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Understanding mechanisms of adhesion of SiO2 thin films evaporated on a polymeric substrate

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HAL Id: hal-02387348

https://hal.archives-ouvertes.fr/hal-02387348

Submitted on 3 Dec 2019

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Understanding mechanisms of adhesion of SiO2 thin films evaporated on a polymeric substrate

Caroline Ho, Anita Dehoux, Joël Alexis, Loïc Lacroix, Olivier Dalverny, Sébastien Châtel, Bruce Faure

To cite this version:

Caroline Ho, Anita Dehoux, Joël Alexis, Loïc Lacroix, Olivier Dalverny, et al.. Understanding mech- anisms of adhesion of SiO2 thin films evaporated on a polymeric substrate. 43th International Con- ference on Metallurgical Coatings and Thin Films (ICMCTF), Apr 2016, San Diego, United States.

Proceedings of the 43th International Conference on Metallurgical Coatings and Thin Films (ICM-

CTF), pp.0, 2016. �hal-02387348�

(2)

OATAO is an open access repository that collects the work of Toulouse researchers and makes it freely available over the web where possible

Any correspondence concerning this service should be sent

to the repository administrator: tech-oatao@listes-diff.inp-toulouse.fr This is an author’s version published in: http://oatao.univ-toulouse.fr/23316

To cite this version:

Ho, Caroline and Dehoux, Anita and Alexis, Joël and Lacroix, Loïc and Dalverny, Olivier and Châtel, Sébastien and Faure, Bruce Understanding mechanisms of adhesion of SiO2 thin films evaporated on a polymeric substrate. (2016) In: 43th International Conference on Metallurgical Coatings and Thin Films (ICMCTF), 25 April 2016 - 29 April 2016 (San Diego, United States).

(Unpublished)

Open Archive Toulouse Archive Ouverte

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Underst nd·ng Mechonis s o Adhesio o , m De os· ed on a Po ymeric Substr

C. Ho 1.

2

, A. Dehoux 2 . J. Alexis 1• L. Lacroix 1. O. Dalvern!:J 1. S. Châtel 2. B. Faure 2

1 Laboratoire Génie de Production ENIT-INP, University of Toulouse, Tarbes, France

2 Thin Films Group, R&D Physico-Chemistry, Essilor International, Créteil, France

Contact·

corolineho@enit.fr

Abstract : A better understanding of mechanisms of adhesion between a 200 nm thick silicon dioxide layer and a 4.5 µm thick polymeric hardcoat is indispensable for an efficient adhesion at the interface. To reach this purpose, focus is placed on two axes:

finding an applicable and effective method to quantify adhesion and in parallel, characterizing mechanical properties of materials composing the system. The second axis is needed to obtain data to feed modeling codes, enabling a better analysis of the adhesion experiment. Modulus of modified Si02 was found to be roughly 20% higher than reference Si02, by nanoindentation.

AFM experiments showed no difference between modified and reference Si02Currently, an investigation to detect cracks at the interface of interest for micro-tensile test is ongoing. Adhesion tests, such as micro-compression will be performed as well.

Context

Anti-Reflective Stack ( nm)

To improve wearers' experience, ophthalmic lenses made of plastic polymeric substrates are coated with functional treatments, bringing anti-sratch and anti-reflective properties. These treatments are composed of 5 to 15 layers, ranging from micrometers to

First Results

Micro-tensile test

Tensile specimen

HardCoat (µm)

Substrate (mm)

Challenge lnsufficient adhesion between layers may lead to delamination

Delamination causedbyProcessModification

To anticipate and prevent delamination

Understanding mechanisms of adhesion between Hardcoat and

Anti-Reflective Stack

Force applied versus Sample Extension

Agrawal and Raj model

TIÔO"

r=--

À

r: maximumînterfacialshearstrength in MPa /i:film thicknessinµm

a:stress at first crackingoccurrenceinMPa D.C. Agrawal, R Raj, "Measurement of the ultimate shear strength of a metal-œramîc Interface�,

ActaMelallurgica37(1989)1625-1270

SEM micrographs of fractured tensile specimens

1

T HardCoat / Substmte interface : [ 9; 14] MPa

Variabî!itydueto

Determination of firstCrackingoccurrence Determination ofSteadystate

Conclusion and ects

À: mean inter-crack spacingat steady state in µm

Identification of layersaftertensiletest by EDS

Methodolo

[ Adhesion between Si02 layer and HardCoat]

200 nm SiO, Layer

lnterfaceoflnterest c===)

4.5 µm HardCoat

Mechanical Adhesion = / ( Fundamental Adhesion + Other Factors)

Evaluation of Practical Adhesion

&

Localization of Mechanical Stress' Application

Nana-indentation

lmpre,;l$ionsdue lndentertip radlu� and surfaçedetectlon lnaccuraçyrelatedto lnfluence o fSubstrate

e ( o os • • • • e •

AFM

F- F a dh = �-E-'1R r:,3/2

3(1-v2) F= Force in pN F = Adhesive Force in pN E = Young's Modulus in MPa u = Poisson's ratio of the sample R= Radiusof theindenterinnm 6=1ndentationDepthin nm

Experiments performed using Peak Force QNM on DNISPHS tip : 20 nm tip radius

Spring Constant : 436 N/m Peak Force: 7100nN Indentation Depth: 10nm

Il

Characterization of Bulk Mechanical Properties of Constituents Composing

the System

i ,a+-- --- - --

Representation ofForceversusTip-Samp!eSeparation

Acknowledgement : Mickael Febvre from Bruker for performing the AFM experiments

First micro-tensile experiments suggest that most noticeable cracks are located at the hardcoat/substrate interface. This was determined by EDS on fractured areas, after tensile stress.

Modulus of modified Si02 was found to be roughly 20% higher than reference Si02 by nanoindentation. Considering the high standard deviation of moduli measured by AFM, no significant difference between moduli of modified and reference Si02 was observed by AFM. However, an important difference between moduli of Si02 on lens and on Si wafer was observed. This exposes unexpected influence of substrate on mechanical measurements using AFM, which has been hypothetically attributed to impact of Peak Force high frequency oscillations on viscoelastic substrates. Currently, an investigation to detect cracks at the interface of interest after micro-tensile test is ongoing. Other adhesion tests, such as micro-compression will be performed as well.

CONFIDENTIAL©2016 ESSILOR RESEARCH & DEVELOPMENT

Ali rights reserved Do not disclose, copy or distribute

ESSILOR

SEEING THE WORLD SETTER

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