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Concluding Remarks

Dans le document Applications MEMS (Page 53-60)

Inertial sensors, both linear and rotational, have seen broad commercial and industrial application of micro-machining technologies driving system cost, size, and performance. Many of the early automotive applica-tions, driven initially by cost and package size with modest performance requirements, resulted in a niche product field in which micromachined accelerometers could successfully compete with macroscopic com-petitors. As the technology field has matured and broadened, increasing performance expectations in what could be consideredtraditional micromachined product areas will push the technology frontiers much harder. Such traditional areas might include front airbag crash sensing and the future utilization of distrib-uted sensor systems in automobiles for systems like stability control, ride control, future generation occu-pant safety systems, rollover, and a cadre of potential new applications. Not only will micromachined inertial sensors need to produce the low cost, small size parts they have demonstrated so successfully, but they also will need to demonstrate significant system performance gains at the modest costs and packages in order to continue to flourish. There is certainly room for the next generation of technology, device, and system design-ers to creatively demonstrate exciting, challenging, and expanding applications for micromachined inertial sensing.

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