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Fault prognostics of micro-electro-mechanical systems using particle filtering

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Academic year: 2021

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Figure

Fig. 1. Prognostics and Health Management cycle. (Fig. 1) (Lebold and Thurston (2001))
Fig. 2. Overview of the proposed prognostics approach. from small components (e.g. bearings (Tobon-Mejia et al
Fig. 3. SIR particle filter for fault prognostics (adapted from Saha and Goebel (2011)).
Fig. 6. Time response of the MEMS valve. At 8 V , the membrane moves (image 1) to create an output or an input of the air (circled part)
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