A High-Q Microwave MEMS Resonator

The single capacitor has been successfully integrated into a 4 × 2 shunt capacitor array which permits to obtain a larger values of the capacitance and paves the way to

Les agents de la troisième génération, la lévofloxacine, la gatifloxacine, la moxifloxacine, la gré- pafloxacine, la gémifloxacine et la sparfloxacine, possè- dent un spectre

Mechanical fatigue behaviour of gold material applied to MEMS structures is studied by a special micro fatigue- machine; the pull-in voltage is used to monitor the damage progress

In this study, we design and simulate a DR structure that incorporates a SnO 2 sensitive layer coupled with microwave waveguides in coplanar topology for high performance in term

A single sensor cell consists of the hermetically vacuum sealed container with a small portion of HDPE placed inside and the chamber with thin silicon membrane (Fig.. Under

After the fast calculations usin g Timoschenko’s plates and shells theory (what we can do as the wide over thickness ration for our membrane is high), we can easily

The reason for this is that in the latter reference the electrostatic force is not derived as the first variation with respect to u of the electrostatic energy E e (u) as done

Abstract—A high Q optical resonator and ultra-low losses of a silicon suspended waveguide, are experimentally measured and presented, in order to demonstrate the working of a