La résolution latérale, différence entre EFM et KFM

Les deux techniques présentées précédemment dépendent de la capacité C qui se crée entre la pointe et l’échantillon. Comme le montre la Figure I.23, cette capacité n’est pas uniquement due à la zone proche du bout de la pointe qu’on cherche à étudier. Elle comporte également des contributions parasites dues à la présence d’hétérogénéité sur la surface. La présence de ces capacités parasites a plusieurs conséquences. Tout d’abord le potentiel mesuré en un point sera différent du potentiel réel du fait d’un effet de moyenne. Une autre conséquence est la dégradation de la résolution spatiale.

40

Schéma des capacités C1t(z), C2t(z), …, Cit(z), crée entre la sonde AFM et la

Figure I.23.

surface de l’échantillon, avec des potentiels de surface non-homogène [55]

Dans le cas du KFM, la force à ω dépend de la dérivée de la capacité entre la pointe échantillon (capacité utile et parasité). En revanche la mesure en EFM, dépendant de la dérivée seconde de la capacité. Par conséquent, l’EFM sera moins sensible que le KFM aux capacités parasites et aura donc une meilleure résolution latérale.

41

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