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Casimir forces on a silicon micromechanical chip

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Figure  2  |  Calibration  of  the  device  using  electrostatic  force  gradient.  a,  Oscillation amplitude of the beam and its  X quadrature that is in phase with the  periodic  driving  force
Figure 3 | Measured force gradient F’ c  between the beam and the movable  electrode as a function of separation  d after compensating for the residual

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