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Tunable SiO2 to SiOxCyH films by ozone assisted chemical vapor deposition from tetraethylorthosilicate and hexamethyldisilazane mixtures

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(1)Open Archive Toulouse Archive Ouverte OATAO is an open access repository that collects the work of Toulouse researchers and makes it freely available over the web where possible. This is an author’s version published in: https://oatao.univ-toulouse.fr/27225. Official URL : https://doi.org/10.1016/j.surfcoat.2020.126762. To cite this version: Topka, Konstantina Christina and Diallo, Babacar and Samélor, Diane, [et al.] Tunable SiO2 to SiOxCyH films by ozone assisted chemical vapor deposition from tetraethylorthosilicate and hexamethyldisilazane mixtures. (2020) Surface and Coatings Technology, 407. 126762. ISSN 0257-8972. Any correspondence concerning this service should be sent to the repository administrator: tech-oatao@listes-diff.inp-toulouse.fr.

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(245)  ,1" 20          3 0   ,  2   %    '   6)7  L'’  6  '7    6 7  2.            ,  3 &  2 % '  '  A5       3.

(246)    ,2  ' %      '   3        %     '  (  %     %      '    .        '6– – 7– –('BD=C3 /    '   '     %  ' 3       )  '         '    '   101  2           '   '        '       B:5C3/         %   %  '   %    1" 20 2 .    'G   1" 8%      %  %    2 .   3     . .       %      '     )    ' 2  3        1" 20       ( '3E30  %    

(247) =3E± :35 5

(248) 3@± :3;&, '%       .      ’    A5     .   – –   BD@C3  '

(249) 3E ± ;3:E&,  ,5@;   '  53:± ;3:=&,  ,=;;3 "   .      A5           53;± ;3:D &,      3    1 3BDDC %$2   *"  '            1"   E±

(250) &,      %    3      '         %            '   6:

(251) :;–:=:;◦ 73/      '                3/        .  '0 2

(252) 4 5   6   7%  0    93;± ;35&,3/    2  '     *"  1"     1"   ,0*"  1"     :3<D–53:=  :35D  ;3=–53; &,   BD9–9;C3 /      '          . 1" ''    3        –   –   –657 '  1"       –    ' BD9–9;C3/  %  '  .     –657     '(2/#/!.         2 1" 20       .   .  '     6 33%         '  373.      .   A5  %    2     *"  '  2      2        60 7      61" 73 . '2        2 .   %  3 .  2  .      %      %    ' 3(2/#   % /!.%   '           .    A5     %      <=; ◦    3..  #1 ' ;35@  <3=%   '   –5 '      '   .    <=; ◦ 3  %     '   =

(253) 39   9:3;◦ . %    %           '                '  3(   ) 0#".2        '   '  ) .         %    %  '   A5 3 / ' . (2/#   %      2   '     1" 3 /     '         %         '    %      %      5@;–==; ◦  '   ’.       3     ' G   1" 8%    3. 2. '   '8%  ' %  '  1" 40       %             %               3  

(254)  

(255) 

(256) % '3*3!33   % +3 ,3  *33 333  .            6(/#    ,2   73!3"3/!.      3 3  %     3 "3   "3 %  ' *"%% . 2   3#3$3         *33  3&3  01    3 (3 3  3*3        ’         3 . 2     333%  3*3 +3,3 !3 3 3*3 %   ''' 3 3*3 ') . G     3   

(257) !

(258) " 

(259) 

(260)     % ' .         8 %    3 # $%

(261)  %% .+#6.'+ #2 7      0.$L&$.  .+#2:D20;92;;=@3 ,    G  %  2   0 K    #'  –   *  $    (       610 #/ – "##730     2*$ ' %   0'  60#"(73       "    ,     1    J     %    (/#  .(1(/!  )3 #"" &

(262) # ' ""(

(263) 

(264)          A44 3 '4:;3:;:@4G3 3

(265) ;

(266) ;3:

(267) @D@

(268) 3 ! 

(269) B:C 3(G  L3+    +3 31     .    2%2  *" '0   J30 3 3:5D6:EE;7

(270) 995–

(271) 99D3 B

(272) C 3  131  .3(G. 3&G  3+' $%2  .,*"   '0 2        A /   " ' 0 " 1 ' :E9E 3@@E–@D

(273) 3 B5C J3 O3$ ' M3(' O3O' 0     '  2 4    '   ' ' 0'31'3:;=6

(274) ;:=79:D–9

(275) =3 B<C 3$ ' 3 (3H' O3' !3$  L3, J3 0  .  '   '   4   %  %2.

(276) B=C B@C. BDC B9C. BEC B:;C B::C. B:

(277) C B:5C B:<C. B:=C B:@C B:DC B:9C B:EC B

(278) ;C B

(279) :C B

(280)

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