HAL Id: tel-01261513
https://tel.archives-ouvertes.fr/tel-01261513v3
Submitted on 13 Oct 2016
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de nanofils verticaux en silicium
Youssouf Guerfi
To cite this version:
Youssouf Guerfi. Réalisation et caractérisation de transistors MOS à base de nanofils verticaux en silicium. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2015.
Français. �NNT : 2015TOU30253�. �tel-01261513v3�
En vue de l’obtention du
DOCTORAT DE L’UNIVERSIT ´E DE TOULOUSE
D´elivr´e par :l’Universit´e Toulouse 3 Paul Sabatier
Pr´esent´ee et soutenue lejeudi 10 d´ecembre 2015 par : Youssouf GUERFI
R´ealisation et caract´erisation de transistors MOS `a base de nanofils verticaux en silicium
JURY
Sylvain BOLLAERT Professeur d’Universit´e Rapporteur Laurent PICHON Professeur d’Universit´e Rapporteur Alain CAZARRE Professeur d’Universit´e Pr´esident Bassem SALEM Charg´e de recherche Examinateur
Ecole doctorale et sp´´ ecialit´e : GEET : Micro et Nanosyst`emes Unit´e de Recherche :
Laboratoire d’Analyse et d’Architecture des Syst`emes (UPR 8001) Directeur(s) de Th`ese :
Guilhem LARRIEU et Filadelfo CRISTIANO Rapporteurs :
Sylvain BOLLAERT etLaurent PICHON
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