = 470b;
d/ m e t a s t a b l e p o s i t i o n , f i r s t s t e p /%870a/
The r e s u l t s of t h e f i e l d i o n i s a t i o n c u r r e n t measurements above t h e a l l m e t a s t a b l e s i t e s and a d d i t i o n a l l y f o r a d s o r b a t e showes Pig.2. The f i e l d s t r e n g t h was e s t i a a t e d on t h e base of c r i t e r i o n , t h a t t h e b e s t image f i e l d amount t o 4,4
~ / a
[8]. On F Q . 5 , t h e r e s u l t s of t h e same measurements f o r t h e normal l e d g e s i t e s on t h e I - s t and 2-nd s t e p s a r e p r e s e n t i n g .1 x10-'5-
L,s s
Fig.2. The f i e l d i o n c u r r e n t as a
'M
f u n c t i o n o f f i e l d s t r e n g t h f o r m e t a s t a b l e atom s i t e s f o r d i f f e r e n t t i p r a d i i
Fig.3. The f i e l d i o n c u r r e n t as a f u n c t i o n of f i e l d f o r l e d g e atoms s i t e s
D i s c u s s i o n . T h i s experiment was c a r r y e d o u t on t h e e m i t t e r s w i t h t i p r a d i i a few hundred 8, t h e g r e a t e s t one was a b o u t 900 8. F o r t h e a n g l e a p e r t u r e o f probe h o l e system 1 6 m a d t h e l i m i t i n g a n a l y s e d a r e a s a r e p r e s e n t i n g on F i a / t h e g r e a t e s t a r e a w i t h d i a m e t e r -14
a/
and on t h e Fig.5 / t h e l e a s t one w i t h d i a m e t e r -6a/,
It i s w e l l v i s i b l e , t h a t i n t h e f i r s t c a s e t h e a n a l y s e d a r e a c o v e r s more t h a n twenty s u r f a c e atoms, i n t h e second, a b o u t f o u r s u r f a c e atoms and i n v e s t i g a t e d one. I n t h e both l i m i t i n g c a u s e s t h e c h a r a c t e r of t h e measured c u r v e s /Fig. 2/ i s t h e same, what prove t h a t a l l measuring c u r r e n t was o r i g i n a t e d above m e t a s t a b l e atom s i t e s .F i g u r e s 4 and 5 a , b s u g 3 e s t a n observed m e t a s t a b l e s i t e s on t h e b o t h e m i t t e r s and two p o s s i b l e normal l e d g e s i t e s . I t i s confirmed by a u t h o r * s o b s e r v a t i o n s , t h a t o n l y advanced p o q i t i o n / l e f t on t h e ~ i g .5b/
i s v i s i b l e i n t h e F M working w i t h pure He g a s . I t i s worthy of b e i n g mentioned t h a t a c c o r d i n g t o a u t h o r ' s e v a l u a t i o n s , o n l y one t o a b o u t
JOURNAL DE PHYSIQUE
25 and one t o about 15 atoms
f
TO (1001 PLANE s i t e s a r e v i s i b l e f o r t h e 9002 and 350 2 e m i t t e r s r e s p e c t - i v e l y , f o r b10] d i r e c t i o n v i - c i n i t y .The r e s u l t s of f i e l d i o n i - s a t i o n c u r r e n t measurements, from so small a r e a s , were de- s c r i b e d i n physical l i t e r a t u r e very scanty. The photometrical measurements by Mtlller and a l l [9J were made f o r t h e g r e a t e r r e g i o n of (1 1 1) plane, Plummer
- - -
and Rhodin [lo] were measured t h e f i e l d i o n c u r r e n t from Pig.4. The metastable o s i t i o n ont h e I - s t s t e p ~ O I 1) p l a n e s t e p s of (100) , (I 1 2) and (1 10) on t h e e m i t t e r w i t h t i p ra-
d i u s 870 g. The probe h o l e tungsten e m i t t e r planes, how- covers a r e a about 14 8 d i - ever without t h e BLV marked m e t e r and e v a l u a t i o n of t h e i n v e s t i - g a t i n g a r e a . The most compara- b l e r e s u l t s c o n t a i n s t h e paper of Chen and Seidman [ll] ,but t h e meas- urements a r e p r e s e n t i n g only t o t h e BIV value,being i n agreement with a u t h o r * s r e s u l t s .
TO (1001 PLANE 360
8-NO
STEPf
TO IIIIIPLANLPig.5.a/ The metastable p o s i t i o n on t h e s u r f a c e of t h e second s t e p , R = 360 2, analysed a r e a h a s 6 8 diameter;
b/ normal ledge p o s i t i o n s of i n v e s t i g a t i n g atoms. Only l e f t s i t e i s v i s i b l e i n experiment.
Authors a r e s t i l l i n c a p a b l e t o i n t e r p r e t t h e o b t a i n e d r e s u l t s , par- t i c u l s r l y t h e d i f f e r e n c e i n t h e c h a r a c t e r o f c u r v e s p r e s e n t on t h e F i g . 2 and Fig.3. Although t h e p o s s i b i l i t y of e x i s t e n c e o f t h e i n d i s - t i n c t maxima of f i e l d i o n i s a t i o n c u r r e n t , o r i g i n a t i n g above b r i g h t s p o t o f a b o u t 22 2 d i a m e t e r , a t e l e c t r i c a l f i e l d 3 t o 5 ~ / 8 was p r e d i c t e d by van Eekelen w i t h t h e a i d o f a s i m p l e g a s dynamical c a l c u l a t i o n h2], t h e p r e s e n t i n g r e s u l t s a r e r a t h e r d i f f e r e n t , e s p e c i a l l y i n t h e c a s e of t h e m e t a s t a b l e atom s i t e s . It i s p o s s i b l e t h a t observed e f f e c t i s caused by e x t e r n a l f i e l d i n t e r a c t i o n w i t h t h e l o c a l i z e d t u n g s t e n or- b i t a l s of d-type, e s p e c i a l l y w i t h t h e one c o m p l e t l y f r e e and one par- t i a l l y occupated o r b i t a l from t h e m e t a s t a b l e s i t u a t e d atom, which i s i n t e r a c t i n g w i t h t h r e e n e a r s t n e i g h b o u r s o n l y [I 3J
.
Although, d i s t i n - , p i s h e d p r o p e r t i e s o f m e t a s t a b l e p o s i t i o n e d atoms t o e l e c t r i c a l f i e l d were found p r e v i o u s l y by lviffller and Krishnaswamy [14] / t h e y observed o n l y one J a s o n ' s peak i n t h e i o n energy spectrum f o r i o n o r i g i n a t i n g above m e t a s t a b l e atom s i t e s / , t h e d i s t r i b u t i o n of t h e l o c a l e l e c t r i c a l f i e l d and symmetry of t h e i n t e r a c t i o n between e x t e r n a l f i e l d and f r e e o r b i t a l s i s n o t c l e a r y e t .Acknowled~ement. The a u t h o r s a p p r e c i a t e lvlr. J. Krasowski M. Sc. f o r h i s c o l l a b o r a t i o n i n e x p e r i m e n t a l works.
R e f e r e n c e s
[I] G. E h r l i c h , S u r f . S c i . , &5, 422-447 /1977/ and r e f e r e n c e s t h e r e i n [2] G.L. Kellogg and T.T. Tsong, S u r f . S c i . , 3, 343 /1977/
[3] N. E r n s t and G. E h r l i c h , J. d e Physique, 41 / ~ 2 / , 47 /1986/
141 Iv1.S. Gkowacki and W.E. Lenkow, 27-th IFES Rep. Tokyo, Japan p.p. 21-26. ed. Y. Yashiro and N. I g a t a
[5J M.S. Gkowacki and W.E. Lenkow, Journ. Techn. Phys., 2, 203-21 2 / I 9821
[6] W.E. Lenkow and b1.S. GZowacki, Acta Univ. Wrat., B, 75 /1977/
17) E.W. bIBller, S u r f . S c i . , 2, 484 /1964/
[8] E.W. K t i l l e r and T.T. Tsong, " F i e l d Ion I~Iicroscopy P r i n c i p l e s and A p p l i c a t i o n s " . New York 1969 p. 154
[g] E.W. Mtiller, S , Nakamura, 0. Nishikawa and S.B. Mc.Lane, J. Appl.
Phys.,
z,
No 8, 2496-2503 /1965/Md E.W. Plummer and T.N. Rhodin, J. Chem. Phys.,
a,
3479 /1968/(1 11 Y.C. Chkn and D.N. Seidnan, S u r f . S c i . ,
.a,
231 /1971/1 'i8 H.A.M. van Eekelen, S u r f . S c i . , 21, 21 /1970/
M.S. Gzowacki, Doct. T h e s s i s , Czg stochowa
-
Wrockaw 1981 E.W. M a l l e r and S.V. Krishnaswamy, S u r f . S c i . ,z,
29-47 /1973/T h i s work was supported by C e n t r a l P r o j e c t of t h e B a s i c Research 01.08.AS.