BAW Pressure Sensor on LiNbO3 Membrane Lapping

HAL Id: hal-00578951

https://hal.archives-ouvertes.fr/hal-00578951

Submitted on 15 Apr 2021

HAL is a multi-disciplinary open access archive for the deposit and dissemination of sci- entific research documents, whether they are pub- lished or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers.

L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

Distributed under a Creative Commons Attribution| 4.0 International License

T. Baron, J. Masson, J.-P. Romand, S. Alzuaga, Lise Catherinot, Matthieu Chatras, S. Ballandras

To cite this version:

T. Baron, J. Masson, J.-P. Romand, S. Alzuaga, Lise Catherinot, et al.. BAW Pressure Sensor on

LiNbO3 Membrane Lapping. EFTF 2010, 24th European Frequency and Time Forum, Apr 2010,

Noordwijk, Netherlands. �10.1109/EFTF.2010.6533644�. �hal-00578951�

^{! !}

!"#$#% &!)* +

,--!. ! /, . *0"###% &!* +

$ 1.*%24!5%

4!5%* +

"#$% " " & ' ( " ( &##) ('(%' "#" (

* +%,

- . # /-(

''"(%('0' +%,

" "

#"' %- %"'"& "$1"$" "#

1 2 -3 - '' ' &% " "' +%,

4 "4 "%% %#4% '

%&"'' 4' & +%,

4 ""3& % -

" "-& ''"-&"" (""'"

& ( # % " %# % "3

.( "% &0% & "# & &5"#

"" & -( '' & &

" &-( " &"( # -#"""-(# &5"# &

.%( "&% " % - '' 4' '"

'' -& "' && ( " 67 '" - "" (

&" &" #" "''"2-&"

. ' +%,

% - & #

88 ' & %#' % +%,

"-&-&

%( #"' 1)9% "

- & : '"-''#'&;<+" ⁼ -

"" &" # 5 # % +%,

%5# %#

&% " &&"" ".( .'%%

-#('-(&5"#'"(

&"&%-%%#' 2 "&/ "3

" " / '' " % (

"% "3&% &"''"('' '' " " % # & " " &

# - (# ' & 2

"" % "3- &

"5" ( "/(" #(

%- % # " &

&5"#&/ %(

# " & &5"# 5# &5"# &

%

> (%% % &" %# "&

# &" &% & '' ('

2"&" (%" &" "$"( # - " &# " 2&"&

/ " %( "$"( # %3 -(

&" %# "$"( # " "& % "

"$"( #'#& &-( & !

"&"( " - & ?> /" %

&"" "" " % '-&# 0'" "3&"&"( # " " "#&"&"%&% "

' "# "( # # "( "

'

> ( &" &"#' " "

> .( %( "&" (- "$"( # /% %(

> !"#'"&( " "$"( #&"" "

67

'"&-$"' & ?-&"" (&" &

/$%'( #" %0' 2" - $"# ' " " " "% - '4% " 5" (#/"

-%-''#% ' 5 &"

'&0' '''"

> ?"&-$"&&% " &/'

!"#$%&' 6%+*!!7*!+%%

.%'"% &- $"#-&2 ''"- ' "5 #' &"&(% &-&.%#

9 # ' %#' % +%,

"

-& +%,

-& % "%( $

" ""' &88 "3# 1)9-&%

" - & <: % '"- "3 '&!8@-''#'&;<+" ⁼ -""&"

% " % ' "# " %# A '"

( '"'' ''"'5 #&

(" '""."# "'"' ("& " %#( " ' " "

+%,

( &&0' "&& " ""

& && $ "-% %-&

"' %

> <.&1)9

* %!+ * +*8 !!79!/5*7 +

,"% " ( "#"" 5 #&%

: "3&-&'" #&"3 # "

' "'#'" "%--( " ("

& "3 "" 5(%' "#"

% # & % # %# " 5 ( %-& -3--&

"3&" "> ;'''#&%"-&"

" " " " ( # &" %#

,+B2- "&5"#"<8/C" (

!8&"% &" "$; %88D

' - "'( &" " '"&%

2&% '& &"%---&

' "&" "&& " & " -( # ' & " ( -( #" (( > F -$"& "4 +%,

-&% "" %"

"'%&"- #- "%

&"

> F" & "4 +%, ! % G&"%C<H 'A(I

• " & % " % ' ' - " J " " % & '"

&&#% %#' %

• " '$"

-& "3 "#-(

• # & " (# '%"

#' && " " & &

()

' " "-& %5# %#'' '( "3

&88 "'' " ''- & K ,, % '' 4' " % '# &

-& ' ?L ' % # . % (

& ""% .""'&'' %#"

'& -&&&-"" &

% ( 2 &- %# "$' ' ' 5 ' " ' ' " % ( -

> K,,'' 4' "

*"!"+$#&"$

.& '"- :'21" "-&& "$

"( #.% -&/" %(" % 4'"," % " ( "' +%,

'&"- &$&&'" '"-&

"" /$%&"" '

.%"- "-''# && %"3&/

"$"( # " > C- %" & ('

"" . ( # &&" ( " - $%

""' M"-N)-3#,"""

%# " 3&" %&" "&& "

" "" ( " ( # > C

0' '"" "'' & 8

1" " ' &" & '' - & & "

&5"# & / > 8 - " " & &

&5"#( ( "

> C1" "I ( (''

2 ''-(''-""'&'#

0' $"#%/&" % ' ' " ' '" " & % # & % - # " "

- & "" &" ( #'"&- "

-(' &&( ""/.-

&&" &" & 5 &

'"0' 5 #"&"/&&

- % ' & 0 & & # ( ''"

"' ( #

67 :9"1A9 9 $$.:

>% " & / >5"# 3 " " .(

E $# + %# >" " (!;

''!8$?888K