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Correlated Istand Nucleation in Layer-by-Layer Growth
E. Somfai, D. Wolf, J. Kertész
To cite this version:
E. Somfai, D. Wolf, J. Kertész. Correlated Istand Nucleation in Layer-by-Layer Growth. Journal de
Physique I, EDP Sciences, 1996, 6 (3), pp.393-401. �10.1051/jp1:1996164�. �jpa-00247192�
Correlated Island Nucleation in Layer-by-Layer Growth
E. Somfai (*),
D.E.Wolf (**) and J. Kertész (***)
Theoretische
Physik,
FB 10, Gerhard Mercator Universitàt, 47048Duisburg, Germany
(Received
20 October 1§95, received in final form andaccepted
9 November1§95)
PACS.68.55.Bd Molecular and atomic beam
epitaxy
PACS.05.40.+j
Fluctuationphenomena,
random processes, and Brownian motion PACS.05.70.LnNonequihbrium thermodynamics,
irreversible processesAbstract.
Temporal
correlations of nucleation events inlayer-by-layer growth
are studiedby simulating
a one dimensional model. In order to focus on fluctuations due to the nucle- ation process,deposition
and diffusion are treated deterministically. The correlationsdecay algebraically
with effective exponentsdepending
on the order of the nucleations ina
layer.
The autocorrelation function of ail nucleation eventsdecays
as t~~'~~ with time t. In spite of thesecorrelations,
thecorresponding
randomness in thegrowth
process does not lead to arough-
emng of the surface. The reason is that stochastic nucleation
imphes only
conserved current fluctuations.1. Introduction
Recently
there has beenincreasing
interest in nanostructured thin filmsproduced
e-g-by
molecular beam
epitaxy (MBE) [1-4].
In this context a better theoreticalunderstanding
oflayer-by-layer growth
ishighly
desirable. Thistype
ofgrowth proceeds by
nucleation of two- dimensionalislands,
theirgrowth
and coalescenceleading
to thecompletion
of a new atomiclayer
of the film. Whereasspatial
correlations among these islands within alayer
areessentially
understood
(see
Ref. [5] and referencestherein),
we address here thequestion
to what extent the nudeation ofsubsequent layers
remains correlated with the first one. This allows to estimate how manylayers
one can grow withoutwashing
out trie initial nucleationpattem.
In MBE atoms are
deposited
onto a substrate. Inlayer-by-layer growth they
diffuse untilthey
either stick to theedge
of a stable twodimensional island or meet with other adatoms to form a new nudeus of such an island. The existence oftemporal
correlations is veryplausible
for
high symmetry
surfaces: the first nucleation event of a newlayer
ishkely
tohappen
close to the one m theprevious layer,
because thecorresponding
island grows ahead of the otherones and
provides
thelargest
area withouttraps
for adatoms in the nextlayer.
The aim of this paper is tostudy
the character of these correlations.(*) Department
of AtomicPhysics,
EôtvôsUniversity,
Puskin u 5-7, 1088Budapest, Hungary
Present address: Randall Lab. of
Physics,
Univ. ofMichigan,
AnnArbor,
MI 48109-1120, USA(**)
Author forcorrespondence: HLRZ,
KFAJülich,
52425 Jühch,Germany;
e-mail:
d.wolf©kfa-juelich.de
(***) Institute of
Physics,
TechnicalUniversity
ofBudapest,
Budafoki ùt 8, H-llllBudapest, Hungary
Q
LesÉditions
dePhysique
1996394 JOURNAL DE PHYSIQUE I N°3
.----~----~----~-~--,
A A B
Fig.
l. Cells A and B are sinks foradatoms,
I.e. on trie time scale /ht ail adatoms within them will condense to the Islandedges
which exist somewhere in them. Herem has the meanmg of condensed materai
(shaded)
on top ofcompleted
layers, and the adatomdensity
ih= 0. In ail other cells
m = flà.
Cells A were invaded
by
theedges
of agrowing Island,
in B a nucleation event hashappened.
Ail cells, mdicatedby
the dashed fines, are of width /h~ andheight
1(in
units of the atomic latticeconstant).
It is an
experimental
fact thatloyer-by-loyer growth
con be sustained for hundreds ofloyers,
if the
growth
conditions arecarefully
chosen[6].
Inparticular
a Schwoebelinstability
[7] shouldnot occur. We show that randomness associated with the nudeation process does not
destroy
layer-by-layer growth,
aslong
as shot noise and diffusion noise can beneglected.
Whereas the latter two are well understood[8],
very little is known about the nature of fluctuations due to the nudeation process. In this paper we focus on theseproperties by introducing
amodel where all other sources of noise are
intentionally
eliminated in order to see the bare contribution of trie nudeation events. This is achievedby simulating deposition
and diffusionon a coarse scale in a deterministic continuum
approximation.
2. The Model
We assume that
desorption
as well as defects in the film con beneglected
and that the adatomsare bound
irreversibly
whenthey
meet a step or another adatom. Then thegrowth
is controlledby
the ratio of trie surface diffusion constant D to thedeposition
rate F. Forsimplicity
weconsider the one dimensional case. Then the
typical
distance between the island centers ism~
(D /F)~R [9].
We divide the substrate into cells of A~ lattice constants. This
coarsening length
must ofcourse be chosen smaller thon the
typical
distance between nudeation events, otherwise onecould not resolve them. Each cell contains an
integer
numberh(~, t)
ofcompleted loyers
anda
partial filling
0 <m(~, t)
< A~ ontop
of them(Fig. 1).
In order to suppress shot noise and fluctuations in thehopping
ofadatoms, m(x, t)
has to varyco~lt1~luously
rather than atomby
atom. For
example, during
one simulationupdate corresponding
to a time increment At itincreases
by
FA~At due todeposition.
It alsochanges according
to the diffusionequation
m(~,
t +At)
=
m(~, t)
+DAt(A~)~~
xji(~
+à~, t) 21(~, t) +1(~ à~, t)), (i)
where
ni(x, t) /Ax
is the adatomdensity.
For cells in which there is no islandedge,
ni coincides with m.Cells in which there is an island
edge
oct as sinks foradatoms,
ni=
0, thereby filling
up
irreversibly
until mix, t)
exceeds AZ. Then a newloyer
iscompleted
in that cell: The islandedge
invades aneighboring
cell or annihilates with anotheredge (coalescence), h(x, t)
isincremented
by 1,
andm(x, t)
is reducedby
AZ.2000
o oo ~oio
~ o~
°° o .
' ~ °woo °
o°oo.
"
,
~~
°.°,
°° .-.~ o~
o
~° ' Îw
, w
~
)
~~°°
oo
Ob~
Q'à°Î
~ d ~''.
~
°,.
:~~j
~~~~
flàw
~~
~°.
o
~ ~~
~
1000 o° OOh
o Î..
*°é'*
"ao ~ . °
o ;ooo~ao, i
. . »
~ ooo 8* #o O (o ~
.o: o ~
°° ~$
.ào~ ~'k°
&
~% -
~ ;: .o÷oo. .. . °°
500 .~ .~~
%~.~,
° oo , .~o . . .
.~. Oc oo " . *
~,
O.O. o
~ , ~_ " %a
°',"
oa o~o
o ° " ~~_ (
o .oO ai
. °6 '" " O.°"
. ooo- -°
...oo 8'O ° " . +
0 200 400 600 800 1000
h
Fig.
2. Positions of first(.)
and second(o)
nucleation events forlayers
ofheights
< h < looo(D/F =10~)
New islands nudeate
only
in cells without an islandedge.
The nudeation rate has two termsR~u~(z, t)
=
1(~, t) ifà~
+cD(à~)-2 (1(~
+à~, t)
+1(~ àa,, t) )j. (2) They
descnbe the two main processesleading
to a nudeation event: ifalready
one adatom isin the cell at ~
(probability ni),
a second onemay1)
bedeposited
into the same cell or mayii)
diffuse into it from its
neighborhood. Dunng
tiine At nucleationhappens
with aprobability
1-
exp(-RnucAt).
The constant c in(2)
is of order 1. We did simulations for c= 2.5
(results below)
and for 0.6. The exponentsreported
below did notdepend
on this.3. Simulation Results
For the simulations we chose At
=
0.2(Ax)~ ID.
This shows that coarsegraining
makes thealgorithm
very eficient [10]: the number ofupdates
needed forgrowing
a film ofgiven
thicknessis reduced
by
a factor(Ax)~.
As eachupdate
involvesL/Ax cells, computation
time is reducedby
another factor AZ. In most of the simulations we used DIF
=10~,
for which m 12 was found. Coarse graining over AZ= 3 did not
change
the results but reduced thecomputation
time
by
a factor m(Az)~
= 27
compared
to a simulation without coarse graining.We recorded all
positions zn(h)
of the n-th nudeation eventsin
=
1,2,3,.. N(h))
in thelayer
atheight
h.Figure
2 shows thepositions
xilà)
andx2(h)
of the first two nudeationevents
dunng
thegrowth
of1000loyers. Strong temporal
correlationsalong
the h-directionare obvious. In all our simulations no more than two
incomplete layers
were observed at anytime,
so that the nudeation events atheight
hhappen
at a time(in
units ofmonolayers)
h -1 < t < h +1.
We evaluated the
spatial
correlation function among all nucleation events,Gir)
=lvlx, h)vlz
+ r,h)1 lvl~, (3)
the autocorrelation function among all nucleation events,
A(T)
=lv(z,hlv(x,h
+TII lvl~, (41
396 JOURNAL DE
PHYSIQUE
I N°3lO~ Q
~~3
A io'
O 10~
O O
10~
~~ 100
1
Fig.
3. Correlation between ail nucleation sites m two layers ~ersus theirheight
separation. Fit hasslope
-1.35.and the autocorrelation functions among the n-th nucleation events,
~ni~i
"
i~n(~>hi~"(~>h
+~)i i~"i~ i~i
where
Unix, h)
is 1 or 0depending
on whether or not the n-th nucleation event atheight
h
happened
in cell x, andv(x,h)
=
£~ Unix, h).
Theaveraging (...)
was done over x, h(discarding
the 100 initiallayers)
and over 20 runs.iv)
is the average number of nucleation events in alayer
dividedby
the number ofcells, lui
=Axli. Similarly, (uni
= AZIL apart
forn m
Lli,
where an n-th nudeation event does not occur in everylayer.
The
spatial
coi-relation functionGirl
shows theexpected
anticorrelation at short distances:within a distance of a nucleation site further nucleation events are
suppressed.
Onlarger
distances no correlation can be observed among the nucleation events.
Figure
3 shows that thetemporal
correlation among all the nudeation eventsdecays
with a power lawAir)
m~
T~°,
with a= 1.35 + o-1-
(6)
Although
10000layers
were grown,A(T)
coulaonly
be evaluated over two decades in T because of the bad statistics forlarge height
differencesT.
The correlation among the first nudeation events in every
layer decays
much moreslowly, Figure 4,
Ai(T)
m~
aiT~°i,
with ai" 0.48 + 0.08.
(7)
Similarly,
the correlations among the n-th nucleation events were fitted with a power law between T= 5 and
T =
1000, giving
effective exponents an(Fig. 5). They
vary between low valuesm~ 0.4 for the first and the last nudeation events to values between o-1and
0.8, indicating
that the intermediate nudeation events decorrelate faster.Apart
from a decreaseby
about one decade for the first 5 nudeation events theprefactors
an of the power laws remain
essentially
constant(Fig. 6).
TheSharp drop
of theamplitudes
for n > 22 is due to the fact that the number of nudeation events in onelayer
was about 22 for oursystem
size and exceeded this valueonly
veryseldomly.
0bviously,
there must be cancellation of theAn
termsby
the cross correlations(vnvi)
(vn)(vm)
with n#
m sinceA(T) decays
faster than theAn(T)-s.
The anticorrelations areo o
o
10'
Ai o
o
~~s
O
o
10~
Fig.
4. Correlation between first nucleation events in twolayers
~ersus theirheight
separation. Fit hasslope
-0.48.08
o
07
o °
O O
06 O
on
o o
05
~
o
~ o
~ O
0.4 o O O
O ~
~ O
~ ~
~~
0 5 10 15 25 30
n
Fig.
5.Temporal
correlations among n'th nucleation eventsdecay
with exponents on.plausible
as it is veryunlikely
that two nudeation events within mi
mL/2i
appear in the same cell. Dur results show that there is anapproximate
cancellation in theleading
T-dependence
of thepositive
andnegative
terms inA(T)
and the fastdecay (large exponent)
is due to thenon-vanishing
corrections. We cannot be sure, of course, that we see theasymptotic
behavior: If the cancellation is not
perfect, finally
the smallestexponent
should overtake.However,
we have not detected any crossover of this kind.4. A
Simplifled Analytical Approach
In order to understand the results on the correlations
A, An
let us discuss a somewhatsimplified
picture:
we assume that the total number of nudeation events in alayer
is aconstant,
N. As indicatedby
therapid decay
of thespatial correlations,
there is a charactenstic "exclusion zone" of size around each nudeation event. Therefore we imagine the wholesystem
divided398 JOURNAL DE PHYSIQUE I N°3
io~
O
o O
O~
10'
°OOO~
OQO°°~
O CC ° CCC
O 0ll
O
ios
o
o
~~~
0 5 10 15 20 25 30
n
Fig.
6. Amplitudes an oftemporal
correlation function for n'th nucleation events.into N cells of
length
1.The cells in each
layer
are now numbered in the order of the nucleation events(one
percell)
from 1 to N. From
layer
tolayer
one will findonly
smallchanges
in the sequence: mostlikely
the senal number attributed to a cell will notchange.
As mentioned in thebeginning,
the first nucleation event in alayer happens
close to the one in the previouslayer ii-e-
in the samecell).
The reason is that adatom sinks
(island edges)
vamsh therefirst,
when thelayer
fills up, so thatthe adatom
density
will behigher
there than elsewhere on the surface. Hence the nucleationprobability
islargest
there.Similarly
the second nudeation event in the newlayer
will mostlikely happen
in the same cell as in the previouslayer:
after the first nudeation created a first sink for adatoms in the newlayer,
one has to look for theregion
of maximal adatomdensity
outside its
depletion
zone. This will be the region which has been devoid of islandedges
for thenext-to-longest period. By
induction one expects that also the n-th nudeation event has ahigher probability
tohappen,
where it tookplace before,
thananywhere
else.Nevertheless,
due to the stochastic nature of the nucleation process, the first and the second nucleation events may beinterchanged occasionally,
forexample.
Morecomplicated
permuta-tions like
il
-2,
2 - 3~3 -1)
or(1
-3,
3 -1)
will be lessprobable
and theprobability
willrapidly decay
with the range of thejump
in the space of serial numbers. Thus any fixed cellperforms
a random walk in this space. The correlation functionAn(T) corresponds
then to theprobability
that a cell starts with the serial number n and returns to it after Tsteps.
This isa
plausible
model for the observedtemporal
correlations in the absence ofspatial
ones, since the mechanismleading
to the power law timedecay
is thewandenng
of nucleation events not in real space but in the space of their serial numbers. Itpredicts
adecay
likeAn(T)
m~
T~~/~
with exponents on
=1/2
which lits very well to n= 1 but not to medium values of n.
In this
simplified
modelA(T)
vanishesidentically:
there is a nudeation event in every cellin every
loyer.
In this case the cancellation of thepositively
andnegatively
correlated termsis exact. This gives some confidence that indeed there will be an almost
perfect
cancellationin our
simulation,
too. Theremaining
weak correlation may be due to the fluctuation of the nudeation site within a cell of size or due to the fluctuation ofN,
both of which have beenignored
in thesimplified
model.The measured values of an vary between 0.3 and 0.8 with error bars of at least o-1- Pre-
sumably
this variation can be accounted forby making
the random walk of the cells over theserial numbers more realistic. For
example
the nudeation events with serial numbers close toN/2
willexchange
theirpositions
much easier than the first or last ones. From onelayer
to the next several cells maychange
their serial numberssimultaneously,
andlarger step
sizes will be allowed. This makes the combinatonalproblem
more dificult andprobably
decorrelates thenudeation events on diiferent
layers.
5. Continuum
Description
of Stochastic NucleationThe simulations showed no indication for kinetic
roughening [11]
even for values ofD/F
assmall as
10, system
sizes up to L= 10000 and up to 10000
deposited layers
no more than twolayers
wereincomplete
at any time. This agrees with thefinding
for another MBE-modelwithout shot- and diffusion noise
[12].
The randomness of the nudeation events does not lead tosignificant
surfaceroughness,
inspite
of itstemporal
correlations. In thefollowing
we proposea continuum
description
of thegrowth
we simulated andexplain why
stochastic nucleation did not lead to theroughening
of thesurface,
while random diffusion and even more so the shotnoise will make the surface
rough, ultimately.
Dur
starting point
is a coarsegrained description
of thegrowth,
ôth=F-Vj+i~, (8)
where
j
is the surface current and J/ is a noise term. In our simulations theonly
contribution to J/ is nudeation noise andj
is a functional of the adatomdensity
that is determinedby
thedistribution of islaiids and the values of h. Two
questions
bave to be answered: what is the constitutive Iawspecifying
the surface current as a functional ofh,
and what is theappropriate description
of the noise due to stochastic nucleation?The first
question
iseasily
answeredby observing
that thepresent
model does not allow tilt induced currents. No matter what theglobal
tilt of the substrate is, the average currentvanishes due to the
penodic boundary
conditions. Hence the genenc form of the constitutive law isj
=V(KV~h
+À(Vh)~), (9)
where the linear term
only
matters if= 0
[7,13,14].
The fluctuations of the surface current are
govemed by
those of the adatomdensity, p(x,t),
ôj
=Vp. (10)
The
only
source ofdensity
fluctuations on the surface are nucleationevents,
since randomhopping
has been eliminated. Thesedensity
fluctuations are correlatedonly
on short scales of order 1. On a coarsegrained
scale which isimplied by
the continuumdescription
thesedensity
fluctuations can be viewed as
spatially
uncorrelatednoise, (p(x, t)p(x', t))
m~
à(x x').
On the other
hand,
thetemporal
correlation among all the nudeation eventsdirectly
trans- lates into atemporal
correlation among the adatomdensity fluctuations, (p(x,t)p(x,t'))
rw
(t t'(~°,
where a is the same exponent as in(6).
Hence we find that nucleation events lead to
conserved, temporally
correlated current fluc- tuationslô)(X> t)à)lX~ t')1
~v~ô(X Z')
t ~'l~~ (ii)
The fluctuations J/ of the
growth velocity
in(8)
are then thedivergence
of the current fluctu-ations,
1-e-l~(X>t)~lX'>t'))
~v~ôlX X')
tt' l~~ (12)
400 JOURNAL DE
PHYSIQUE
I N°3Now we show that the
spatial
anticorrelation of the current fluctuations on short scalesii-e-
on scale 1) as
expressed by
theregularized V~ô(z z')
counteracts thetemporal
correlation and renders it ineffective for kineticroughening.
Asusual, roughening
is characterizedby dynamical scaling
of theheight-height
correlationfunction, ((h(z, t) h(z
+ r,t))~)
m~
r~~g(r/t~/~)
with theroughness exponent (
and thedynamical
exponent z[11].
Comparing
thescaling
dimensions of the deterministic terms in(8) yields
the exponent identities [7,8,
14]z = 4 for
=
0,
z = 4(
for#
0.(13)
Comparing
thescaling
dimension of the noise term with that of the left hand side of(8)
oneobtains the
scaling
relation[8,13,14]
2( z(2 a)
= -4
d', (14)
where d' is the dimension of the
surface,
d'= 1 in the present case.
Together
with(13)
this fixes the exponents. Weonly
need tospecify
the linear case (À =0),
(o
"(4 d' 4a) /2, (15)
as the
roughness exponent
for the nonhnearequation
isgiven by (
=2(o/(4-a). Equation (15) implies
that forsuficiently
fastdecaying temporal correlations,
a >1-d'/4,
random nudeationdoes not
roughen
the surface. In thepresent
case, for the timessimulated,
the effective value of a islarger
thon3/4,
whichexplains
the absence ofroughening.
6.
Summary
In summary we have shown in a one-dimensional model that
long
time correlations in nudeationevents occur
during layer-by-layer growth.
These are notaccompanied by spatial
correlationssince the mechanism
leading
to the power law timedecay
is thewandering
of nudeation eventsnot in real space but in the space of their serial numbers. In
spite
of the correlations the nudeation noise does notroughen
the surface since the conservation of current fluctuationsleading
to short range anticorrelationscompensates
the slowdecay.
There are several
interesting questions
related to theproblems investigated
here. First, it is clear that in realsystems
nucleation noise coexists with the shot noise and the diffusion noise.It should be
important
to understand how the latter affect thetemporal
correlations described above. Another openproblem
is the behavior inhigher
dimensions. Dursimphfied
random walkargument
isindependent
of thedimensionality
and therefore weexpect
slowdecay
ofcorrelations there as well.
However,
the random walkpicture
uses acoarsening
scale whichis
equivalent
to the island size. For smaller scales themigration
of nudeation events on the island(see
thewigghng
of connectedpatches
inFig. 1)
becomes important and the differentdimensionality
mayplay
a role and could lead to a fasterdecay
of correlations. Thus ~ve do not expect thatroughening
due to nucleation noise would occur since a >1/2 already
leads to smooth surfaces for 2+1 dimensions.Acknowledgments
We hke to thank Harald Kallabis for a careful
reading
of the manuscript. E-S- and J-K- thank theUniversity
ofDuisburg,
D.E.W. and J-K- thank the Isaac NewtonInstitute, University
ofCambridge
forhospitahty.
This work wassupported by
DFG(SFB 166)
and OTKA.References
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