HAL Id: hal-01955656
https://hal.laas.fr/hal-01955656
Submitted on 8 Jan 2019
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superjunction power devices
Sylvain Noblecourt, Frédéric Morancho, Karine Isoird, Patrick Austin, Josiane Tasselli
To cite this version:
Sylvain Noblecourt, Frédéric Morancho, Karine Isoird, Patrick Austin, Josiane Tasselli. Design op-
timisation of the deep trench termination for superjunction power devices. International Journal
of Microelectronics and Computer Science, Department of Microelectronics and Computer Science
(DMCS) of Technical University of Łódź, 2015, 6 (4), pp.117-123. �hal-01955656�
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