Fabrication of suspended plate MEMS resonator by micro-masonry

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(1)Fabrication of suspended plate MEMS resonator by micro-masonry Adhitya Bhaswara. To cite this version: Adhitya Bhaswara. Fabrication of suspended plate MEMS resonator by micro-masonry. Micro and nanotechnologies/Microelectronics. Université Paul Sabatier - Toulouse III, 2015. English. �NNT : 2015TOU30325�. �tel-01291780v2�. HAL Id: tel-01291780 https://tel.archives-ouvertes.fr/tel-01291780v2 Submitted on 14 Dec 2016. HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers.. L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés..

(2) 5)µ4& &OWVFEFMPCUFOUJPOEV. %0$503"5%&-6/*7&34*5²%&506-064& %ÏMJWSÏQBS Université Toulouse 3 Paul Sabatier (UT3 Paul Sabatier). 1SÏTFOUÏFFUTPVUFOVFQBS Adhitya BHASWARA -F mercredi 25 novembre 2015. 5Jtre : Fabrication of Suspended Plate MEMS Resonator by Micro-Masonry ED GEET : Micro et Nanosystèmes. 6OJUÏEFSFDIFSDIF Laboratoire d'analyse et d'architectures des systèmes (UPR 8001). %JSFDUFVS T EFʾÒTF Docteur Liviu NICU Docteur Thierry LEICHLE 3BQQPSUFVST Professeur Isabelle DUFOUR Docteur Lionel BUCHAILLOT "VUSF T NFNCSF T EVKVSZ Professeur Frederic MORANCO - Examinateur Docteur Vincent AGACHE - Examinateur.

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