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Piezoelectric Aluminum Nitride Resonator for Oscillator

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HAL Id: hal-00989677

https://hal.archives-ouvertes.fr/hal-00989677

Submitted on 12 May 2014

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Piezoelectric Aluminum Nitride Resonator for Oscillator

Olivier Mareschal, Sebastien Loiseau, Aurelien Fougerat, Laurie Valbin, Gaelle Lissorgues, Sébastien Saez, Christophe Dolabdjian, Rachid Bouregba, Gilles

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To cite this version:

Olivier Mareschal, Sebastien Loiseau, Aurelien Fougerat, Laurie Valbin, Gaelle Lissorgues, et al..

Piezoelectric Aluminum Nitride Resonator for Oscillator. IEEE Transactions on Ultrasonics, Fer- roelectrics and Frequency Control, Institute of Electrical and Electronics Engineers, 2010, 57 (3), pp.513-517. �10.1109/TUFFC.2010.1441�. �hal-00989677�

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