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HAL Id: jpa-00229662

https://hal.archives-ouvertes.fr/jpa-00229662

Submitted on 1 Jan 1989

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THICKNESS DEPENDENCE OF

CATHODOLUMINESCENCE IN THIN FILMS

J. Yuan, Sébastien Berger, L. Brown

To cite this version:

J. Yuan, Sébastien Berger, L. Brown. THICKNESS DEPENDENCE OF CATHODOLUMINES- CENCE IN THIN FILMS. Journal de Physique Colloques, 1989, 50 (C6), pp.C6-177-C6-177.

�10.1051/jphyscol:1989631�. �jpa-00229662�

(2)

REVUE DE PHYSIQUE

APPLIQUEE

Colloque C6, Suppl6ment au n06, Tome 24, Juin 1989

THICKNESS DEPENDENCE OF CATHODOLUMINESCENCE IN THIN FILMS

J. YUAN, S. BERGER' ) and L.M. BROWN

Cavendish Laboratory, Madingley Road, GB-Cambridge CB3 OHE, Great-Britain

Abstract.

-

Thin film samples have been increasingly used in high resolution imaging studies of cathodoluminescence (CL) from materials, in order to achieve the smallest CL source possible[l-31. The analysis of the luminescence signals from thin film material is often hampered by the changes associated with the film thickness variation. This thickness effect has been analysed in a simple model which takes into account the diffusion of the excited states in thin films. The electron beam is assumed to provide a uniform excitation density over the entire film thickness appropriate to electron transparent films (the definition of which is also given). The intensity variation of CL signal as a function the foil thickness t is given by the formula I(t) =

To(

t

-

2L

co*

+

f

1

where L is the diffusion length of the energy carrier in a bulk sample; f is the ratio of the bulk diffusion 'velocity' L/z to that of the surface diffusion velocity s. Both physical parameters can be obtained from a plot of the CL intensity verses the film thickness. This has been applied to a number of materials such as Y203:~u3+, Y A G : C ~ ~ + , Diamond and InP. For the last two types of materials, the result of the analysis is consistent with those from other experiments[3,4]. For phosphors with a relatively large doping of luminescent ions, the saturation effect caused by an intense excitation density must be taken into account in interpreting the physical parameters deduced[5,6].

[I] Petroff P M, Lang D V Strudel J L and Logan R A, SEM, 1(1978), 325, SEM Inc. Chicago [2] Pennycook S J, Brown L M and McGovern S, Phil. Mag. 41A(1980), 589-600

[3] Myhajlenko S, Batstone J L, Hutchinson H J and Steeds J W, J. Phys. C : Solid State Phys. 17(19841, 6477-6492

[4]Sellschop J P F, 'Nuclear probe studies', in The properties of diamond (1979), ed. Field J E, Academic press.

[SIBerger S, McMullen D, Yuan J and Brown L M, Znst. Phys. Conf. Se. 78(1985), 137 [6]Berl A, Pkysica XV(1949), 361

(')present Address : AT & T Laboratories. Murry Hill, NJ 07974, U.S.A.

Article published online by EDP Sciences and available at http://dx.doi.org/10.1051/jphyscol:1989631

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