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High Order Nonlinearities and Mixed Behavior in Micromechanical Resonators

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Academic year: 2021

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Figure

Fig. 1 SEM images of the fabricated resonator designed using a complete nonlinear model [7].
Fig. 3 Measured strange hardening and mixed resonance peaks for V ac = 0.2V showing the changes on the bifurcation topologies
Fig. 4 Measured mixed and softening resonance peaks for V ac = 0.2V.

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