NATO Advanced Study Institute RESPONSIVE SYSTEMS … / MEMS Course Brussels, September 10-19, 2001
Laboratoire de Mécanique Appliquée – UMR 6604 CNRS – Université de Franche Comté Institut des Microtechniques de Franche Comté
6 Arrayed Electrostatic Actuators using
Contact Interactions
A/ Bottom-up Design Methodologies
B/Actuator Arrays on the Silicon Wafer Level
C/ High Mechanical Power Transmission using Hybridization Techniques
NATO Advanced Study Institute RESPONSIVE SYSTEMS … / MEMS CourseBrussels, September 10-19, 2001
Laboratoire de Mécanique Appliquée – UMR 6604 CNRS – Université de Franche Comté Institut des Microtechniques de Franche Comté
The Bottom-Up Design Methodology
Macroscopic machines naturally scale with humans
“B ot to m -Up ” Ap pr oac h
Micrometer Size Actuation Cells
M acr os co pic M ach in es
“T op -D ow n” A pproa ch
Investigation of microand nano World Visible Effectsup to theHuman Scale
ArrayedElementaryActuators Conventional Machining Limits
M icr om ac hine s
Silicon Processing Technology Limits 10 0m
10–3 m
10–6 m
? !
Visible Effects up to the Human Scale
Investigation of Micro World
NATO Advanced Study Institute RESPONSIVE SYSTEMS … / MEMS CourseBrussels, September 10-19, 2001
Laboratoire de Mécanique Appliquée – UMR 6604 CNRS – Université de Franche Comté Institut des Microtechniques de Franche Comté
Arrayed Electrostatic Actuators using Contact Interactions
Doc. LMARC / we b site: w ww.micromachines.univ-fcomte.fr - Lateral Size 2 X 3 mm² - Overal Thikness 2 microns - Nominal Driving Voltage 100 Volts - Actuation Cell Density per Unit area 250/mm² - Resulting Driving Force > 2 N Cooperative Behavior of a 1430 Actuator Array
NATO Advanced Study Institute RESPONSIVE SYSTEMS … / MEMS Course Brussels, September 10-19, 2001
Laboratoire de Mécanique Appliquée – UMR 6604 CNRS – Université de Franche Comté Institut des Microtechniques de Franche Comté
Driving Force Capabilities on the Silicon Wafer Level
- Distributed Electrostatic Comb- Drive Actuators - Distributed Scratch-drive Actuators
- Field interactions - Contact interactions
- Driving Force per Unit Area : 200 µN/mm
2- Range of Displacement : Restricted
- Driving Force per Unit Area : 400,000 µN/mm
2- Displacement : Unrestricted
- Mechanical Power per Mass Unit: Up to 1000W/gr
Doc. LMARC / web site: www.micromachines.univ-fcomte.fr
NATO Advanced Study Institute RESPONSIVE SYSTEMS … / MEMS CourseBrussels, September 10-19, 2001
Laboratoire de Mécanique Appliquée – UMR 6604 CNRS – Université de Franche Comté Institut des Microtechniques de Franche Comté
Toward Visible Effects Up to the Human Scale
The Actuator Array shown in the red Circle Would be Able to Lift Up a 200 gr Weight! Unfortunately , the Mechanical Integrity of the Polysilicon Structure Cannot be Satisfied using Serial Connection with the Load…
Doc. LMARC / we b site: w ww.micromachines.univ-fcomte.fr Driving Force Density p er Unit Area: Up to 400,000 µN/mm
2NATO Advanced Study Institute RESPONSIVE SYSTEMS … / MEMS Course Brussels, September 10-19, 2001
Laboratoire de Mécanique Appliquée – UMR 6604 CNRS – Université de Franche Comté Institut des Microtechniques de Franche Comté
Loss of the Actuator’s Mechanical Integrity using “Serial”
Connection with External Loads
The Actuator’s Mechanical Integrity can only be Kept using “Parallel Load / Actuator Interface” (e.g. Each Actuator Must be in Direct Contact with the External Load)
External Load
Critical Tensile Strength1800 MPa Force Superposition
NATO Advanced Study Institute RESPONSIVE SYSTEMS … / MEMS Course Brussels, September 10-19, 2001
Laboratoire de Mécanique Appliquée – UMR 6604 CNRS – Université de Franche Comté Institut des Microtechniques de Franche Comté
Operating Principle of Parallel <Load / Actuator > Interfaces
Parallel Load / Actuator Connection Can be Easily Performed using Insertion of the Polysilicon Actuator Array Within the Gap of Two Macroscopic Parts in Relative Motion, Doc. LMARC / web site: www.micromachines.univ-fcomte.fr
NATO Advanced Study Institute RESPONSIVE SYSTEMS … / MEMS CourseBrussels, September 10-19, 2001
Laboratoire de Mécanique Appliquée – UMR 6604 CNRS – Université de Franche Comté Institut des Microtechniques de Franche Comté
The Actuator Array (stator) is Se lf-R eleased from the Substrate
Stator / Rotor Self-Assembling Doc. LMARC / we b site: w ww.micromachines.univ-fcomte.fr Hybridization of Microscopic & Macroscopic Parts Without Human Handlin g
NATO Advanced Study Institute RESPONSIVE SYSTEMS … / MEMS Course Brussels, September 10-19, 2001
Laboratoire de Mécanique Appliquée – UMR 6604 CNRS – Université de Franche Comté Institut des Microtechniques de Franche Comté
Millimeter Size Tubular Electrostatic Motors Using Flexible Arrays of Actuators
Stator / Rotor Assembling After Insertion into the Motor Frame
Doc. LMARC / web site: www.micromachines.univ-fcomte.fr
NATO Advanced Study Institute RESPONSIVE SYSTEMS … / MEMS Course Brussels, September 10-19, 2001
Laboratoire de Mécanique Appliquée – UMR 6604 CNRS – Université de Franche Comté Institut des Microtechniques de Franche Comté
