Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect
Texte intégral
Documents relatifs
Kalman filtering Kalman filtering Prediction model Process noise Least squares: trend + mean annual signal Time series K lm Filtered time series.. scaled by
Electrical parameters, electron density, ammonia density and positive ions are measured in various different plasma conditions.. One of the objectives is to form a complete
Simulations (curves) and measurements (points) for the electron density (upper panel) and the self-bias voltage (lower panel), as a function of the power coupled to the plasma, for
Silver iodide has been the object of a great number of investigations, but there is some disagreement in the literature regarding the phase diagram as well as on the
When oxygen is introduced, this does not give rise to an electronic type conductivity but to an increase in the number of fluoride ion vacancies of
For example, in Fig.2 (a) and (b) curves 2 and 3 show the dependence for the samples S1 and S2 respectively, measured directly after the application of pressure
was measured in situ during and after film deposition, as a function of film thickness, annealing temperature and annealing time, for pure Al films, films deposited in
All the parameters describing the ESR spectra of the salts under pressure, especially the exchange frequencies (Fig. 7) and the activation energies (Figs. 8 and 9),