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Spatially controlled nano-structuring of silicon with femtosecond vortex pulses

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Academic year: 2021

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Figure  S1.  The  schematic  shows  the  experimental  setup.  ND:  neutral  density  filter,  CCD:  charge-coupled-device  camera, G: glass plate, PD: photodiode, P: polarizer, L: Lens, OBJ: objective, QP1: q-plate with topological charge  of ½, QP2: q-pl
Figure S2. The left ordinate in blue shows relative position of the nanocone as a function of voltage on the q-plate,  measured  with  respect  to  its  original  location  when  a  pure  OAM  beam  irradiated  the  silicon  surface
Figure  S3.  (a)  The  AFM  measurements  for  two  nanocones  produced  by  aspheric  lenses  with  NA=0.25  and  NA=0.55
Figure  S4  shows  the  nanocones  separation  decreases  as  the  portion  of  the  Gaussian  beam  decreases or the optical retardation increases
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