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Analysis of systematic errors in Mueller matrix ellipsometry as a function of the retardance of the dual rotating compensators

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HAL Id: hal-02901802

https://hal.univ-lorraine.fr/hal-02901802

Submitted on 17 Jul 2020

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Analysis of systematic errors in Mueller matrix ellipsometry as a function of the retardance of the dual

rotating compensators

L. Broch, A Naciri, L. Johann

To cite this version:

L. Broch, A Naciri, L. Johann. Analysis of systematic errors in Mueller matrix ellipsometry as a function of the retardance of the dual rotating compensators. ICSE-V, 2010, Albany, United States.

2010. �hal-02901802�

(2)

Conclusions

Analysis of systematic errors in Mueller matrix ellipsometry as a function of the retardance of the dual rotating compensators

L. BROCH*

A. EN NACIRI L. JOHANN

L.P.M.D.

METZ / FRANCE

A dual rotating compensators ellipsometer has been developed. It is based on the optical PC

1

SC

2

A configuration, where C1 and C2 are the synchronized continuously rotating compensators [1]. The systematic errors if the compensators are quarter-wave plates have been already studied [2]. Smith [3] has demonstrated that the optimum retardance of a dual-rotating-retarder (DRR) instrument must be equal to 127° compared to the quarter-wave (90°) retarders generally used.

In these conditions random errors are optimized. What about systematic errors ?

broch@univ-metz.fr

Single zone measurement (Table 1)

- 1=2=127° are well suited for errors due to A, P, CS1, CS2 (first and second order).

- For 1 and 2 (first order), 11 coefficients are in the best condition with

1=2=127° and 4 coefficients are in the best condition with 1=2=90°.

- 1=2=90° are well suited for 1² and 2² (second order).

- C=t is related to C1 and C2 by the relations: C1=m1(C-CS1)t and C2=m2(C- CS2)t respectively.

- C1 and C2 are the angles of the fast axes of the first and second compensators at time t.

- CS1 and CS2 are imposed by the mechanical assembly and correspond to the azimuth of the fast axis of the compensators with respect to the plane of incidence at the beginning of the acquisition.

- The frequency of the two compensators are synchronized and related to the base mechanical frequency  by the two integers m1 and m2. In our configuration, m1=3 and m2=5.

- 24 non-zero Fourier coefficients allow to deduce all normalized coefficients of the matrix.

The PC

1

SC

2

A ellipsometer

References

[1] R.W. Collins, in: Handbook of ellipsometry, edited by Harland G. Tompkins and Eugene A. Irene, (William Andrew Publishing & Springer-Verlag, 2005), Chap. 7.3.3, p 546-566.

[2] L. Broch, A. En Naciri, L. Johann, Optics Express 16, 12, 8814-8824 (2008).

[3] M.H. Smith, Appl. Opt., 41, 2488-2493 (2002).

The measured Mueller matrix, Mmeasured, is related to the Mueller matrix of the sample, Msample, by :

d

i

=

90

127

or

What is the best configuration for the compensators ?

where x is the perturbation and dM is the systematic error matrix due to the perturbation. For this study, the effect of each error are studied individually and the remaining optical elements of the ellipsometer are assumed to be ideal.

2nd order 1st order

The systematic errors

4-zone measurement (Table 2)

- There is no difference between 1=2=127° or 90° for errors due to A, P, CS1 and CS2 (the first and the second order).

- For 1 and 2 (first order), 8 coefficients are in the best condition with 1=2=127°

and 4 coefficients are in the best condition with 1=2=90°.

- 1=2=90° are well suited for 1² and 2² (second order).

The azimutal errors are : - the analyzer, dA

- the polarizer, dP

- the compensators,

dCS1 and dCS2

The birefringence errors are : - the (optional) windows,

dW1 and dW2 - the compensators, dd1 and dd2

Some errors can be removed if a 4-zone averaging measurement method is performed.

It is defined as:

P1-19

The detected light has the following form :

errors are smaller if 1=2 = 127°

errors are smaller if 1=2 = 90°

Systematic errors (1st and 2nd order) obtained with 1=2=90° and 1=2=127° for single measurement (Table 1) and 4-zone averaging measurement (Table 2).

For CS1 , CS2 , CS12 and CS22 , the errors are defined in the simple case, CS1=CS2=0°.

: errors are identical (1=2 = 127° or 90°) 0 : errors are null (1=2= 127° or 90°)

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