Polymer Electrolyte Fuel Cell Electrodes Grown by Vapor Deposition Techniques

Comparison between ultrathin films of YSZ deposited at the solid oxide fuel cell cathode/electrolyte interface by atomic layer deposition, dip-coating or sputtering.. (2009)

films deposited by distributed electron cyclotron resonance plasma enhanced chemical vapor deposition, Journal of Applied Physics, Vol.. Kemp, Piezo-optical birefringence

To cite this version: Topka, Konstantina Christina and Diallo, Babacar and Samélor, Diane, [et al.] Tunable SiO2 to SiOxCyH films by ozone assisted chemical vapor deposition

Jin, Growth and properties of silicon nitride films prepared by low pressure chemical vapor deposition using trichlorosilane and ammonia, Thin Solid Films. Ohkubo, Silicon

This predicts a good quality of the triple point between fuel, catalyst (Pt) and membrane required for good fuel cells performance. Depending on deposition duration and plasma

Hot filament chemical vapor deposition (HFCVD) using hexafluoropropylene oxide (HFPO) as the precursor gas yielded two sets of films, one with varying OH/COOH content and the

Oxidative chemical vapor deposition (oCVD) was used to deposit conformal coatings of poly(3,4- ethylenedioxythiophene) (PEDOT), a conductive polymer capable

On a per wafer basis for a base case comparing spin-on and CVD organosilicon low-k dielectric films, chemical consumption was 350% higher for the spin-on deposition