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Industrial applications of ion beams at GANIL

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Industrial applications of ion beams at GANIL

C. Bieth

To cite this version:

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213

INDUSTRIAL APPLICATIONS OF HEAVY ION BEAMS AT GANIL

C. Bieth and the S.A.I.F. Group

GANIL- B.P. 5027 - F-14021 Caen Cedex

Introduction

During the last year and after the GANIL shut down for increasing the heavy ion energies (O.A.E.). industrial irradiations have re-started for the production of microporous membranes (BIOPORE) and for the studies of damages induced in electronic components by differents ions (MATR4).

Some other applications have been tested.

Beam line development for industrial aoDlications

For most of the industrial applications, but specially for the production of microporous membranes, stability and reproductibility of the beam parameters are the keys of success. As the irradiation cost is a non negligible part of the total price of products, the irradiation efficiency must be also as high as possible.

With the membrane production and the irradiation of electronic components we have the two extreme ranges of beam parameten :

- For the membrane irradiation the ion energy is less than 10 Me\‘/.4 and we use only the cyclotrons CO + SCCl. Xtnon, Argon and mainly Krypton are delivered with an intensity varying around lS.lOt*pps. The vertical (40 mm) and horizontal (500 mm) sweeped beam width must be very homogenous (i 5%).

The beam stability is extremely important to produce membranes over kilometers, with a constant porosity.

For the irradiation of electronic components various ions must be used on the same products (C, 0, .4r, Kr, Xe) with variable energies between 5 to 45 MeV/A. Using the same vertical and horizontal beam width, the intensity has to be as low as 104~~s.

Both irradiations are done in air and for each type of irradiation we have developed specific measurements and control systems as following :

- Secondary emission multi-wire profiles systems under vacuum (maximum beam intensity of the order of 100 nAe). (figures I - 2).

- Circulating gas multi-wire profils in air with plastic window (beam intensity less than I nAe) (figure 3).

- Non destructive beam transformers.

-.

PROFIL HORIZONTAL

PR 23 KRYPTON S,lMev/A INTENSITE mV 8oi-.--. ~~. I

II

!l’ld

1

1 1 60.. 40 I

~1

~ z”ld 11

i

0 i

-’ i-.-. .__.

1

-20 -16 -10 -6 N”m&: FIL: 8102cm 1,3/w (Pas lmm)

1 ‘L-

16

20 i

PROFIL VERTICAL

PR 23 KRYPTON S,lMev/A INTENSITE mV 140 - 120 . 100 60 i *o 40 20 , 0’ i -m 810206 l/3/90

1

: !

1,

J’

\1! 11

1 l!liili

!&,I

]I I

Ill

/

j*

pj- jrnjiAji!I

-16 -10 -6 0 5 Numero FILS (Pas lmm) Figure 2

Controle du faisceau

(MATAA)

Mesums de fluence

I----

DBtecteur *a Id. Compoeanta L tr.c.9 *Cal. tc.t Figure 3

All these equipments are associated with a computer to control the beam stability on line.

Some other equipments have been improved :

- Higher frequencies for the horizontal (saw-tooth) and vertical sweeping magnets which give a better longitudinal and transverse homogeneity on the film.

- Low ion flux and beam energy measurements.

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214

Main features of the microuorous membranes

The main characteristics of the membrane irradiated at GANIL is the low width of the pore diameter distribution, even with large material thickness (20 to 40 pm) compared to deep membranes or others (1).

On these following figures, comparative tests are done on the flow rate (figure 4), the cumulative pore size distribution (figure 5) and the differential pore size distribution (figure 6).

On each curve we can see the advanages of this type of membrane.

Various materials can be used like polycarbonate, PET and the pore sizes can varie from 0.05 pm to few microns with nominal porosities in the range of 20%.

SCREEN MEMBRANES

Comparative Tests Flow knVmnfcm21 3or-- -- .._ _~ _-..-.- _-__ /’ 2 ..--.-- _I- ,/- 20 1 ,I- : /’ A-’ __/.-,- /- ./ 10 I ,,,,_ A.-.-. , /,‘. -,-j--- *---T k-- ,./*A- J ,;,,’ ,,&Y ,,s _._- o __-, -_--.I._ 1 __- _ -. 0 1 &iure 3 4 5 (bar) .~.___. -. -.-- w?mLwene* 0.2 rm

-- x1 Mwml - x2 (ICuml - BIOPORE (2Owd

N*mur.d “‘I”,. - A8TM 8il.“dWd FII-86

uz 1154 BIOPORE 8.a.

Figure 4

Cum. Pore Size Distribution

Comparative Tests z Number CumuL ,oc-- - CL BO- -k$& ~ i SO' .O- \' : \\ 20 i ~ ~ I iv oL-.-i.---l.--. , '\, \a:,,..-- 0 O,M 0,l Pcx size :;m, 0.25 0.3 0.35 Membranes 0,2 m - xi fl0uml - x2 mmll - alwORE Whnd i

Diff. Pore Size Distribution

Comparative Tests 20’ t 161 10~ 6 i 0 ---. 0 0,7

I

Membranea 0,4 wn j- Xl w3uml - x2 mmll - amPORE (?mmJ I N,,9uvd rn,L” - ASTM BU”d.,d FSW-m

x41 iI*0 BIOPORE ~.a

Figure 6

Electronic comoonents irradiation

The number of errors in the components is recorded during the irradiation at various ions and energies (variable LET from 10 to

1 IO MeV/mg/cm?) c2) and for a given fluence. Sigma is the ratio of this two numbers.

A comparison with the Berkeley test is given (figure 7).

-- ~... -. .-

HEAVY IONS TEST

SF6

9989-D rV\LcmZbE-8 -ITT- --r-~~f-T--l---I 1 100

F ‘y

/ 151 i I ct++cc-l

lob

-k’

1

I I I I ! 11 1 1 1 m 20 so 40 60 80 70 80 90 loo 110 ?m LET hlev/mglcm2) 1L 0

-Ted BERKELEY + -feat QANIL

1 _-- Iu,RA EBWE --- 80 __ _..._--. __ .__._. --- ~-

Figure I

- pur;d “,I”.. - AWN at.na*rd FSM-ae

BIOPORE @.a.

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215

New developments

The research and development program is mainly devoted to other applications of micropore membranes in various field like packaging fresh fruits, vegetables, cheeses . . .

We are also studying adhesion of multi-layers by two technics :

- micro solders obtained by ion bombardment with a range adjusted at the materials junction,

- pre-treatment of one material by creation of oriented pores and then evaporation (or gluing) the second material.

The use of MeV beam (total energy) coming from the future high voltage platform (100 kV) is presently under studies for ion implantation and surface treatment.

References

[I] - These de Doctorat : Revelation chimique de traces latentes daus du polycatbonate. Application aux membranes microporeuses. D. BUSARDO - Juillet 1989

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