Photolithographie UV-profond d’oxoclusters métalliques : Des processus photochimiques aux applications en nanofabrication

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https://tel.archives-ouvertes.fr/tel-01067489

Submitted on 23 Sep 2014

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métalliques : Des processus photochimiques aux

applications en nanofabrication

Fabrice Stehlin

To cite this version:

Fabrice Stehlin. Photolithographie UV-profond d’oxoclusters métalliques : Des processus

photochim-iques aux applications en nanofabrication. Micro et nanotechnologies/Microélectronique. Université

de Haute Alsace - Mulhouse, 2013. Français. �NNT : 2013MULH8376�. �tel-01067489�

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