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A near-field scanning microwave microscope in a scanning electron microscope: design and challenges

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HAL Id: hal-02278736

https://hal.archives-ouvertes.fr/hal-02278736

Submitted on 4 Sep 2019

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A near-field scanning microwave microscope in a

scanning electron microscope: design and challenges

P. Polovodov, Sophie Eliet, O. Haenssler, G. Dambrine, K. Haddadi, Didier

Theron

To cite this version:

P. Polovodov, Sophie Eliet, O. Haenssler, G. Dambrine, K. Haddadi, et al.. A near-field scanning microwave microscope in a scanning electron microscope: design and challenges. 21st International Scanning Probe Microscopy, May 2019, Louvain la Neuve, France. �hal-02278736�

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