Extreme ultraviolet light source at a megahertz repetition rate based on high-harmonic generation inside a mode-locked thin-disk laser oscillator

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Academic year: 2021

Partager "Extreme ultraviolet light source at a megahertz repetition rate based on high-harmonic generation inside a mode-locked thin-disk laser oscillator"

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Figure

Fig. 4. Amplitude and phase noise measurements of the mode-locked TDL oscillator output in free-running operation with and without gas.

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