CVD MODIFICATION OF CERAMIC MEMBRANES : SIMULATION AND PRELIMINARY RESULTS

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Submitted on 1 Jan 1989

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CVD MODIFICATION OF CERAMIC MEMBRANES : SIMULATION AND PRELIMINARY RESULTS

Y. Lin, K.J de Vries, A. Burggaaf

To cite this version:

Y. Lin, K.J de Vries, A. Burggaaf. CVD MODIFICATION OF CERAMIC MEMBRANES : SIMU-

LATION AND PRELIMINARY RESULTS. Journal de Physique Colloques, 1989, 50 (C5), pp.C5-91-

C5-91. �10.1051/jphyscol:1989514�. �jpa-00229537�

JOURNAL DE PHYSIQUE

Colloque C5, suppl6ment au n05, Tome 50, mai 1989

CVD MODIFICATION OF CERAMIC MEMBRANES : SIMULATION AND PRELIMINARY RESULTS

Y.S. LIN, K.J. DE VRIES and A.J. BURGGRAAF

Laboratory of Inorganic Chemistry, Materials Science and Catalysis, Department of Chemical Technology, University of m e n t e , NL-7500 AE Enschede, The Netherlands

(recent news)

W i t h the unique characteristics in thermal and structural stability, resistance toward chemical and microbiological attack, and ability t o be backflushed, steam sterilized or autoclaved, membranes made from inorganic materials such as ceramics have long been proposed for the liquid and gas separation. The porous inorganic membranes can be prepared in many ways, depending on the materials, membrane and support structure, porosity and membrane thickness. It is difficult, however, to use the available methods for the preparation of the thin porous ceramic membranes with any desired pore size. We present here a unique CVD technique for the preparation of ceramic membranes having a controlled pore size. In this modiEied CVD technique, two reactants (e.g., metal chloride and water) are respectively introduced from two sides of the porous membrane substrate and t h e solid product i . e . metal oxide) is deposited on the internal wall of the substrate pores. With the proper selection of the reaction system, substrate structure and experimental conditions, the

Article published online by EDP Sciences and available at http://dx.doi.org/10.1051/jphyscol:1989514