• Aucun résultat trouvé

NON-DISPERSIVE AND DISPERSIVE TRANSPORT IN AMORPHOUS GERMANIUM SELENIDE AND HYDROGENATED SILICON

N/A
N/A
Protected

Academic year: 2021

Partager "NON-DISPERSIVE AND DISPERSIVE TRANSPORT IN AMORPHOUS GERMANIUM SELENIDE AND HYDROGENATED SILICON"

Copied!
5
0
0

Texte intégral

(1)

HAL Id: jpa-00220745

https://hal.archives-ouvertes.fr/jpa-00220745

Submitted on 1 Jan 1981

HAL is a multi-disciplinary open access archive for the deposit and dissemination of sci- entific research documents, whether they are pub- lished or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers.

L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

NON-DISPERSIVE AND DISPERSIVE TRANSPORT IN AMORPHOUS GERMANIUM SELENIDE AND

HYDROGENATED SILICON

J. Shirafuji, G. Kim, H. Matsui, M. Inoue, K. Yoshino, Y. Inuishi

To cite this version:

J. Shirafuji, G. Kim, H. Matsui, M. Inoue, K. Yoshino, et al.. NON-DISPERSIVE AND DISPERSIVE TRANSPORT IN AMORPHOUS GERMANIUM SELENIDE AND HYDROGENATED SILICON.

Journal de Physique Colloques, 1981, 42 (C4), pp.C4-583-C4-586. �10.1051/jphyscol:19814127�. �jpa-

00220745�

(2)

CoZZoque C4, suppzdment au nOIO, Tome 4 2 , octobre 1981 page C4-583

NON-DISPERSIVE AND DISPERSIVE TRANSPORT IN AMORPHOUS GERMANIUM SELENIDE AND HYDROGENATED SILICON

J. S h i r a f u j i , G . I . K i m , H. Matsui, M. I n o u e , K. Yoshino and Y. I n u i s h i

Department of EZectricaZ Engineering, FacuZty o f Engineering, Osaka Urriversity, Yarnada-W, Suita, Osaka, 565, Japan

Sbstract.- The coexistence of non-dispersive ( f a s t ) and dispersive (slm) elec- tron transport is observed in C=-Se evaporated films i n time-of-flight measure- ment. The saturation of the induced charge with increasing e l e c t r i c f i e l d in the non-dispersive cmpcment allows us t o estiiMte the reccmbination l i f e t h e of the optically injected electrons. In hydrogenated a-Si, on the other hand, the coex- istence of two transport processes is not found s o far. Electron transport i n GD a-Si is non-dispersive, but highly dispersive in SP a-Si. Holes shm dispersive process i n both ia) and SP a-Si.

Introduction.- It is of much importance in applications of amorphous semiconductors to optoelectronic devices such a s t h i n film solar cells, holcgraphic m r i e s and electronic photography t o investigate behaviors of photoexcited carriers. Time-of- f l i g h t technique would be a m e r f u l tool t o study characteristic behaviors of opt- i c a l l y injected carriers in amrphous semiconductors as w e l l a s i n crystals. In amarphous materials it i s frequently rnet t h a t the kink corresponding t o the carrier transit time does not appear due t o dispersive nature of the transport. Even i n the dispersive transport, the-of-flight method is still effective t o estimate the d r i f t m b i l i t y of carriers £ran log I vs. log t (I:current, t:time) plot.

A phenanenolcyical theory of the c?iswsive t r a n s p r t has been f i r s t presented by Scher and Montroll (1) under the assmption of large hopping-time distribution.

(X1 the other hand, Pollak (2) has pointed out t h a t the results of Scher and Montroll can not be explained by hopping conduction and are rather a gad. resresentation of the trap-limited transport under bread conditions. It has been sham more directly by several workers ( 3 , 4 ) that the generalized trap-limited transport can yield sam situations a s treated by Scher a n d - b n t r o l l . Because of the existence of dense and widely spread localized levels, dispersive nature of c a r r i e r transport is m r e or less contained i n amorphous materials: i n s m ~ cases dispersive nature daninates and i n other cases non-dispersive character i s observed, depending on materials o r preparation d t i o n s . In this paper we w i l l s h m the eqxrimental results of the coexistence of non-dispersive and dispersive electron transport i n evaporated G-Se glasses. Cchnparison i s made between sputtered (SP) and glmdischarged (Q) hydro- genated amorphous Si. The ccexistence of dispersive and ncn-dispersive conduction i s not found, but either of them dcarcinates depending an c a r r i e r type and preparation

~ t h d .

Expefinkxital Results and Discussion.

a) @-Se ev.pratted films.- GexSel-x (0.2 X $ 0.4) films were deposited on Sn02 coated glass substrate. A semitransparent Au electrode was evaporated onto the film f o r providing sandwich-type cell. The thickness o:f the f i l m ranged fran 1.4 t o 4.9 )rm. The -imental setup for time-of-flight measuremnt was similar t o t h a t de- scribed in previous papers (5,6). Pulsed l i g h t (10 ns, 337.1 m) £ran a nitrogen laser was focused on the sample through the Au electrode. The t r a n s i t tim t of p t o c a r r i e r s was e s t h t e d fran the induced charge waveform Q(t) for non-di&rsive

a s t electrons o r f r m log I ( t ) vs. log t p l o t of the transient current I ( t ) f o r dispersive slm eiectrons and holes. The applied f i e l d E was varied up t o 5xldl V/m.

The measwement was done a t ram temperature (R.T.) unless m k e d .

Article published online by EDP Sciences and available at http://dx.doi.org/10.1051/jphyscol:19814127

(3)

C4-584 JOURNAL DE PHYSIQUE The electron transport i n a-Se (2 p thick) was non-dispersive, but when 20 % was added t o a-=, it changed drastically t o be dispersive. On further

increasing of Ge content, there appeared a sharp E = lo4 ~ l c m r i s e ( f a s t conponent) i n the induced charge signal

followed by a slm dispersive region (slm c- nent). This situation i s shown i n Fig. l. The height Q? of the f a s t c q n e n t tends t o increase

with increasing Ge content. The appearance of b m 0 ccmponents was influenced a l s o by the applied field.

{

For example in

Gee.

7 ~ 3 % ~ 66 glass (4.7

p

thick), 0 40 80 120 160 200 the induced charge signal had only slm capcnent TlME ( P S ) a t 9.6~103 V/cm, m i l e a t 1 . 9 ~ 1 0 ~ V/cm non-disper-

sive f a s t component b e c m clearly caning out. The

tim a t the boundary between f a s t and slow c m U Q25 075 nents correspnded t o the t r a n s i t t k of high- a

mobility electrons. In fact, the electron mobility 0 0 2 04 06 08 10 estirmted had the sm mgnitude and tenp=rature

=)

a TlME ( m s ) dependence a s those of non-dispersive electrons

observed in thick s a p l e s (150-303

p

thick) (6)

.

The non-dispersive electron n-obility i n Ge-Se was GeO2SeoB (1.5 pm) a s high as 0.4-0.1 cm2fl.s a t R.T.:this value can

be compared w i t h those i n Q) a-Si. The height of 0 f a s t (Qf) and slow (Q,) camponents of the induced

charge increased as the applied f i e l d was raised. 0 02 0 4 06 08 1.0 Both 06 and Oc i n the s a m l e with thickness of TlME (ms) 1.6 @showedda tendency t o s a t m a t e a t high fiel+.Fig. l

by elec- For the f a s t conponent (non-dispersive electron in &-Se with different.

transport) the saturation of the induced charge ccanpositions.

a t high fields i s caused by the a r r i v a l of a l l injected electrons t o the opposite electrode.

Fram the analysis of Qf

-

E characteristics of the 1.6 p Geo.33Se0.66 sanple,the was obtained t o be p ~ = 1 . 5 The slow c m p n e n t did not s h w a kink in the induced charge signal o r the trans- i e n t current, indicating the characteristic feature of dispersive transport. Figure 2 shows vs. E relation f o r samples with different glass conpositions. i s not p r o p r t i o n a l but superlinear t o E. The values of the n-obility estimated fram the slope in the low f i e l d region are l i s t e d i n Table I. The mgnitude of the dispersive electron mobility is comparable t o those observed by P a i (71, a l t h o a he e s t i m t e d the mobility by a conventional e t h d . I n the case of hole transport, only the dis- persive s l m caqmnent was observed in the induced charge signal. The estimated

n-obility is given in Table I.

The mechanism concerning the coexistence of two kinds of electron transport is not conclusive yet, but possibilities are i n the following:

i ) Morphological inhamogeneity--When the sanple contains two regions of high and low mobilities such a s crystalline and mrphous regions o r segre- gation of glass conpasition, the induced charge can

W 2 have two ccmpcnents. However, fram x-ray diffrac-

Table I Drift nobility of dispersive

( 4 5pm) carriers (300 K) in Ge-Se

O o r 2 3 4 5 (Electron)

Gee.

2Seo. 2 . 3 ~ 1 6 ~ cn2/v. s E ( x ~ ~ 4 ~ / c m )

Fig. 2 Applied f i e l d dependence *0.35~0.65

of inverse t r a n s i t t* of slm (Ih31e) G e ~ . 3%0.7 7.4x10-~

electrons i n Ge-Se -0. 43e0. 6 1.7x10-~

(4)

e x p e r h t ,

GeSe). It has been k n m (7,8) that the addition of &l amount of branching atoms such as A s and Ge causes a remarkable redwtion of the electron mobility i n a-%.

I f there i s a nonuniform distribution of branching atoms, tsm kinds (fast and slow) of electrons can exist. However, the f a s t electrons observed has a much higher m b i l i t y (-10-I an2fl.s) than that of a-Se (6x10-3 m2fl.s). As seen in Fig. 1, a t the sarne applied f i e l d the f a s t capment becoms significant when the content is increased. This tenciency seems t o suggest the essential role of GeSeq mlecules.

meal segregation of structures wnsisting of GeSeq mlecules may responsible for high-mobility region, although the possibility of contribution of Ge-Ge bonds can not be s t i l l excluded. ii) Coexistence of different conduction mchanisns--- Electrcms can possess differentrmbilities depending on which energy levels electron w i l l d r i f t through. The appearance of two conpnents could be caused from conduc- tions a t conduction band tail (fast electron) and through gap states ( s l m electron).

Hawever, the activation energy (0.28 eV for Ge0.~%0.8) of the f a s t electron robil- i t y seem t o be t m large ccanpared w i I 5 the band t a i l extent (0.1 eV in Ge0.2*0.8 glass which was est-ted fram the optical energy gap (-1.9 eV) and the mobility gap (.v2 eV). There i s another plausible possibility of the presence of M kind5 of dominant electron traps a t 0.28 eV and deeper with broad distribution.

b) Hydrogenated a-Si.- GD a-Si f i w (4.5 )rm thick) were deposited on I T 0 glass sub- s t r a t e (250 K) using SiH4/H2 mixture. A conventional sputtering mthod was used t o prepare SP a-Si f i l m (1p thick) onto Sn02 coated glass substrate (220

oC)

using Si target and &/H2 mixture. The t o t a l gas pressure was l x l r 2 Torr and the hydrogen partial pressure w a s 7 A r 4 Torr.

GD and SP hydrogenated a-Si films did not show an indication of the coexistence of nm-dispersive and dispersive transport. I n GD a-Si films electrons showed rela- tively nm-dispersive transportwith R.T. imbility of 6x10-~ &/V-s a t 8 . 3 ~ 0 3 V/m.

This value can be ccarpared with those &served by LeCon&r e t al. (9) and Tiedje e t al.(10). bhen the applied field w a s changed, the t r a n s i t time shaved nonlinear change. As seen from Fig. 3, a t low temperatures the electron m b i l i t y increases, although weakly, with increasing applied field, while a t high temperatures the elec- tron mobility decreases with increasing applied field. This feature a t low tempera- ture i s similar t o that &served i n Ge-Se glasses. CXI the other hand, the condudion a t high temperatures is apparently similar t o that in crystalline materials, althou- gh the origin i s not clear a t present. The fact that the conduction miss varies wit!! the teqxrature range w a s also d-trated on the temperature dependence of the electron mobility as shmn i n Fig. 4. In the low tenperatme region the activa- t i m energy is 0.19 eV which i s canparable t o that reported so far (9) and may cor- respond t o the depth of electron traps. A t high tenpratures the slope beccnws reduced and the m b i l i t y tends t o saturate. In the tenperatme dependence measure- mt, it was found that the current waveform tends t o be dispersive as the terrpera- ture was l m r e d .

3---- -

A 3 2 3 K ELECTRON

= 298 K 2 8 8 K

Fig. 3 Applied field dependene of Fig. 4 Temperature dependence inverse transit tirre of electrons in of electron d r i f t mobility in

GD a-Si G9 a-Si

(5)

C4-586 JOURNAL DE PHYSIQUE

Holes i n Ca) a-Si shmed apparently dispersive transport. The log I ( t ) vs. log t curve gave the hole nobility of 2.4xl0-4

&/'V.s

a t R.T. and 8 . 4 ~ 0 3 V / m , which is much larger than those &served by Allan (2

-

7xl0-~ cm2/V-S) (11). However, the t r a n s i t tim was independent of the applied f i e l d up t o 1 . 5 A d V/m: this may sug- gest t h a t t h e transient current is dominated by non-exponential c a r r i e r recombination p r e s s rather than c a r r i e r transport.

In SP a-Si films, on the other hand, electrons and holes shcwed highly dispersive transport: even i n the log I ( t ) vs. log t curve the appearance of t h e kink was very weak. The electron nasbility was about 5 A r 5

d / V . s

a t R.T. and 5 x l d V/m. It was seen a t lm applied f i e l d s t h a t the t r a n s i t tirre is apparently independent of the applied f i e l d in a similar way t o the case of Q a-Si. The temperature dependence of the t r a n s i t tim in the temperature range from 325 t o 405 K gave its activation energy t o be 0.3 eV.

The hole m b i l i t y i n SP a-Si f i l m was 2

-

4x10-5 cm2/V-S which can be cohnpared

with the observation i n GD a-Si (11). Hawever, the activation energy of 0.2 eV cletembed f r m the t-rature dependence of the transit t i r r e was much s m l l e r than t h a t observed in Q a-Si (0.45 eV) (11). The similarity of the hole n o b i l i t i e s between in SP and Gh) a-Si films -lies t h a t the distribution of gap states near the valence band i s not s a t i s f a c t o r i l y inproved by hydrogenation.

S-.- We have d m n s t r a t e d the coexistence of non-dispersive ( f a s t ) and disper- sive (slcw) electrons i n evaporated Ge-Se glasses. P o s s i b i l i t i e s responsible f o r the ccexistence are discussed. The non-dispersive f a s t electrons has the roomtenpe- rature m b i l i t y as high a s 0.5

&/v.s

being comparable with t h a t of GD a-Si.

In hydrogenated a-Si, only electrons in Q f i l m show the non-dispersive nature.

The coexistence of non-dispersive and dispersive transport is not observed. Holes i n Q) a-Si show apparently dispersive transport, but the position of the kink i n log I ( t ) vs. log t p l o t is rather independent of the applied field. The reconbina- tion process seem t o be dominant over the transport process. I n SP a-Si films, hiqhly dispersive transport i s observed f o r both electrons and holes.

The authors are much grateful t o Prof. H.Harrakawa of @aka University and Prof.

S.Nitta of Gifu University f o r their kind supply of Q a-Si sanples.

References

1) Scher H. and B n t r o l l E.W., Phys. Rev. (1975) 2455.

2) Pollak M - , Phil. Mag.

36

(1977) 1157.

3) Marshall J.M., Phil. Mag. 36 (1977) 959, 4) Sdmidlin F.W., Phys. ~ e v . - s (1977) 2362.

5) Kim G.I., Shirafuji J. and Inuishi Y., Tech. Rep. @aka Univ. 28 (1978) 111.

6) Kim G.I., Shirafuji J. md Inuishi Y., Jpn. J. Appl. Phys.

17

n 9 7 8 ) 1789.

7) Pai D.M., Proc. 5th Intern. Conf. &mmhous and Liauid Semiconductors.

Garmischl~artenkirchen (1974) p. 355.

8) Schottmiller J., Tabak M.D.

,

Lucovsky G. and Ward A., J. Non-Cryst. solids

4

(1970) 80.

9) LeComber P.G., Madan A. and Spear W.E., J. Non-Cryst. Solids

11

(1972) 219.

10) Tiedje T., Abeles B., More1 D.L., Moustakas T.D. and Lmnski C.R., Appl. Phys.

Letters 36 (1980) 695.

11) Allan ~ . , ~ h i l . Mag.

B38

(1978) 381.

Références

Documents relatifs

We discuss the influence of various parameters of preparation (hydrogen pressure, tungsten tube temperature, substrate temperature, annealing...) on electrical properties

L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des

Introduction.- The master equation approach combined with analyti- cal techniques and approximation schemes borrowed from the tight-bin- ding formalism (renormalized

L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des

Vacuum annealing of freshly prcpared Pd, Pt, and A u Schottky diodes to -200°C changes the structure of interfaces by forming crystalline Pd,Si, both

A slow bimolecular recombination from extended electron states dominates the final recombination of those photoexcited electrons that survive any fast initial (ti0.l vs)

L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des

Figure 2: Experimental values of hydrogen spin-lattice relaxation times ( T I ) as a function of temperature are shown for both glow discharge (filled circles) and