Développement et caractérisation de procédés de gravure plasma de T.S.V (Through Silicon Via) pour l'intégration tridimensionnelle de circuits intégrés

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Submitted on 8 Jan 2013

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Développement et caractérisation de procédés de

gravure plasma de T.S.V (Through Silicon Via) pour

l’intégration tridimensionnelle de circuits intégrés

Sébastien Avertin

To cite this version:

Sébastien Avertin. Développement et caractérisation de procédés de gravure plasma de T.S.V (Through Silicon Via) pour l’intégration tridimensionnelle de circuits intégrés. Autre. Université de Grenoble, 2012. Français. �NNT : 2012GRENT029�. �tel-00771420�

THÈSE

Pour obtenir le grade de

DOCTEUR DE L’UNIVERSITÉ DE GRENOBLE

Spécialité : Nanoélectronique / Nanotechnologies

Arrêté ministériel : 7 août 2006

Présentée par

Sébastien AVERTIN

Thèse dirigée par Olivier Joubert

et codirigé par Erwine Pargon, François Leverd

préparée au sein du Laboratoire des Technologies de la Microélectronique (UMR-5129) et de la société

STMicroelectronics

dans l'École Doctorale Electronique, Electrotechnique, Automatique & Traitement du Signal

Développement et

caractérisation de procédés de

gravure plasma de T.S.V

(Through Silicon Via) pour

l’Intégration Tridimensionnelle

de Circuits Intégrés

Thèse soutenue publiquement le 12 Juillet 2012, devant le jury composé de :

M. René-Louis Inglebert

Professeur à l’Université de Grenoble, (Président) M. Rémi Dussart

Maitre de Conférences à l’Université d’Orléans (GREMI), Rapporteur M. Ahmed Rhallabi

Professeur à l’Université de Nantes (IMN), Rapporteur M. Olivier Joubert

Directeur de Recherche à Grenoble (CNRS-LTM), Directeur de thèse Mlle Erwine Pargon

Chargée de Recherche à Grenoble (CNRS-LTM), Co-Encadrant M. François Leverd

Ingénieur à Crolles (STMicroelectronics), Co-Encadrant M. Ferdinand Bell

Ingénieur à Munich (Lantiq), Invité M. Thierry Chevolleau

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1 _{Flip-Chip : technique de report de puce électronique sur un substrat de packaging par collage face à face à}

l’aide de billes métalliques (« micro-bumps »).

2

24

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3 _{SRAM : « Static Random Access Memory »} 4 _{DRAM : « Dynamic Random Access Memory »} 5