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LEEIXS and XPS studies of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

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Academic year: 2021

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Figure

Fig. 1. Normalized Cr L-spectra obtained from the standard samples (Cr, CrN and Cr 2 O 3 ).
Fig. 2. Cr L-spectra obtained from oxynitride sample deposited on carbon substrate at 5 and 15 sccm air flow.
Fig. 3. Evolution of Cr and compound content determined by LEEIX spectroscopy as a air flow and relative humidity.
Fig. 5. O 1s XPS spectra for chromium oxynitride sample deposited with 5 sccm (a) and 10 sccm (b) of air at 65% RH.
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