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Structural and emission properties of Tb3+-doped nitrogen-rich silicon oxynitride films

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Academic year: 2021

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Figure  1.  RBS  experimental  spectra  of  the  AD  samples  with  the  corresponding  N  flow
Figure 2. (a) Atomic compositions of the Tb-doped NRSON films as a function of N 2  flow (b)  N ex  (left scale) and  deposition rate (right scale) versus N 2  flow for AD layers
Figure 3: Cross-sectional TEM images for AD (a) and 700°C annealed S 9  samples (b). Some vertical porosities  are clearly observed in the enlarged images in both cases
Figure  4.  1000  °C  annealed  S 9  sample  investigated  through:  (a)  a  cross-sectional  bright  field  TEM  image,  the  corresponding elemental EFTEM maps of (b) oxygen in red color, (c) nitrogen in green color, (d) mix map and (e)  chemical  profil
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