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HAL Id: jpa-00229980

https://hal.archives-ouvertes.fr/jpa-00229980

Submitted on 1 Jan 1989

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ATOM - PROBE ANALYSIS OF YBa2 Cu3 O7-x - SINGLE CRYSTALS

M. Leisch, M. Eisl, E. Schweiger, G. Leising

To cite this version:

M. Leisch, M. Eisl, E. Schweiger, G. Leising. ATOM - PROBE ANALYSIS OF YBa2 Cu3 O7-x - SINGLE CRYSTALS. Journal de Physique Colloques, 1989, 50 (C8), pp.C8-481-C8-486.

�10.1051/jphyscol:1989882�. �jpa-00229980�

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COLLOQUE DE PHYSIQUE

Colloque C8, Supplément au noll, Tome 50, novembre 1989

ATOM

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PROBE ANALYSIS OF YBa,Cu,O,-,

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SINGLE CRYSTALS

M. LEXSCH, M. EXSL, E. SCHWEIGER and G . LEISING

Institut fiir Festkorperphysik, University of Technology Graz Petersgasse 16, A-8010 Graz, Austria

Résumé

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Des e x p é r i m e n t a t i o n s s u p p l é m e n t a i r e s à l ' a i d e d e s p e c t r o m è t r e s d ' i o n d e champ o n t été e f f e c t u é e s p o u r c a r a c t é r i s e r e t o p t i m i s e r l e s c o n d i t i o n s d e p r é p a r a t i o n d e s m o n o c r i s t a u x YBa2Cu307-x. L ' a n a l y s e d e p r o f i l e n p r o f o n d e u r d e p e t i t e s a i g u i l l e s d é t a c h é e s d é m o n t r e d e s f l u c t u a t i o n s d i s t i n c t e s d e s c o n c e n t r a t i o n s d e s é l é m e n t s p r i n c i p a u x l e s q u e l l e s s o n t en r a p p o r t a v e c l a s t r u c t u r e s t r a t i f i é e d e l a m a t i è r e . La c o m p o s i t i o n d é t e r m i n é e p a r d e e x p é r i e n c e s e s t e n c o n c o r d a n c e a v e c l a p h y s e 1 : 2 : 3 q u i é t a i t

e s c o m p t é e . Des t r a c e s d e f o n d a n t s u t i l i s é s d e p l u s d a n s l a c u l t u r e du c r i s t a l , t e l q u e PbC12, p e u v e n t ê t r e d é t e c t é e s p r è s d e l a s u r f a c e .

A b s t r a c t - Complementary atom-probe measurements h a v e been c a r r i e d o.ut t o c h a r a c t e r i z e and t o o p t i m i z e t h e p r e p a r a t i o n c o n d i t i o n s o f YBa2Cu307-x

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s i n g l e c r y s t a l s . The d e p t h p r o f i l i n g a n a l y s i s o f c l e a v e d o f f s m a l l n e e d l e s shows d i s t i n c t f l u c t u a t i o n s o f t h e main components c o n n e c t e d t o t h e l a y e r s t r u c t u r e o f t h e m a t e r i a l . The b u l k c o m p o s i t i o n a s d e t e r m i n e d f r o m atom-probe s p e c t r a i s g e n e r a l l y i n a g r e e m e n t w i t h t h e e x p e c t e d 1 : 2 : 3 p h a s e . A d d i t i o n a l l y u s e d f l u x media i n t h e growth p r o c e d u r e l i k e PbCl c a n b e f o u n d 2 embedded i n n e a r s u r f a c e l a y e r s .

1

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INTRODUCTION

S i n c e t h e d i s c o v e r y o f one o f t h e most t h o r o u g h l y i n v e s t i g a t e d h i g h t e m p e r a t u r e s u p e r c o n d u c - t o r m a t e r i a l YBa2Cu307-x (O<x<l) /1/ it was r e a l i z e d t h a t it is r e m a r k a b l y e a s y t o p r e p a r e c e r a m i c s a m p l e s w i t h t r a n s i t i o n t e m p e r a t u r e s above 9 0 K. I n c o n t r a s t , it i s much more d i f f i - c u l t t o p r o d u c e s i n g l e c r y s t a l s 1 2 1 . N e v e r t h e l e s s , s i n g l e c r y s t a l s w i t h s u i t a b l e d i m e n s i o n s f o r t r a n s p o r t , m a g n e t i c and o p t i c a l measurements a r e o f b a s i c i n t e r e s t . The p r o b l e m s i n c r y s t a l growth o f YBa2Cu307-x a r e b a s e d on i t s l i m i t e d t h e r m a l a n d c h e m i c a l s t a b i l i t y and on its low s o l u b i l i t y i n a p p r o p r i a t e f l u x media. I n i t i a l growth e x p e r i m e n t s were performed from a melt o f t h e p s e u d o t e r n a r y s y s t e m CuO-BaCu02-YBa2Cu307

.

A p p r o p r i a t e amounts o f t h e com- p o n e n t s were g r o u n d e d , p e l l e t i z e d and m e l t e d i n a l u m i n a c r u c i b l e s , l i n e d by g o l d s h e e t s . U s i n g t h e w e t t i n g and c r e e p i n g o f t h e m e l t on t h e g o l d s u r f a c e , p l a t e l i k e c r y s t a l s up t o a d i m e n s i o n o f 1 x l x O . l mm c a n b e f o u n d i n t h e g a p s between t h e m e t a l s h e e t s 131. The p r e v i o u s c h a r a c t e r i z a t i o n o f t h e o b t a i n e d c r y s t a l s h a s been done by e l e c t r o n m i c r o p r o b e a n a l y s i s , X-ray d i f f r a c t i o n and by t r a n s p o r t measurements. P r e l i m i n a r y atom-probe f i e l d - i o n m i c r o s - copie i n v e s t i g a t i o n s p e r f o r m e d on h i g h t e m p e r a t u r e s u p e r c o n d u c t o r s were s u c c e s s f u l i n a p p l y i n g t h e t e c h n i q u e t o t h e s e new m a t e r i a l 14-71. To o b t a i n a d d i t i o n a l i n f o r m a t i o n a b o u t m i c r o c o r n p o s i t i o n and t o h e l p t o o p t i m i z e t h e p r e p a r a t i o n c o n d i t i o n s complementary atom- p r o b e s t u d i e s h a v e been c a r r i e d o u t .

Article published online by EDP Sciences and available at http://dx.doi.org/10.1051/jphyscol:1989882

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2

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EXPERIMENTAL

The s t a r t i n g p o i n t i n t h e s a m p l e p r e p a r a t i o n h a s been a p r e s e l e c t i o n o f s u i t a b l e c r y s t a l s f r o m p a r t s o f t h e c h a r g e a s removed f r o m t h e c r u c i b l e . A t y p i c a l a r r a n g e m e n t o f t h e p l a t e l i k e c r y s t a l s a s grown i n t h e c a v i t i e s c a n b e s e e n i n t h e e l e c t r o n m i c r o g r a p h i n f i g . 1 . The com- p o s i t i o n o f t h e c r y s t a l s h a s been c h e c k e d by e l e c t r o n m i c r o p r o b e a n a l y s i s . The Y:Ba:Cu r a t i o s w e r e 1 : 2 : 3 i n e a c h c r y s t a l w i t h i n t h e a c c u r a c y o f t h e e l e c t r o n m l c r o p r o b e measurement. The rest o f t h e melt e . g . i n t h e c o r n e r s o f t h e m i c r o g r a p h c o n t a i n s m a i n l y CuO.

F i g . 1

-

S c a n n i n g e l e c t r o n m i c r o g r a p h o f YBa2Cu307-x s i n g l e c r y s t a l s a s grown from t h e melt

S e l e c t e d c r y s t a l s h a v e been removed c a r e f u l l y . I n o r d e r t o p r o v e t h e q u a l i t y o f t h e s i n g l e c r y s t a l s t h e y a r e i n v e s t i g a t e d by X-ray d i f f r a c t i o n i n t h e Laue geometry. F i g . 2 shows t h e Laue d i f f r a c t i o n p a t t e r n o f a s a m p l e i n t r a n s m i s s i o n mode w i t h t h e beam p a r a l l e l t o t h e

F i g . 2

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Laue d i f f r a c t i o n p a t t e r n o f a YBa Cu 0 s i n g l e c r y s t a l , beam p a r a l l e l 0 0 1 - d i r e c t i o n . 2 3 7-x

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The s h a r p n e s s o f t h e s p o t s i s a measure f o r f l u c t u a t i o n s o f t h e o r i e n t a t i o n o f subdomains.

T h e s e a r e o b v i o u s l y s m a l l a s c a n b e s e e n i n F i g . 2 and it c o n f i r m s t h e good q u a l i t y o f t h e s i n g l e c r y s t a l .

The s p e c i m e n s f o r t h e f i e l d i o n mass s p e c t r o m e t r i c a n a l y s i s were p r e p a r e d by m e c h a n i c a l means by s e l e c t i n g s u i t a b l e f r a g m e n t s which were c l e a v e d o f f f r o m t h e d i f f e r e n t s i n g l e c r y s t a l s . N e e d l e l i k e f r a g m e n t s were mounted on b l u n t n i c k e l t i p s w i t h a c o n d u c t i n g , s i l v e r c o n t a i n i n g epoxy r e s i n /8/. T h i s was done u n d e r a s t e r e o l i g h t m i c r o s c o p e u s i n g a m i c r o m a n i p u l a t o r . The

f i n a l a l i g n m e n t o f t h e mounted t i p s was a c h i e v e d by b e n d i n g t h e n i c k e l s u p p o r t n e e d l e i n a s u i t a b l e way.

F o r t u n a t e l y most o f t h e n e e d l e l i k e f r a g m e n t s from t h e YBa2Cu307-x s i n g l e c r y s t a l s c a n b e k s e d d i r e c t l y f o r t h e atom-probe a n a l y s i s w i t h o u t f u r t h e r e l e c t r o p o l i s h i n g . F o r comparison a few t i p s were a d d i t i o n a l l y e t c h e d i n a commonly u s e d e l e c t r o l y t e c o n t a i n i n g p e r c h l o r i c a c i d d i - l u t e d i n e t h y l e n e g l y c o l - m o n o b u t y l e t h e r . The a n a l y s e s were c a r r i e d o u t i n a p u l s e d v o l t a g e TOF atom-probe w i t h a n e l e c t r o s t a t i c s e c t o r (163') and e q u i p p e d w i t h a vacuum l o c k f o r f a s t c h a n g e o f t h e s p e c i m e n s . F o r f i e l d i o n i m a g i n g a c h a n n e l p l a t e s c r e e n a s s e m b l y c a n b e f l i p p e d i n f r o n t o f t h e t i p . Hereby o r i e n t a t i o n and q u a l i t y o f t h e t i p s c a n b e checked.

3 - RESULTS AND DISCUSSION

A u n i f o r m f i e l d e v a p o r a t i o n b e h a v i o u r c a n b e o b s e r v e d which makes it p o s s i b l e t o - a n a l y z e t h e m a t e r i a l w i t h a p u l s e d v o l t a g e atom-probe s p e c t r o m e t e r . The s p e c i m e n s have been k e p t a t l i q u i d n i t r o g e n c a m p e r a t u r e and p u l s e - d c r a t i o s above 0 . 1 5 h a v e been u s e d . Only a few c l u s t e r i o n s h a v e been o b s e r v e d . An atom-probe mass s p e c t r u m from one o f t h e s i n g l e c r y s t a l f r a g m e n t s i s shown i n F i g . 3 . I n t h e s p e c t r u m s i g n a l s c o r r e s p o n d i n g t o a t o m i c and m o l e c u l a r oxygen, c o p p e r , b a r i u m , y t t r i u m and o x i d e s o f c o p p e r and y t t r i u m c a n b e o b s e r v e d . T h i s s p e c t r u m h a s been ob- t a i n e d a f t e r r e m o v a l o f more t h a n 2 0 a t o m i c l a y e r s and s h o u l d b e r e p r e s e n t a t i v e f o r t h e b u l k . The e l e m e n t a l c o n c e n t r a t i o n s c a l c u l a t e d f r o m a t l e a s t 2000 i o n s a r e i n good a g r e e m e n t w i t h t h e c o r r e c t e d r e s u l t s from e l e c t r o n m i c r o p r o b e measurements a s w e l l w i t h t h e known s t o i c h i o - m e t r v

.

160

Ions

120

Mass

Camul

f i g . 3 - Atom-probe mass s p e c t r u m from a YBa2Cu307-x - s i n g l e c r y s t a l s a m p l e a f t e r r e m o v a l o f more t h a n 20 s u r f a c e l a y e r s , o r i e n t a t i o n o f t h e specimen p a r a l l e l t o c - a x i s .

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The s p e c t r u m a l s o c o n t a i n s a r a t h e r l a r g e peak a t M/n-28. We assume t h a t t h i s peak c o r r e s p o n d s t o CO. B e s i d e s h y d r o g e n , CO i s a main component o f t h e r e s i d u a l g a s i n t h e baked vacuum v e s s e l . From ramped f i e l d d e s o r p t i o n s t u d i e s /9/ we know, t h a t a t a f i e l d o f a b o u t 2 0 V/nm t h e g a s s u p p l y o f t h e t i p w i t h CO i s enhanced a b o u t a f a c t o r o f 2 0 . The c u t - o f f f i e l d (enhancement=l) h a s been o b s e r v e d a t a n e l e c t r i c f i e l d o f a b o u t 3 0 V/nm. The d c - f i e l d d u r i n g o u r a n a l y s i s was t y p i c a l l y k e p t a t 20 V/nm, t h a t means s t r o n g l y enhanced CO-supply o c c u r s . The c u t - o f f f i e l d f o r CO ( 3 0 V/nm) l i e s n o t i c e a b l y above t h e e v a p o r a t i o n f i e l d o f t h e s u p e r c o n d u c t i n g m a t e r i a l which h a s been o b s e r v e d a t 23-24 V/nm. A s i g n i f i c a n t r e d u c t i o n o f t h e CO c o n c e n t r a t i o n . i n t h e s p e c t r a can be o b t a i n e d when t h e a n a l y s i s i s done above t h e b o i l i n g p o i n t o f CO a c c o r d i n g t o t h e s t u d i e s of G. Zaharchuk e t . a l .

/ l o / .

I n n e a r s u r f a c e l a y e r s a l s o OH and H 2 0 c a n b e de- t e c t e d , p r o b a b l y b e c a u s e o f t h e h y g r o s c o p i c b e h a v i o u r o f t h i s m a t e r i a l . On e t c h e d s p e c i m e n s t h e s e s i g n a l s h a v e n o t been o b s e r v e d . A d d i t i o n a l l y , it 1s n o t e a s y t o g e t a c l e a r s e p a r a t i o n between m o l e c u l a r oxygen a n d d o u b l y c h a r g e d c o p p e r i s o t o p e i o n s , e n v e l o p i n g t h e oxygen s i g n a l . I n f u r t h e r d e p t h p r o f i l i n g a n a l y s i s we f o c u s s e d on t h e s t u d y o f t h e l o c a l c o n c e n t r a t i o n s o f y t t r i u m and barium. The c o n c e n t r a t i o n p r o f i l e s o f t h e m e t a l i o n s show d i s t i n c t f l u c t u a t i o n s which a r e o b v i o u s l y c o n n e c t e d t o t h e l a y e r s t r u c t u r e o f t h e m a t e r i a l . A good example o f t h i s i s t h e a u t o c o r r e l a t i o n - p l o t o f t h e r a t i o Ba:(Y

+

B a ) , which i s d e p i c t e d i n F i g . 4 .

Correlation Length

F i g . 4

-

A u t o c o r r e l a t i o n o f t h e r a t i o Ba:(Y + B a ) ; c a l c u l a t e d f r o m t h e d e p t h p r o f i l e o b t a i n e d f r o m t h e same specimen from which t h e mass s p e c t r u m is p l o t t e d i n F i g . 3 . ( c - o r i e n t a t i o n )

The a c t u a l number o f l a y e r s e v a p o r a t e d i s o b t a i n e d from t h e c e r t a i n s t e p s which o c c u r i n t h e o n l i n e

-

p l o t o f d e t e c t e d i o n s v e r s u s a c t u a t e d d e s o r p t i o n p u l s e s d u e t o t h e p i l e up e f f e c t . The s e p a r a t i o n o f t h e maxima i n t h e c o n c e n t r a t i o n o f y t t r i u m i s found between 5 t o 7 l a y e r s which i s on t h e a v e r a g e i n n i c e a g r e e m e n t w i t h t h e a c t u a l 6 l a y e r s i n t h e l a t t i c e .

I n a c r y s t a l l o g r a p h i c d e s c r i p t i o n o f p h a s e s i n Y-Ba-Cu-0 s u p e r c o n d u c t o r s , t h e e x i s t e n c e o f an o r t h o r h o m b i c p h a s e o f Y BaCu05 h a s been p r o v e d by Hazen e t . a l . /11/. T h i s s o c a l l e d g r e e n ~ h a s e 2 i s d i s p e r s e d between t h e g r a i n s o f t h e 1 : 2 : 3 p h a s e i n a r a t i o o f a b o u t 1 : 3 i n t h e i r s a m p l e . S t r i k i n g i s t h e v e r y l i t t l e d i f f e r e n c e i n t h e l a t t i c e c o n s t a n t s . F o r t h e 2 : l : l p h a s e ( g r e e n p h a s e ) a = 3 . 8 5 9

8 ,

c = 3 . 9 0 4

1,

(3xc=11.712

1)

/11/. F o r t h e 1 : 2 : 3 p h a s e a = 3 . 8 8

1,

b=3.82

1

and

c = 1 1 . 6 6

1

1 1 2 1 . A s a l r e a d y n o t i c e d a b o v e , a 1 : 2 : 3 c o m p o s i t i o n o f t h e s i n g l e c r y s t a l s h a s been o b s e r v e d by e l e c t r o n m i c r o p r o b e measurements. I n t h e t r a n s m i s s i o n e l e c t r o n m i c r o s c o p e some- t i m e s v e r y s m a l l l a m i n a - l i k e subdomains w i t h d i f f e r e n t c o n t r a s t c a n be o b s e r v e d . The t h i c k n e s s h a s been e s t i m a t e d t o b e below 1 0 nm, a s c a l e which s t i m u l a t e s t o p e r f o r m atom-probe measure- m e n t s . I n F i g . 5 a t y p i c a l d e p t h p r o f i l e of a c l e a v e d o f f f r a g m e n t from a YBa 2 Cu 3 0 7-x c r y s t a l i s shown. F o r s i m p l i c i t y o n l y t h e r a t i o o f Ba:(Y+Ba) i s p l o t t e d . The two d o t t e d l i n e s c o r r e s p o n d t o t h e 2 : 1 : 1 - and t h e 1 : 2 : 3 - p h a s e . Most o f t h e a n a l y z e d f r a g m e n t s a m p l e s show t h e same be- h a v i o u r

.

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T o t a l

number o f i o n s

F i g . 5 - R a t i o o f Ba:(Y+Ba) v e r s u s d e p t h , a p p r o x i m a t e l y 1 0 0 i o n s c o r r e s p o n d t o a d e p t h o f o n e a t o m i c l a y e r . D o t t e d l i n e s i n d i c a t e t h e 1 : 2 : 3 and 2 : l : l p h a s e s .

I n a s u r f a c e r e g i o n o f a p p r o x i m a t e l y 1 0 t o 20 a t o m i c l a y e r s i n d e p t h , t h e measured c o n c e n t r a - t i o n s a r e c l o s e r t o t h e c o m p o s i t i o n o f t h e Y2BaCu05 - p h a s e . A f t e r r e m o v a l o f a b o u t 20 a t o m i c l a y e r s g e n e r a l l y t h e c o m p o s i t i o n c o r r e s p o n d i n g t o t h e 1 : 2 : 3 - p h a s e a s d e t e r m i n e d by t h e p r e - v i o u s EDAX measurements i s o b t a i n e d . E x c e p t i n g one s a m p l e , on t h i s specimen b o t h p h a s e s c a n be f o u n d i n c o e x i s t e n c e o v e r t h e whole d e p t h . The p h a s e boundary was s i t u a t e d i n a x i s i n t h e cen- t r e o f t h e t i p . By t u r n i n g t h e t i p b o t h p h a s e s can be p r o b e d one a f t e r a n o t h e r . We assume t h a t o u r way o f specimen p r e p a r a t i o n i s s e l e c t i v e i n a s p e c i a l manner. If a s m a l l subdomain i s embedded i n t h e c r y s t a l , d u e t o t h e l i t t l e d i f f e r e n c e Sn t h e l a t t i c e p a r a m e t e r s an i n t e r n a l s t r e s s w i l l r e s u l t . By t r y i n g t o c l e a v e t h e c r y s t a l , a f r a c t u r e w i l l o b v i o u s l y happen w i t h a h l g h p r o b a b i l i t y a t t h e p h a s e b o u n d a r i e s . T h i s would e x p l a i n t h e atom-probe r e s u l t s o b t a i n e d .

I n o r d e r t o improve t h e c o n d i t i o n s f o r c r y s t a l growth PbCl h a s been added t o t h e m e l t t o a c t 2

a s f l u x medium. Hereby t h e q u e s t i o n a r i s e s t o what e x t e n d p a r t s from t h e f l u x medium w i l l b e p r e s e n t i n t h e c r y s t a l .

Ions

T o t a l

number o f i o n s

F i g . 6 - C o n c e n t r a t i o n p r o f i l e o f C1 and Ba f o r a s a m p l e o f a YBa2Cu307-x c r y s t a l , grown from a m e l t c o n t a i n i n g PbCl a s f l u x medium (200 i o n s p e r d a t a p o i n t ) .

2

(7)

On crystal samples grown with PbC12 added, chlorine can be found in the atom probe spectra. The concentration profile for C1 and Ba is plotted in Fig.6. The concentrations of copper and yttrium show no significant variations. It should be noticed that in contrast to the profile in Fig.5 the

Y -

concentration does not vary versus depth. After removal of about 20 atomic layers the chlorine signals disappear completely in the spectra. The overall composition of this particular specimen as measured agrees more with the 2:l:l - phase. Unsolved is the question on which lattice sites the C1-ions are sitting. The sites of Ba seem to be very un- likely because of the different electronic structure of these two elements. Other samples of the same charge show strong clustering during field evaporation. From the few samples in- vestigated an improvement in crystal quality due to the added flux medium cannot be found.

4

-

CONCLUSION

In the atom probe depth profiling analysis a second phase in the form of small laminas with a thickness of about 5nm and with a composition very similar to Y2BaCu05 has been found in YBa2Cu307-x crystals, grown from a pseudoternary melt. After addition of PbC12 as flux medium to the melt, C1 has been observed in near surface layers of cleaved off fragments, accompanied by a depletion of barium.

ACKNOWLEDGEMENTS

We would like to thank Dr.P.Golob and Dr.P.Polt (Forschungsinstitut fur Elektronenmikroskopie) for help with the EDAX-measurements and for TEM - imaging and Kristine Roth for providing the X-ray studies. This work was supported by the "Fonds zur Forderung der wissenschaftlichen Forschung" project number P7065.

REFERENCES

Wu,M.K.,Ashburn,J.R.,Torney,C.J.,Hor,P.H.,Meng,R.L.GaoL.,uang,ZJ,Wang,Q. and Chu,C.W.

Phys.Rev.Lett. =(1987)908

Kaiser,O.L.,Holtzberg,F.,Scott,B.A. and McGuire,T.R., Appl.Phys.Lett. 51(1987)1040 Schweiger, E., Leising, G., ~ o t h , K.

,

L e i t n e r , K a h e t H . and Polt ,P.

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Proc. E-MRS 1988 fall meeting,Strasbourg, will be published in J.Less Common Met.

Nishikawa,O. and Nagai,M., Phys.Rev. 6 - 37(1988)3685

Kellogg,G.L. and Brenner,S.S., Appl.Phys.Lett. g(1987)1851

Cerezo,A.,Grovenor,C.R.M.,Hoyle,R.M. and Smith,G.D.W., Appl.Phys.Lett. 52(1988)1020 Melmed,A.J.,Shull,R.D.,Chiang,C.K. and Fowler,H.A., Science %(1988)176

Melmed,A.J., J. de Physique 4 9 4 6 Supp1.11(1988)67 Rendulic,K.O. and Leisch,M., Surface Sci. E(1980)l

/lo/ Zaharchuk,G.,Alvensleben,L.v.,Oehring,M.,and Haasen,P., J.de Physique g - C 6 Suppl.ll(1988) p. 471

/11/ Hazen, R.M., Finger, L.W. ,Angel, R. J. ,Prewitt

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C.T

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,Ross ,N. L. ,Ma0 ,H. K. ,Hadidiacos ,C.G. ,HOT ,P . H . , Meng,R.L. and Chu,C.W., Phys.Rev.B E(1987)7238

1121 Ishirawa,Y.,Fukuhaga,O.,Nozaki,H. and Tanaka,T., Japan J. Appl. Phys. Lett. E(1987)L676

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