Measurement of residual thickness using scatterometry

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(1)Measurement of residual thickness using scatterometry David Fuard, Corinne Perret, Vincent Farys, Cécile Gourgon, Patrick Schiavone. To cite this version: David Fuard, Corinne Perret, Vincent Farys, Cécile Gourgon, Patrick Schiavone. Measurement of residual thickness using scatterometry. Journal of Vacuum Science and Technology B, 2005, 23, pp.3069-3074. �10.1116/1.2130345�. �hal-00020910�. HAL Id: hal-00020910 https://hal.archives-ouvertes.fr/hal-00020910 Submitted on 16 Mar 2006. HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers.. L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés..

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